Substrate treating apparatus and safety valve applied thereto
US-11655907-B2 · May 23, 2023 · US
US2019003607A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2019003607-A1 |
| Application number | US-201716065976-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jan 3, 2017 |
| Priority date | Jan 4, 2016 |
| Publication date | Jan 3, 2019 |
| Grant date | — |
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The invention relates to a capsule for a valve as well as to a valve comprising such a capsule. The task of the present invention is to provide a valve in which tight tolerances for construction can be achieved and the assembly of the valve is simplified. According to the present invention the above task is solved by a capsule (1) for a valve comprising at least one diaphragm (2), a valve seat (3), a capsule inlet (5) and a capsule outlet (6). The valve seat (3) is openable and closable to permit or stop a fluid flow from the capsule inlet (5) to the capsule outlet (6). The above task is also solved by a capsule (1) for a valve that comprises at least one diaphragm (2), a valve seat (3), a capsule inlet (5) and a capsule outlet (6), wherein the capsule (1) is structured and arranged to control the position of a pilot valve element external to the capsule (1). The above task is also solved by a valve (10) comprising a valve housing (15), wherein a capsule (1) of the above kind is arranged in the valve housing (15).
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What is claimed is: 1 - 17 . (canceled) 18 . A capsule for a valve wherein the capsule comprises at least one diaphragm, a valve seat, a capsule inlet, a capsule outlet, and a spring which is arranged in the capsule to load the valve element, wherein the spring is arranged on the side of the at least one diaphragm facing the capsule outlet. 19 . (canceled) 20 . The capsule according to claim 18 wherein the capsule comprises a capsule top and a capsule bottom, wherein at least one diaphragm is fixed at a radially outer end of the diaphragm between the capsule top and the capsule bottom. 21 . The capsule according to claim 18 , wherein the at least one diaphragm also has the function of a valve element to open or close the valve seat. 22 . The capsule according to claim 18 , wherein a valve element is arranged in the capsule in addition to the at least one diaphragm to open or close the valve seat. 23 . The capsule according to claim 18 , wherein the capsule comprises at least one thrust pad arranged at a first face of the at least one diaphragm opposite to a second face of the at least one diaphragm facing the valve seat. 24 . The capsule according to claim 23 , wherein the capsule comprises an aperture facing the thrust pad. 25 . The capsule according to claim 24 , wherein the thrust pad comprises a converging bore on a side facing the aperture. 26 . (canceled) 27 . (canceled) 28 . A valve comprising a valve housing, wherein a capsule according to claim 18 is arranged in the valve housing. 29 . The valve according to claim 28 , wherein the valve comprises a presetting mechanism. 30 . The valve according to claim 29 , wherein the presetting mechanism comprises a spring mechanism with an adjustable presetting force. 31 . The valve according to claim 29 , wherein the presetting mechanism comprises a pressure port to adjust pressure on the side of the diaphragm opposite to the valve seat. 32 . The valve according to claim 30 , wherein the presetting mechanism comprises a stepper motor to adjust the presetting force of the spring mechanism. 33 . The valve according to claim 28 , wherein the valve is a pilot valve that comprises a pilot valve element external to the capsule, wherein the pilot valve element is actuatable by a displacement of the valve element in the capsule. 34 . The valve according to claim 28 , wherein the first face of the at least one diaphragm is loaded by a presetting pressure while the second face of the at least one diaphragm is loaded by a pressure from the capsule inlet(s).
with diaphragm · CPC title
Diaphragm cut-off apparatus · CPC title
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