X-ray spectrometer

Patent metadata

Field	Value
Publication number	US-2019064084-A1
Application number	US-201815865992-A
Country	US
Kind code	A1
Filing date	Jan 9, 2018
Priority date	Aug 23, 2017
Publication date	Feb 28, 2019
Grant date	—

Abstract

An x-ray spectrometer includes: an x-ray plasma source that produces first x-rays; an x-ray optic in optical communication with the x-ray plasma source and that: receives the first x-rays from the x-ray plasma source; focuses the first x-rays to produce second x-rays; and communicates the second x-rays to a sample that produces product x-rays in response to receipt of the second x-rays and second light; and a microcalorimeter array detector in optical communication with the sample and that receives the product x-rays from the sample.

First claim

What is claimed is:

1 . An x-ray spectrometer comprising:
an x-ray plasma source that produces first x-rays; an x-ray optic in optical communication with the x-ray plasma source and that:
receives the first x-rays from the x-ray plasma source;
focuses the first x-rays to produce second x-rays; and
communicates the second x-rays to a sample that produces product x-rays in response to receipt of the second x-rays and second light; and
a microcalorimeter array detector in optical communication with the sample and that receives the product x-rays from the sample.

2 . The x-ray spectrometer of claim 1 , further comprising a second light source in optical communication with the sample and that produces the second light and communicates the second light to the sample,
wherein the sample produces the product x-rays in response to receipt of the second x-rays and the second light.

3 . The x-ray spectrometer of claim 1 , further comprising a first light source in optical communication with the x-ray plasma source and that produces first light and communicates the first light to the x-ray plasma source,
wherein the x-ray plasma source produces the first x-rays in response to receipt of the first light.

4 . The x-ray spectrometer of claim 1 , further comprising an analyzer in electrical communication with the microcalorimeter array detector and that receives a detector signal from the microcalorimeter array detector.

5 . The x-ray spectrometer of claim 4 , wherein the analyzer determines an x-ray spectrum of the sample from the detector signal.

6 . The x-ray spectrometer of claim 1 , further comprising:
a calibrant target in optical communication with the microcalorimeter array detector and that produces second reference x-rays, from first reference x-rays.

7 . The x-ray spectrometer of claim 6 , further comprising:
a reference x-ray source in optical communication with calibrant target and that produces the first reference x-rays.

8 . A process for performing x-ray spectroscopy, the process comprising:
providing the x-ray spectrometer of claim 1 ; producing the first x-rays; receiving, by the x-ray optic, the first x-rays from the x-ray plasma source; focusing, by the x-ray optic, the first x-rays; producing, by the x-ray optic, the second x-rays; communicating the second x-rays to the sample; receiving, by the sample, second light; producing product x-rays in response to receipt of the second x-rays and the second light; and receiving, by the microcalorimeter array detector, the product x-rays from the sample to perform x-ray spectroscopy.

9 . The process of claim 8 , further comprising:
producing the second light by a second light source that is in optical communication with the sample; communicating the second light to the sample; and producing, by the sample, the product x-rays in response to receipt of the second x-rays and the second light.

10 . The process of claim 9 , further comprising:
producing first light by a first light source in optical communication with the x-ray plasma source; communicating the first light to the x-ray plasma source; and producing, by the x-ray plasma source, the first x-rays in response to receipt of the first light.

11 . The process of claim 9 , further comprising:
receiving a detector signal from the microcalorimeter array detector by an analyzer in communication with the microcalorimeter array detector.

12 . The process of claim 4 , further comprising:
determining, by the analyzer, an x-ray spectrum of the sample from the detector signal.

13 . The process of claim 1 , further comprising:
receiving, by a calibrant target in optical communication with the detector, first reference x-rays; producing second reference x-rays by the calibrant target from the first reference x-rays.

14 . The process of claim 6 , further comprising:
producing the first reference x-rays from a reference x-ray source that is in optical communication with the calibrant target.

Assignees

• Government Of The Us Secretary Of Commerce

Inventors

• Ullom Joel
• O'Neil Galen
• Avila Luis Miaja
• Silverman Kevin
• Swetz Daniel
• Jimenez Ralph
• Doriese William Bertrand
• Hilton Gene
• Reintsema Carl
• Schmidt Daniel
• Alpert Bradley K
• Uhlig Jens
• Joe Young
• Fullagar Wilfred K
• Sundstrom Villy
• Maasilta Ilari
• Fowler Joseph

Classifications

• G01T1/36

  Measuring spectral distribution of X-rays or of nuclear radiation {spectrometry (pulse selection circuits per se H03K; investigation of materials by radiation diffraction G01N23/20; spectrometer tubes H01J49/00)} · CPC title

• G01N23/223 Primary

  by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence · CPC title

• G01N23/2206

  Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement · CPC title

• G01N23/2076

  for spectrometry, i.e. using an analysing crystal, e.g. for measuring X-ray fluorescence spectrum of a sample with wavelength-dispersion, i.e. WDXFS · CPC title

• G01N2223/076

  X-ray fluorescence · CPC title