Eddy current sensor, eddy current sensor assembly, and polishing apparatus
US-2024399536-A1 · Dec 5, 2024 · US
US2019086237A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2019086237-A1 |
| Application number | US-201816156939-A |
| Country | US |
| Kind code | A1 |
| Filing date | Oct 10, 2018 |
| Priority date | Jun 18, 2014 |
| Publication date | Mar 21, 2019 |
| Grant date | — |
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A magnetic sensor device includes: a magnetic circuit for forming a magnetic field, a magnetoresistance effect element, and a heat dissipater. The magnetoresistance effect element outputs changes in the magnetic field as changes in a resistance value, and is arranged on a surface (of a +Z side) of the magnetic circuit at a conveyance path side thereof. The heat dissipater is arranged in close contact with the magnetic circuit at the opposite side thereof (−Z side) from the conveyance path.
Opening claim text (preview).
1 : A magnetic sensor device comprising: a magnetic circuit configured to form a magnetic field; a magnetoresistance effect element, mounted on a first surface of the magnetic circuit on a conveyance path side of the magnetic circuit for an object to be detected by the magnetic circuit, and configured to output a change of the magnetic field as a change of a resistance value; and a heat dissipater disposed in direct contact with a second surface of the magnetic circuit other than the first surface of the magnetic circuit on the conveyance path side of the magnetic circuit, the second surface being opposite the first surface, wherein the magnetic circuit includes: a magnet having a first surface and a second surface opposite the first surface, a metallic carrier defining the first surface of the magnetic circuit on the conveyance path side of the magnetic circuit, and having a second surface opposite the first surface of the magnetic circuit that is in direct contact with the first surface of the magnet, and a yoke having a first surface in direct contact with the second surface of the magnet, and defining the second surface of the magnetic circuit in direct contact with the heat dissipater, and the metallic carrier includes: a magnetic body upon which is disposed the magnetoresistance effect element, and a non-magnetic body bonded to the magnetic body and carrying a signal processor electrically connected to the magnetoresistance effect element. 2 : The magnetic sensor device according to claim 1 , wherein the heat dissipater includes: a base in the form of a plate, and a pair of fins extending away from the magnetic circuit from respective opposite conveyance-direction ends of the base. 3 : The magnetic sensor device according to claim 1 , wherein the magnetic sensor device further comprises a housing in which a first hole, a second hole, and a third hole are formed continuously in a direction orthogonal to the first surface of the magnetic circuit on the conveyance path side of the magnetic circuit and orthogonal to a conveyance direction, the first hole contains the metallic carrier and the magnetoresistance effect element, the second hole contains the magnet and the yoke, and the third hole contains the heat dissipater. 4 : The magnetic sensor device according to claim 3 , wherein at a surface of the housing opposite the first surface of the magnetic circuit on the conveyance path side of the magnetic circuit are provided: a mounting surface configured to mount a circuit board, and an offset surface offset from the mounting surface in a direction toward the first surface of the magnetic circuit on the conveyance path side of the magnetic circuit. 5 : The magnetic sensor device according to claim 3 , wherein the heat dissipater directly contacts an inner circumferential surface of the housing that defines the third hole. 6 : The magnetic sensor device according to claim 3 , wherein the magnet and the yoke are spaced from any circumferential surface of the housing that defines the third hole. 7 : The magnetic sensor device according to claim 3 , wherein in a cross-sectional view, the first hole is wider than the second hole. 8 : The magnetic sensor device according to claim 1 , wherein in a cross-sectional view, the heat dissipater is wider than the yoke. 9 : The magnetic sensor device according to claim 1 , wherein the magnetic body and the non-magnetic body of the metallic carrier are arranged beside each other so as to form a first portion and a second portion, respectively, of the first surface of the magnetic circuit on the conveyance path side of the magnetic circuit. 10 : The magnetic sensor device according to claim 1 , wherein the heat dissipater consists of: a base in the form of a plate, and a pair of fins extending away from the magnetic circuit from respective opposite conveyance-direction ends of the base. 11 : A magnetic sensor device comprising: a magnetic circuit configured to form a magnetic field; a magnetoresistance effect element, mounted on a first surface of the magnetic circuit on a conveyance path side of the magnetic circuit for an object to be detected by the magnetic circuit, and configured to output a change of the magnetic field as a change of a resistance value; a heat dissipater fixedly directly connected to a second surface of the magnetic circuit other than the first surface of the magnetic circuit on the conveyance path side of the magnetic circuit, the second surface being opposite the first surface; and a housing in which a first hole, a second hole, and a third hole are formed continuously in a direction orthogonal to the first surface of the magnetic circuit on the conveyance path side of the magnetic circuit and orthogonal to a conveyance direction, wherein a first portion of the magnetic circuit is provided in the first hole, a second portion of the magnetic circuit is provided in the second hole, and the heat dissipater is provided in the third hole. 12 : The magnetic sensor device according to claim 11 , wherein the magnetic circuit includes: a magnet having a first surface and a second surface opposite the first surface, a metallic carrier defining the first surface of the magnetic circuit on the conveyance path side of the magnetic circuit, and having a second surface opposite the first surface of the magnetic circuit that is in contact with the first surface of the magnet, and a yoke having a first surface in contact with the second surface of the magnet, and defining the second surface of the magnetic circuit in contact with the heat dissipater, and the metallic carrier includes: a magnetic body upon which is disposed the magnetoresistance effect element, and a non-magnetic body bonded to the magnetic body and carrying a signal processor electrically connected to the magnetoresistance effect element. 13 : The magnetic sensor device according to claim 12 , wherein the magnetic body and the non-magnetic body of the metallic carrier are arranged beside each other so as to form a first portion and a second portion, respectively, of the first surface of the magnetic circuit on the conveyance path side of the magnetic circuit. 14 : The magnetic sensor device according to claim 11 , wherein in a cross-sectional view, the first hole is wider than the second hole. 15 : The magnetic sensor device according to claim 11 , wherein the heat dissipater includes: a base in the form of a plate, and a pair of fins extending away from the magnetic circuit from respective opposite conveyance-direction ends of the base. 16 : The magnetic sensor device according to claim 11 , wherein the heat dissipater directly contacts an inner circumferential surface of the housing that defines the third hole. 17 : The magnetic sensor device according to claim 11 , wherein the magnet and the yoke are spaced from any circumferential surface of the housing that defines the third hole. 18 : The magnetic sensor device according to claim 11 , wherein the heat dissipater consists of: a base in the form of a plate, and a pair of fins extending away from the magnetic circuit from respective opposite conveyance-direction ends of the base.
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