Methods and apparatus for novel cleanspace fabricators

Patent metadata

Field	Value
Publication number	US-2019109032-A1
Application number	US-201816213864-A
Country	US
Kind code	A1
Filing date	Dec 7, 2018
Priority date	Jun 18, 2005
Publication date	Apr 11, 2019
Grant date	—

Abstract

The present disclosure provides various apparatus and methods for novel cleanspace fabricator designs. In some examples, a cleanspace fabricator may be comprised of vertically stacked tools wherein the product and the processing tools are conveyed through the cleanspace. The fabricator may comprise a processor performing cognitive computing algorithms. In some examples, the processor may be located at a remote location and communication with the cleanspace fabricator. Product may be comprised of or processed upon substrates in some examples. In other examples product may be comprised of materials contained within vessels. In some examples the product within vessels may be in liquid or powder form.

First claim

What is claimed is:

1 . A fabricator for processing a product comprising:
a first tool chassis; a first toolpod, wherein the first toolpod is connected to the first tool chassis, wherein through the first tool chassis the first toolpod is connected to at least a first utility service of the fabricator; a second tool chassis; wherein the second tool chassis is located within the fabricator such that at least a portion of the second tool chassis is located in a first plane that is vertically above a second plane containing at least a first portion of the first tool chassis; a vertically deployed cleanspace; wherein a first toolport on the first toolpod is located at least partially within the vertically deployed cleanspace, wherein a removal of the first toolpod conveys the first toolpod through the cleanspace; a processor performing cognitive computing algorithms, wherein the cognitive computing algorithms comprises one or more of decision processing, sensitivity analysis, and rule determination; coordinating the removal of the first toolPod with the processor performing cognitive computing algorithms; and wherein the processor provides control data to the first toolPod, wherein the control data controls a first process performed within the first toolPod and wherein the control data is calculated at least in part by the performing of cognitive computing algorithms.

2 . The fabricator of claim 1 further comprising a substrate, wherein the substrate comprises a surface upon which a three-dimensional printing process has been performed.

3 . The fabricator of claim 1 further comprising a substrate, wherein the substrate comprises a microfluidic processing network.

4 . The fabricator of claim 1 further comprising a vessel, wherein a work product is contained within the vessel.

5 . The fabricator of claim 4 wherein the vessel contains a pharmaceutical.

6 . A method for processing a product; the method comprising:
obtaining a fabricator comprising at least a first vertically deployed cleanspace, at least a first tool chassis, at least a first toolPod attached to the first tool chassis and a processor performing cognitive computing algorithms, wherein the cognitive computing algorithms comprises one or more of decision processing, sensitivity analysis, and rule determination; wherein the processor provides control data to the first toolPod, wherein the control data controls a first process performed within the first toolPod and wherein the control data is calculated at least in part by the performing of cognitive computing algorithms; processing a first product in the first toolPod with the control data; and handling a first product at a tool port of the first toolPod within the first vertically deployed cleanspace.

7 . The fabricator of claim 6 wherein the product comprises a substrate.

8 . The fabricator of claim 7 wherein the substrate is a wafer.

9 . The fabricator of claim 8 wherein the wafer is comprised of semiconductor.

10 . The fabricator of claim 9 wherein the product comprises a material in a vessel.

11 . The fabricator of claim 10 wherein the product comprises a pharmaceutical.

12 . A fabricator for processing a product comprising:
a first tool chassis; a first toolpod, wherein the first toolpod is connected to the first tool chassis, wherein through the first tool chassis the first toolpod is connected to at least a first utility service of the fabricator; a second tool chassis; wherein the second tool chassis is located within the fabricator such that at least a portion of the second tool chassis is located in a first plane that is vertically above a second plane containing at least a first portion of the first tool chassis; a vertically deployed cleanspace; wherein a first tool port on the first toolpod is located at least partially within the vertically deployed cleanspace, wherein a removal of the first toolpod conveys the first toolpod through the cleanspace; wherein the first toolpod is located upon a first vessel comprising a first workproduct; and wherein removal of the first toolpod leaves the first vessel at its first location; and wherein removal of the first vessel from its first location may convey the first vessel through the cleanspace.

13 . The fabricator of claim 12 further comprising a substrate, wherein the substrate comprises a microfluidic processing network.

14 . The fabricator of claim 12 wherein the vessel contains a pharmaceutical.

Assignees

• Flitsch Frederick A

Inventors

• Flitsch Frederick A

Classifications

• H10P72/3222

  Loading to or unloading from a conveyor · CPC title

• H10P72/3221

  Overhead conveying · CPC title

• H10P72/3216

  using a general scheme of a conveying path within a factory · CPC title

• H10P72/3202

  Mechanical details, e.g. rollers or belts · CPC title

• H10P72/0612 Primary

  Production flow monitoring, e.g. for increasing throughput · CPC title