Dry film photoresist, manufacturing method of dry film photoresist, metal pattern forming method and electronic component
US-2015126029-A1 · May 7, 2015 · US
Photo-imageable thin films with high dielectric constants
US2018364572A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2018364572-A1 |
| Application number | US-201615781726-A |
| Country | US |
| Kind code | A1 |
| Filing date | Dec 7, 2016 |
| Priority date | Dec 17, 2015 |
| Publication date | Dec 20, 2018 |
| Grant date | — |
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- Title
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Abstract
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A formulation for preparing a photo-imageable film; said formulation comprising: (a) a negative photoresist comprising: (i) an acrylic binder having epoxy groups and (ii) a photo-active species; and (b) functionalized zirconium oxide nanoparticles.
First claim
Opening claim text (preview).
1 . A formulation for preparing a photo-imageable film; said formulation comprising: (a) a negative photoresist comprising: (i) an acrylic binder having epoxy groups and (ii) a photo-active species; and (b) functionalized zirconium oxide nanoparticles. 2 . The formulation of claim 1 in which the functionalized zirconium oxide nanoparticles have an average diameter from 0.3 nm to 50 nm. 3 . The formulation of claim 2 in which the functionalized zirconium oxide nanoparticles comprise ligands which have carboxylic acid, alcohol, trichlorosilane, trialkoxysilane or mixed chloro/alkoxy silane functionality. 4 . The formulation of claim 3 in which the ligands have from one to twenty non-hydrogen atoms. 5 . The formulation of claim 4 in which the acrylic binder comprises polymerized residues of: (i) a C1-C4 alkyl (meth)acrylate, (ii) a C3-C12 (meth)acrylate ester comprising an epoxy group and (iii) a C3-C8 carboxylic acid monomer. 6 . The formulation of claim 5 in which the amount of functionalized nanoparticles in the formulation, calculated on a solids basis for the entire formulation, is from 50 to 95 wt %. 7 . The formulation of claim 6 in which the acrylic binder has weight average molecular weight from 5,000 to 50,000.
Assignees
Inventors
Classifications
- G03F7/0047Primary
characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing · CPC title
- G03F7/038Primary
Macromolecular compounds which are rendered insoluble or differentially wettable (G03F7/075 takes precedence; macromolecular azides G03F7/012; macromolecular diazonium compounds G03F7/021) · CPC title
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- What does patent US2018364572A1 cover?
- A formulation for preparing a photo-imageable film; said formulation comprising: (a) a negative photoresist comprising: (i) an acrylic binder having epoxy groups and (ii) a photo-active species; and (b) functionalized zirconium oxide nanoparticles.
- Who is the assignee on this patent?
- Dow Global Technologies Llc, Rohm & Haas Elect Materials Korea Ltd, Rohm & Haas Elect Mat
- What technology area does this patent fall under?
- Primary CPC classification G03F7/0047. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Thu Dec 20 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).