Radiation Analysis Apparatus

Patent metadata

Field	Value
Publication number	US-2019033237-A1
Application number	US-201816041905-A
Country	US
Kind code	A1
Filing date	Jul 23, 2018
Priority date	Jul 25, 2017
Publication date	Jan 31, 2019
Grant date	—

Abstract

A radiation analysis apparatus includes an excitation source unit irradiating an object, for which the radiation analysis apparatus analyzes property or a structure, with a first radiation, a radiation detection unit including three or more radiation detectors that detect a second radiation generated from the object irradiated with the first radiation, a radiation focusing unit disposed between the object and the radiation detection unit, and focusing the second radiation, a position changing unit changing a relative positional relationship between the radiation focusing unit and the radiation detection unit, and a control unit controlling the position changing unit to change the positional relationship, based on first information which is stored in a storage unit and indicates an intensity distribution of the second radiation emitted from the radiation focusing unit and second information indicating a distribution based on a detection count of the second radiation detected by each of the radiation detectors.

First claim

What is claimed is:

1 . A radiation analysis apparatus comprising:
an excitation source unit configured to irradiate an object, for which the radiation analysis apparatus analyzes property or a structure, with a first radiation; a radiation detection unit including three or more radiation detectors configured to detect a second radiation generated from the object irradiated with the first radiation; a radiation focusing unit disposed between the object and the radiation detection unit, and configured to focus the second radiation; a position changing unit configured to change a relative positional relationship between the radiation focusing unit and the radiation detection unit; and a control unit configured to control the position changing unit to change the positional relationship, based on first information which is stored in a storage unit and indicates an intensity distribution of the second radiation emitted from the radiation focusing unit and second information which indicates a distribution based on a detection count of the second radiation detected by each of the radiation detectors.

2 . The radiation analysis apparatus according to claim 1 ,
wherein the first information is information indicating an intensity distribution of a focus of the radiation focusing unit.

3 . The radiation analysis apparatus according to claim 1 ,
wherein the first information is information indicating an intensity distribution corrected by a user of the radiation analysis apparatus, the information indicates an intensity distribution of a focus of the radiation focusing unit.

4 . The radiation analysis apparatus according to claim 1 ,
wherein the first information is information indicating an intensity distribution in which each of the radiation detectors detects the second radiation with a high degree of detection efficiency.

5 . The radiation analysis apparatus according to claim 4 ,
wherein the first information is information indicating an intensity distribution in which each of the radiation detectors detects the second radiation with a highest degree of detection efficiency.

6 . The radiation analysis apparatus according to claim 1 ,
wherein the radiation focusing unit is a capillary.

7 . The radiation analysis apparatus according to claim 1 ,
wherein the control unit calculates a count rate of the second radiation detected per unit time by each of the radiation detectors, and calculates, as the second information, a distribution of the count rate calculated for each radiation detector.

8 . The radiation analysis apparatus according to claim 1 ,
wherein the control unit controls the position changing unit to change the positional relationship in a direction perpendicular to a surface on which the radiation detectors are arranged, based on a profile of a function representing the intensity distribution indicated by the first information and a profile of a function representing the distribution indicated by the second information.

9 . The radiation analysis apparatus according to claim 1 ,
wherein the control unit controls the position changing unit to change the positional relationship in a direction along a surface on which the radiation detectors are arranged, based on a peak of the intensity distribution indicated by the first information and a peak of the distribution indicated by the second information.

Assignees

• Hitachi High Tech Science Corp

Inventors

• Nakayama Satoshi
• Tanaka Keiichi
• Nagata Atsushi
• Chinone Kazuo

Classifications

• H01J37/265

  Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination · CPC title

• H01J2237/0245

  Moving whole optical system relatively to object · CPC title

• H01J37/023 Primary

  Means for mechanically adjusting components not otherwise provided for · CPC title

• G01N23/2252 Primary

  Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA] · CPC title

• G01T1/17

  Circuit arrangements not adapted to a particular type of detector {(pulse-selection circuits H03K, G01R)} · CPC title