Apparatus and method for analyzing evolved gas

Patent metadata

Field	Value
Publication number	US-2019027353-A1
Application number	US-201816041683-A
Country	US
Kind code	A1
Filing date	Jul 20, 2018
Priority date	Jul 21, 2017
Publication date	Jan 24, 2019
Grant date	—

Abstract

Disclosed is an apparatus and method for analyzing an evolved gas, wherein the precision of detection of a gas component is improved without enlarging the apparatus. The apparatus includes a gas component evolving unit, a detection member for detecting the gas component, and a mixed gas channel for allowing a mixed gas containing the gas component and carrier gas to flow therethrough, and further includes a branch channel branched from the mixed gas channel, an inert gas channel for allowing an inert gas to flow therethrough, a first flow rate regulator for adjusting the flow rate of the carrier gas, a second flow rate regulator for adjusting the flow rate of the inert gas, and a flow rate control unit for controlling the second flow rate regulator such that the flow rate of the mixed gas guided to the detection member is a predetermined value.

First claim

What is claimed is:

1 . An apparatus for analyzing an evolved gas, comprising:
a gas component evolving unit configured to evolve a gas component contained in a sample, a detection member configured to detect the gas component evolved from the gas component evolving unit, and a mixed gas channel configured to connect the gas component evolving unit and the detection member to each other and to allow a mixed gas comprising the gas component and a carrier gas for guiding the gas component to the detection member to flow therethrough, and further comprising: a branch channel branched from the mixed gas channel and open to an outside, an inert gas channel joined to the mixed gas channel at a junction downstream of the branch channel such that an inert gas is allowed to flow therethrough, a first flow rate regulator configured to adjust a flow rate F 1 of the carrier gas, a second flow rate regulator configured to adjust a flow rate F 4 the inert gas flowing through the inert gas channel, and a flow rate control unit configured to control the second flow rate regulator such that a flow rate of the mixed gas guided to the detection member is a predetermined value.

2 . The apparatus of claim 1 , wherein a discharge pressure regulator for adjusting a discharge pressure of the mixed gas discharged from the branch channel is provided at a discharge side of the branch channel.

3 . The apparatus of claim 1 , wherein the detection member is a mass spectrometer, and an ion source is provided between the mixed gas channel and the mass spectrometer so as to ionize the gas component of the mixed gas, and
the flow rate control unit controls the first flow rate regulator so as to increase the flow rate F 1 when a detection signal from the detection member is less than a predetermined range.

4 . The apparatus of claim 2 , wherein the detection member is a mass spectrometer, and an ion source is provided between the mixed gas channel and the mass spectrometer so as to ionize the gas component of the mixed gas, and
the flow rate control unit controls the first flow rate regulator so as to increase the flow rate F 1 when a detection signal from the detection member is less than a predetermined range.

5 . The apparatus of claim 3 , further comprising a flow rate measurement instrument for measuring the flow rate of the mixed gas flowing into the junction or the flow rate of the mixed gas discharged from the branch channel.

6 . The apparatus of claim 4 , further comprising a flow rate measurement instrument for measuring the flow rate of the mixed gas flowing into the junction or the flow rate of the mixed gas discharged from the branch channel.

7 . A method of analyzing an evolved gas using an apparatus for analyzing an evolved gas comprising a gas component evolving unit configured to evolve a gas component contained in a sample, a detection member configured to detect the gas component evolved from the gas component evolving unit, and a mixed gas channel configured to connect the gas component evolving unit and the detection member to each other and to allow a mixed gas comprising the gas component and a carrier gas for guiding the gas component to the detection member to flow therethrough, the apparatus further comprising a branch channel branched from the mixed gas channel and open to an outside and an inert gas channel joined to the mixed gas channel at a junction downstream of the branch channel such that an inert gas is allowed to flow therethrough, the method comprising:
primarily adjusting a flow rate F 1 of the carrier gas, secondarily adjusting a flow rate F 4 of the inert gas flowing through the inert gas channel, and controlling the secondarily adjusting so that a flow rate of the mixed gas guided to the detection member is a predetermined value.

Assignees

• Hitachi High Tech Science Corp

Inventors

• Hirose Ryusuke
• Akiyama Hideyuki
• Sakai Noriaki
• Watanabe Masafumi

Classifications

• H01J49/0422 Primary

  for gaseous samples (interfaces to gas chromatographs G01N30/7206) · CPC title

• G01N33/442

  Resins; Plastics · CPC title

• H01J49/0031

  Step by step routines describing the use of the apparatus (H01J49/0081 takes precedence) · CPC title

• G01N33/0021

  involving the use of a carrier gas for transport to the sensor · CPC title

• G01N30/02 Primary

  Column chromatography · CPC title