Display panel, production method of the same, and display apparatus

Patent metadata

Field	Value
Publication number	US-2019067331-A1
Application number	US-201816034429-A
Country	US
Kind code	A1
Filing date	Jul 13, 2018
Priority date	Aug 30, 2017
Publication date	Feb 28, 2019
Grant date	—

Abstract

This disclosure discloses a display panel, a production method thereof, and a display apparatus. This method comprises: forming a pattern of a first metal layer on a base substrate and a pattern of a metal oxide conductive layer being electrically connected to the first metal layer by at least one through hole at a side of the first metal layer away from the base substrate; forming a reductive metal compound layer on a surface of the first metal layer at a side away from the base substrate before forming the pattern of the metal oxide conductive layer; treating the reductive metal compound layer and the metal oxide conductive layer after forming the pattern of the metal oxide conductive layer so that the reductive metal compound layer is oxidized into a second metal layer and metal particles are produced at the surface of the metal oxide conductive layer.

First claim

What is claimed is:

1 . A production method of a display panel, comprising:
forming a pattern of a first metal layer on a base substrate and a pattern of a metal oxide conductive layer at a side of the first metal layer away from the base substrate, the metal oxide conductive layer being electrically connected to the first metal layer by at least one through hole; wherein the production method further comprises steps of:
forming a reductive metal compound layer on a surface of the first metal layer at the side away from the base substrate before forming the pattern of the metal oxide conductive layer; and
treating the reductive metal compound layer and the metal oxide conductive layer after forming the pattern of the metal oxide conductive layer, so that the reductive metal compound layer is oxidized into a second metal layer and metal particles are produced at a surface of the metal oxide conductive layer at a side adjacent to the base substrate by reduction.

2 . The production method according to claim 1 , wherein said forming a reductive metal compound layer on a surface of the first metal layer at a side away from the base substrate comprises: forming a reductive metal compound layer on a surface of the first metal layer at a side away from the base substrate by a reaction between a solution of a metal salt and a reducing agent.

3 . The production method according to claim 1 , wherein said forming a reductive metal compound layer on a surface of the first metal layer at a side away from the base substrate comprises: performing plasma treatment using a reductive gas on the surface of the first metal layer at the side away from the base substrate.

4 . The production method according to claim 1 , wherein the reductive metal compound layer is a metal hydride layer.

5 . The production method according to claim 1 , wherein the reductive metal compound layer is a copper hydride layer.

6 . The production method according to claim 1 , wherein the reductive metal compound layer has a thickness of 10 nm to 20 nm.

7 . The production method according to claim 5 , wherein the copper hydride layer is formed by a reaction between a copper salt and a reducing agent.

8 . The production method according to claim 3 , wherein a metal material used in the first metal layer is the same as a metal material used in the second metal layer.

9 . The production method according to claim 3 , wherein said performing plasma treatment using a reductive gas on the surface of the first metal layer at a side away from the base substrate comprises: performing plasma treatment using one or more gases selected from H 2 , NH 3 , N 2 H 4 , H 2 S, CH 4 , C 2 H 6 or HCN on the surface of the first metal layer at a side away from the base substrate.

10 . The production method according to claim 1 , wherein said treating the reductive metal compound layer and the metal oxide conductive layer so that the reductive metal compound layer is oxidized into a second metal layer and metal particles are produced at the surface of the metal oxide conductive layer at the side adjacent to the base substrate by reduction comprises: heating the base substrate after forming the pattern of the metal oxide conductive layer.

11 . The production method according to claim 10 , wherein the base substrate after forming the pattern of the metal oxide conductive layer is heated to 60° C. to 100° C.

12 . The production method according to claim 1 , wherein before said forming a pattern of a first metal layer on a base substrate, the production method further comprises forming a barrier metal layer on the base substrate.

13 . The production method according to claim 1 , wherein said forming a reductive metal compound layer on a surface of the first metal layer at a side away from the base substrate before forming the pattern of the metal oxide conductive layer comprises:
forming a reductive metal compound layer on a surface of the first metal layer at a side away from the base substrate after forming the first metal layer and before forming the pattern of the first metal layer; or forming a reductive metal compound layer on a surface of the first metal layer at a side away from the base substrate after forming the pattern of the first metal layer and before forming the through hole conducting the first metal layer and the metal oxide conductive layer; or forming a reductive metal compound layer on a surface of the first metal layer at a side away from the base substrate after forming the through hole conducting the first metal layer and the metal oxide conductive layer and before forming the pattern of the metal oxide conductive layer.

14 . The production method according to claim 1 , wherein the first metal layer is a copper layer or an aluminum layer.

15 . The production method according to claim 1 , wherein the metal oxide conductive layer is an indium tin oxide layer.

16 . The production method according to claim 1 , wherein the metal oxide conductive layer has a thickness of 40 nm to 100 nm.

17 . The production method according to claim 12 , wherein a material of the barrier metal layer is selected from Mo, a MoNb alloy, Ti, or a MoTi alloy.

18 . The production method according to claim 12 , wherein the barrier metal layer has a thickness of 20 nm to 50 nm.

19 . A display panel, which is produced by the production method of the display panel according to claim 1 .

20 . A display apparatus, comprising the display panel according to claim 19 .

Assignees

• Boe Technology Group Co Ltd
• Hefei Boe Optoelectronics Tech

Inventors

• Xu Dezhi
• Gong Kui

Classifications

• H01L27/1259

  Electricity · mapped topic

• H01L33/005

  Electricity · mapped topic

• H01L33/42

  Electricity · mapped topic

• H01L27/124 Primary

  Electricity · mapped topic

• H10D86/021 Primary

  of multiple TFTs · CPC title