Showerhead assembly and substrate processing apparatus
US-2024042463-A1 · Feb 8, 2024 · US
US2018200749A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2018200749-A1 |
| Application number | US-201615743659-A |
| Country | US |
| Kind code | A1 |
| Filing date | Aug 2, 2016 |
| Priority date | Aug 5, 2015 |
| Publication date | Jul 19, 2018 |
| Grant date | — |
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A jetting dispensing system includes a dispenser body with a fluid chamber and a valve element, and a progressive cavity pump for feeding fluid into the fluid chamber. The progressive cavity pump propagates a plurality of separated cavities of fluid along an elongate length thereof to generate and maintain an incoming fluid pressure at a fluid inlet and the fluid chamber of the dispenser body. Accordingly, the droplets that are generated from operating the valve element in jetting dispensing cycles may define a volume of fluid, regardless of variations in fluid viscosity and variations in operational speed of the jetting dispensing system. Furthermore, the velocity profile of fluid exiting the dispenser body may be more constant to avoid causing changes in fluid velocity that can damage fluid particles and/or cause rotational tumbling or blossoming of the droplet while in flight towards the substrate.
Opening claim text (preview).
What is claimed is: 1 . A jetting system for dispensing droplets of fluid onto a substrate, the jetting system comprising: a jetting dispenser body including a fluid chamber, a fluid inlet and a dispensing outlet communicating with the fluid chamber, and a valve seat defined in the fluid chamber between the fluid inlet and the dispensing outlet; a valve element extending into the fluid chamber; a valve actuator operatively coupled with the valve element for moving the valve element into and out of engagement with the valve seat to thereby define jetting dispensing cycles for forcing droplets out of the dispensing outlet; and a fluid supply assembly coupled with the jetting dispenser body and including a progressive cavity pump that feeds fluid from a fluid source to the fluid inlet of the jetting dispenser body. 2 . The jetting system of claim 1 , the progressive cavity pump further comprising: a pump housing defining a conduit along an elongate length, the conduit having a contoured periphery; and a central drive member extending through the conduit to define a plurality of separated cavities defined between the central drive member and the contoured periphery, the central drive member rotating to propagate the plurality of separated cavities along the elongate length of the conduit and towards the fluid inlet such that displacement forces on the fluid in each of the plurality of separated cavities are applied along an entirety of the elongate length of the conduit. 3 . The jetting system of claim 2 , the progressive cavity pump operating continuously during a continuous series of the jetting dispensing cycles at the jetting system to maintain an incoming fluid pressure at all times within the fluid chamber of the jetting dispenser body. 4 . The jetting system of claim 3 , the valve actuator controlling the jetting dispensing cycles such that the incoming fluid pressure in the fluid chamber results in droplets having a consistent volume for each jetting dispensing cycle. 5 . The jetting system of claim 4 , wherein the progressive cavity pump operates to refill the fluid chamber with an equivalent volume of the fluid that is removed during each of the jetting dispensing cycles. 6 . The jetting system of claim 2 , further comprising: a controller operatively coupled to the valve actuator and the progressive cavity pump, the controller actuating the progressive cavity pump to rotate the central drive member a set incremental amount for each actuation of the valve actuator. 7 . The jetting system of claim 1 , further comprising: a pressure sensor positioned in a flow path between the fluid inlet and the fluid chamber and configured to measure the incoming fluid pressure in the flow path; and a controller operatively coupled to the progressive cavity pump, the controller adjusting actuation of the progressive cavity pump based on feedback from the pressure sensor to maintain an incoming fluid pressure. 8 . The jetting system of claim 7 , wherein the pressure sensor comprises: a diaphragm located at the jetting dispenser body in communication with the flow path between the fluid inlet and the fluid chamber, the diaphragm thereby receiving the fluid pressure in the flow path; and a load sensor coupled with the diaphragm and configured to measure a force based upon the fluid pressure transferred from the diaphragm, thereby to confirm that the fluid pressure remains constant. 9 . The jetting system of claim 1 , further comprising: a controller operatively coupled to the progressive cavity pump, the controller actuating the progressive cavity pump to supply fluid to the fluid inlet with an incoming fluid pressure of at least 7 barg. 10 . The jetting system of claim 9 , the controller also operatively coupled to the valve actuator and operating the valve actuator such that the valve element performs up to 500 jetting dispensing cycles per second. 11 . The jetting system of claim 9 , the valve actuator including a piezoelectric element operatively coupled to the valve element to generate reciprocal movements of the valve element. 12 . The jetting system of claim 11 , the controller also operatively coupled to the valve actuator and operating the valve actuator such that the valve element performs up to 3000 jetting dispensing cycles per second. 13 . A method for dispensing a plurality of droplets of fluid onto a substrate using a jetting system including a jetting dispenser body, a valve actuator, and a fluid supply assembly with a progressive cavity pump, the method comprising: pumping fluid with the progressive cavity pump from a fluid source to a fluid inlet of the jetting dispenser body; flowing the fluid from the fluid inlet into a fluid chamber of the jetting dispenser body, the fluid chamber also communicating with a dispensing outlet and defining a valve seat between the fluid inlet and the dispensing outlet; and operating a valve element extending into the fluid chamber with the valve actuator to move away from and towards engagement with the valve seat, thereby defining jetting dispensing cycles for forcing droplets out of the dispensing outlet for flight towards and onto the substrate. 14 . The method of claim 13 , wherein the fluid dispensed by the jetting system varies in viscosity, and the method further comprises: discharging droplets having a consistent volume for each jetting dispensing cycle, regardless of changes in viscosity of the fluid. 15 . The method of claim 14 , wherein pumping fluid with the progressive cavity pump further comprises: refilling the fluid chamber with an equivalent volume of the fluid that is removed during each of the jetting dispensing cycles. 16 . The method of claim 13 , wherein operating the valve element causes movement of the fluid relative to the valve seat defining a fluid velocity profile over time, the fluid velocity profile being generally constant such that for any droplet discharged through the dispensing outlet, the velocity of fluid that first exits the dispensing outlet is proximate to the velocity of fluid that last exits the dispensing outlet. 17 . The method of claim 16 , further comprising: controlling a velocity of the fluid exiting the dispensing outlet over time so as to avoid blossoming or rotational tumbling movements of the droplet during flight to the substrate. 18 . The method of claim 13 , wherein pumping fluid with the progressive cavity pump further comprises: maintaining the fluid into the jetting dispenser body at an incoming fluid pressure set by the progressive cavity pump. 19 . The method of claim 18 , wherein operating the valve element includes closing the valve element into engagement with the valve seat, which results in a pressure spike within the fluid chamber, and the method further comprises: setting the incoming fluid pressure with the progressive cavity pump to be sufficiently high to minimize the pressure spike within the fluid chamber, thereby minimizing damage done to particles of fluid that would be caused by the pressure spike. 20 . The method of claim 19 , wherein setting the incoming fluid pressure with the progressive cavity pump further comprises: operating the progressive cavity pump to produce the incoming fluid pressure to be at least 7 barg. 21 . The method of claim 13 , wherein operating the valve element further comprises: actuating the valve element with the valve actuator to perform up to 500 dispensing cycles per second.
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Control of, monitoring of, or safety arrangements for, machines, pumps or pumping installations (of pumps or pumping installations specially adapted for elastic fluids F04C28/00) · CPC title
characterised by flow controlling means, e.g. valves, located proximate the outlet (B05C5/0258, B05C5/0275 take precedence; supply valves upstream the coating head B05C11/1036) · CPC title
Controlled or regulated · CPC title
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