Connected thread groove spacer and vacuum pump

Patent metadata

Field	Value
Publication number	US-2018355888-A1
Application number	US-201615780155-A
Country	US
Kind code	A1
Filing date	Dec 8, 2016
Priority date	Dec 9, 2015
Publication date	Dec 13, 2018
Grant date	—

Abstract

A thread groove pump portion, which is an exhaust element, is structured such that a Siegbahn structure is attached onto a cylindrical thread, and such that respective parts are connected to each other at this attachment section. A flow channel of the Siegbahn portion and a flow channel of the cylindrical thread (the thread groove pump portion) are connected to each other so as to substantially form a right angle when viewed from an axis direction of the vacuum pump, thus, the flow channel of the Siegbahn portion and the flow channel of the thread groove pump portion are connected to each other. the length of a compression flow channel of the thread groove pump portion can be increased in a radial direction due to the connected Siegbahn portion.

First claim

1 . A connected thread groove spacer comprising:
a spiral groove portion which has a disc shape and in which a spiral groove with a spiral ridge portion and a spiral root portion is engraved; and a thread groove portion which has a cylindrical shape and in which a thread groove with a thread ridge portion and a thread root portion is formed, the thread groove portion being connected to the spiral groove portion.

2 . The connected thread groove spacer according to claim 1 , wherein, in the spiral groove portion and the thread groove portion, at least one of borderlines between the spiral ridge portion and the spiral root portion, or a first extended line extending from this borderline is connected in a continuous manner to at least one of borderlines between the thread ridge portion and the thread root portion, or a second extended line extending from this borderline, at a connection portion where the spiral groove portion and the thread groove portion are connected to each other.

3 . The connected thread groove spacer according to claim 2 , further, wherein a top surface of the spiral ridge portion and a top surface of the thread ridge portion are connected to each other at the connection portion in a non-continuous manner.

4 . The connected thread groove spacer according to claim 2 , further, wherein the spiral ridge portion and the thread ridge portion are connected to each other at the connection portion in a continuous manner.

5 . The connected thread groove spacer according to claim 1 , wherein, in the spiral groove portion and the thread groove portion, the spiral ridge portion and the thread ridge portion are connected to each other in a continuous manner at a connection portion where the spiral groove portion and the thread groove portion are connected to each other.

6 . The connected thread groove spacer according to claim 5 , further, wherein the spiral ridge portion and the thread ridge portion intersect with each other by being connected to each other at the connection portion, with a borderline surface between the spiral ridge portion and the spiral root portion and a borderline surface between the thread ridge portion and the thread root portion being disposed in a non-continuous manner.

7 . The connected thread groove spacer according to claim 1 , wherein a value of a first gradient angle, which is a gradient angle between an axis and a thread depth in the thread groove portion, is equal to or smaller than a value of a second gradient angle, which is a gradient angle between an axis perpendicular line perpendicular to the axis and a groove depth in the spiral groove portion.

8 . The connected thread groove spacer according to claims 1 , wherein a value of a first angle formed by an inner diameter tangent of the spiral groove portion and an inner diameter-side tangent of the spiral ridge portion is equal to or smaller than a value of a second angle formed by an outer diameter tangent of the spiral groove portion and the inner diameter-side tangent of the spiral ridge portion, the first angle being formed to be larger than 15° and the second angle being formed to be smaller than 25°.

9 . The connected thread groove spacer according to claim 1 , wherein the spiral groove portion and the thread groove portion are formed integrally.

10 . A vacuum pump comprising:
a housing in which an inlet port and an outlet port are formed; a rotating shaft that is enclosed in the housing and supported rotatably; a rotor blade that is provided on the rotating shaft; a stator blade that is disposed concentrically with the rotor blade and axially opposes the rotor blade with a gap therebetween; and a thread groove pump mechanism that has the connected thread groove spacer described in claim 1 that is fixed to the housing.

Assignees

• Edwards Japan Ltd

Inventors

• Sakaguchi Yoshiyuki
• Miwata Tooru
• SAEGUSA Kengo
• YOSHIHARA Nahoko

Classifications

• F04D19/04 Primary

  specially adapted to the production of a high vacuum, e.g. molecular pumps · CPC title

• F04D19/046

  Combinations of two or more different types of pumps · CPC title

• F04D29/522

  especially adapted for elastic fluid pumps · CPC title

• F04D17/168

  Pumps specially adapted to produce a vacuum · CPC title

• F04D29/547 Primary

  having a special shape in order to influence fluid flow · CPC title