Distortion Correction Method and Electron Microscope

Patent metadata

Field	Value
Publication number	US-2018366295-A1
Application number	US-201816012057-A
Country	US
Kind code	A1
Filing date	Jun 19, 2018
Priority date	Jun 20, 2017
Publication date	Dec 20, 2018
Grant date	—

Abstract

There is provided a method which is for use in a charged particle beam system including an illumination system equipped with an aberration corrector having a plurality of stages of multipole elements and a transfer lens system disposed between the multipole elements, the method being capable of correcting distortion in a shadow of an aperture of the illumination system. The method involves varying excitations of the transfer lens system to correct distortion in the shadow of the aperture of the illumination system.

First claim

What is claimed is:

1 . A method of distortion correction for use in a charged particle beam system including an illumination system having a built-in aberration corrector which contains a plurality of multipole elements and a transfer lens system disposed between the multipole elements to correct distortion in a shadow of an aperture of the illumination system, said method comprising:
varying excitations of the transfer lens system to correct the distortion in the shadow of the aperture.

2 . The method of distortion correction as set forth in claim 1 , wherein said transfer lens system comprises a first transfer lens and a second transfer lens.

3 . The method of distortion correction as set forth in claim 2 , wherein during the step of correcting the distortion in the shadow of said aperture, excitations of said first and second transfer lenses are varied in such a manner that the excitations are both increased or both decreased.

4 . The method of distortion correction as set forth in claim 2 , further comprising varying excitations of said transfer lens system to correct on-axis aberration.

5 . The method of distortion correction as set forth in claim 4 , wherein during the step of correcting said on-axis aberration, excitations of said first and second transfer lenses are varied such that the excitation of one of the first and second transfer lenses is increased while the excitation of the other is decreased.

6 . The method of distortion correction as set forth in claim 4 , wherein each of said plurality of multipole elements produces a three-fold field, and wherein during the step of correcting said on-axis aberration, three-lobe aberration is corrected.

7 . The method of distortion correction as set forth in claim 1 , wherein each of said plurality of multipole elements produces a three-fold field, and wherein during the step of correcting the distortion in the shadow of said aperture, three-fold symmetric distortion in the shadow of said aperture is corrected.

8 . The method of distortion correction as set forth in claim 1 , wherein said charged particle beam system is a scanning transmission electron microscope.

9 . A charged particle beam system comprising:
an illumination system including an aberration corrector and an aperture, the aberration corrector containing a plural stages of multipole elements and a transfer lens system disposed between the multipole elements; a distortion measuring section for measuring distortion in a shadow of the aperture; and a controller for controlling the aberration corrector, wherein the controller provides control based on a result of measurement of the distortion in the shadow of the aperture to vary excitations of the transfer lens system.

10 . The charged particle beam system as set forth in claim 9 , wherein said transfer lens system comprises a first transfer lens and a second transfer lens.

11 . The charged particle beam system as set forth in claim 10 , wherein said controller varies excitations of said first and second transfer lenses based on a result of the measurement of the distortion in the shadow of said aperture such that the excitations are both increased or both decreased.

12 . The charged particle beam system as set forth in claim 10 , further comprising an on-axis aberration measuring section for measuring on-axis aberration, and wherein said controller provides control based on a result of the measurement of the on-axis aberration to vary the excitations of said transfer lens system.

13 . The charged particle beam system as set forth in claim 12 , wherein said controller varies excitations of said first and second transfer lenses based on a result of the measurement of said on-axis aberration such that the excitation of one of the first and second transfer lenses is increased while the excitation of the other is decreased.

Assignees

• Jeol Ltd

Inventors

• Morishita Shigeyuki

Classifications

• H01J2237/153

  Correcting image defects, e.g. stigmators · CPC title

• H01J37/302

  Controlling tubes by external information, e.g. program control (H01J37/304 takes precedence) · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J37/226

  Optical arrangements for illuminating the object; optical arrangements for collecting light from the object · CPC title

• H01J37/14

  magnetic · CPC title