Methods for producing an etch resist pattern on a metallic surface
US-2024035167-A1 · Feb 1, 2024 · US
US2018371624A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2018371624-A1 |
| Application number | US-201816118343-A |
| Country | US |
| Kind code | A1 |
| Filing date | Aug 30, 2018 |
| Priority date | Oct 15, 2007 |
| Publication date | Dec 27, 2018 |
| Grant date | — |
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A method of controlling macroscopic strain of a porous structure includes contacting a porous structure with a modifying agent which chemically adsorbs to a surface of the porous structure and modifies an existing surface stress of the porous structure. Additional methods and systems are also presented.
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What is claimed is: 1 . A method of controlling macroscopic strain of a porous structure, the method comprising: contacting a porous structure with a modifying agent which chemically adsorbs to a surface of the porous structure and modifies an existing surface stress of the porous structure. 2 . The method of claim 1 , wherein the porous structure comprises at least one metal selected from a group consisting of Group 8 elements, Group 9 elements, Group 10 elements, and Group 11 elements. 3 . The method of claim 1 , wherein the porous structure is a nanoporous structure comprising gold or platinum. 4 . The method of claim 1 , wherein the modifying agent is selected from a group consisting of hydrogen, a hydrocarbon, nitrogen, oxygen, fluorine, sulfur, chlorine, and bromine. 5 . The method of claim 1 , wherein the modifying agent is oxygen, the modifying agent being contacted with the porous structure by exposure of the porous structure to ozone. 6 . The method of claim 1 , wherein the porous structure has a ratio of surface atoms to bulk atoms of at least about 1×10 −3 . 7 . The method of claim 1 , wherein a media pore size of the porous structure is less than about 100 nm. 8 . The method of claim 1 , wherein the porous structure is contacted with the modifying agent for a time sufficient to generate a linear dimensional contraction of the porous metal structure of at least about 0.1%. 9 . The method of claim 1 , wherein the modifying agent, upon chemical adsorption to the porous structure, causes an at least partially reversible volumetric change of the porous structure. 10 . A method of controlling macroscopic strain of a porous metal structure, the method comprising: contacting a porous metal structure with a removing agent for removing a chemically adsorbed modifying agent from the porous metal structure, thereby causing a recovery of about dimensions of the porous metal structure prior to adsorption of the modifying agent. 11 . The method of claim 10 , wherein the porous metal structure comprises at least one metal selected from a group consisting of Group 8 elements, Group 9 elements, Group 10 elements, and Group 11 elements. 12 . The method of claim 10 , wherein the porous metal structure is a nanoporous structure comprising gold or platinum. 13 . The method of claim 10 , wherein the removing agent is carbon monoxide. 14 . The method of claim 10 , wherein the porous metal structure has a ratio of surface atoms to bulk atoms of at least about 1×10 −3 . 15 . The method of claim 10 , wherein a media pore size of the porous metal structure is less than about 100 nm. 16 . The method of claim 10 , wherein the porous metal structure is contacted with the modifying agent for a time sufficient to generate a linear dimensional contraction of the porous metal structure of at least about 0.01%. 17 . A method of controlling macroscopic strain of a porous metal structure, the method comprising: contacting a porous metal structure with a modifying agent which chemically adsorbs to a surface of the porous metal structure and modifies an existing surface stress of the porous metal structure, thereby causing an at least partially reversible volumetric change of the nanoporous metal structure; and contacting the porous metal structure with a removing agent for removing a chemically adsorbed modifying agent from the porous metal structure, thereby causing an at least partial recovery of about dimensions of the porous metal structure prior to adsorption of the modifying agent. 18 . The method of claim 17 , wherein the porous metal structure comprises at least one metal selected from a group consisting of Group 8 elements, Group 9 elements, Group 10 elements, and Group 11 elements. 19 . The method of claim 17 , wherein the porous metal structure is a nanoporous structure comprising gold or platinum. 20 . The method of claim 17 , wherein the removing agent is carbon monoxide. 21 . The method of claim 17 , wherein the porous metal structure has a ratio of surface atoms to bulk atoms of at least about 1×10 −3 . 22 . The method of claim 17 , wherein a media pore size of the porous metal structure is less than about 100 nm. 23 . The method of claim 17 , wherein the modifying agent is selected from a group consisting of hydrogen, a hydrocarbon, nitrogen, oxygen, fluorine, sulfur, chlorine, and bromine.
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