Physical quantity sensor, physical quantity sensor device, electronic apparatus, and vehicle

Patent metadata

Field	Value
Publication number	US-2018283868-A1
Application number	US-201815927554-A
Country	US
Kind code	A1
Filing date	Mar 21, 2018
Priority date	Mar 28, 2017
Publication date	Oct 4, 2018
Grant date	—

Abstract

A physical quantity sensor includes: a base substrate; a first wiring portion that is fixed to the base substrate; a second wiring portion that is fixed to the base substrate and has at least a part disposed in parallel to the first wiring portion; and an electrode portion that is disposed in the base substrate and has a reference potential. The electrode portion is disposed between the base substrate, and the first and second wiring portions. At least parts of the first and second wiring portions overlap the electrode portion in a plan view.

First claim

What is claimed is:

1 . A physical quantity sensor comprising:
an insulating base substrate; a first wiring portion that is fixed to the base substrate; a second wiring portion that is fixed to the base substrate and has at least a part disposed in parallel to the first wiring portion; and an electrode portion that is disposed in the base substrate and has a reference potential, wherein the electrode portion is disposed between the base substrate, and the first and second wiring portions, and wherein at least parts of the first and second wiring portions overlap the electrode portion in a plan view.

2 . The physical quantity sensor according to claim 1 , further comprising:
a driving portion that is displaceable; a fixed driving electrode that is fixed to the base substrate and displaces the driving portion; and a fixed monitor electrode that is fixed to the base substrate and detects the displacement of the driving portion, wherein the first wiring portion is electrically connected to the fixed driving electrode, and wherein the second wiring portion is electrically connected to the fixed monitor electrode.

3 . The physical quantity sensor according to claim 1 , further comprising:
a driving portion that is displaceable; a movable portion that is displaceable; a fixed driving electrode that is fixed to the base substrate and displaces the driving portion; and a fixed detection electrode that is fixed to the base substrate and detects the displacement of the movable portion, wherein the first wiring portion is electrically connected to the fixed driving electrode, and wherein the second wiring portion is electrically connected to the fixed detection electrode.

4 . The physical quantity sensor according to claim 2 , further comprising:
a third wiring portion that is fixed to the base substrate and is electrically connected to the driving portion, wherein the third wiring portion has a constant potential and is located between the first and second wiring portions.

5 . The physical quantity sensor according to claim 1 , further comprising:
a driving portion that is displaceable; a movable portion that is displaceable; a fixed driving electrode that is fixed to the base substrate and displaces the driving portion; a fixed monitor electrode that is fixed to the base substrate and detects the displacement of the driving portion; a fixed detection electrode that is fixed to the base substrate and detects the displacement of the movable portion; and a third wiring portion that is fixed to the base substrate and is electrically connected to the driving portion, wherein the third wiring portion has a constant potential and is located between the first and second wiring portions, wherein the first wiring portion is electrically connected to the fixed driving electrode, wherein the second wiring portion includes a monitor wiring portion electrically connected to the fixed monitor electrode and a detection wiring portion electrically connected to the fixed detection electrode, and wherein the monitor wiring portion is located between the third wiring portion and the detection wiring portion.

6 . The physical quantity sensor according to claim 4 ,
wherein the electrode portion is electrically connected to the third wiring portion.

7 . The physical quantity sensor according to claim 5 ,
wherein the electrode portion is electrically connected to the third wiring portion.

8 . The physical quantity sensor according to claim 1 ,
wherein in the base substrate, a depression is formed to overlap the first and second wiring portions in a plan view, and wherein the electrode portion is installed in the depression.

9 . The physical quantity sensor according to claim 8 ,
wherein a separation distance between the depression and the first wiring portion is less than a separation distance between the depression and the second wiring portion.

10 . The physical quantity sensor according to claim 8 ,
wherein each of the first and second wiring portions is located in a portion which does not overlap the depression in a plan view and includes a fixed portion fixed to the base substrate, and wherein the fixed portion of the first wiring portion and the fixed portion of the second wiring portion are shifted in an extension direction of the first and second wiring portions.

11 . The physical quantity sensor according to claim 9 ,
wherein each of the first and second wiring portions includes a fixed portion fixed to the base substrate in a portion which does not overlap the depression in a plan view, and wherein the fixed portion of the first wiring portion and the fixed portion of the second wiring portion are shifted in an extension direction of the first and second wiring portions.

12 . The physical quantity sensor according to claim 1 , further comprising:
a cover that has a constant potential, wherein the first and second wiring portions are located between the cover and the base substrate, and wherein a separation distance between the cover and the first wiring portion is less than a separation distance between the cover and the second wiring portion.

13 . A physical quantity sensor device comprising:
the physical quantity sensor according to claim 1 ; and a circuit element that is electrically connected to the physical quantity sensor.

14 . The physical quantity sensor device according to claim 13 , further comprising:
a substrate on which the physical quantity sensor is mounted, wherein the circuit element is mounted on a surface opposite to a side of the substrate of the physical quantity sensor.

15 . The physical quantity sensor device according to claim 14 ,
wherein the physical quantity sensor and the circuit element are molded.

16 . The physical quantity sensor device according to claim 13 ,
wherein the physical quantity sensor and the circuit element are accommodated in a ceramic package.

17 . An electronic apparatus comprising:
the physical quantity sensor according to claim 1 .

18 . The electronic apparatus according to claim 17 ,
wherein the electronic apparatus is a wearable apparatus.

19 . A vehicle comprising:
the physical quantity sensor according to claim 1 ; and an attitude control device that controls an attitude based on a detection signal from the physical quantity sensor.

20 . The vehicle according to claim 19 ,
wherein the vehicle is one of an automobile, an aircraft, a rocket, an artificial satellite, a ship, an unmanned carrier, a bipedal walking robot, and an unmanned aircraft.

Assignees

• Seiko Epson Corp

Inventors

• Kanemoto Kei
• Furuhata Makoto

Classifications

• G01C19/5769

  Manufacturing; Mounting; Housings · CPC title

• G01P15/125

  by capacitive pick-up · CPC title

• G01C19/5747 Primary

  each sensing mass being connected to a driving mass, e.g. driving frames · CPC title

• G01P2015/0814

  for translational movement of the mass, e.g. shuttle type · CPC title