Showerhead assembly and substrate processing apparatus
US-2024042463-A1 · Feb 8, 2024 · US
US2018200747A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2018200747-A1 |
| Application number | US-201715674189-A |
| Country | US |
| Kind code | A1 |
| Filing date | Aug 10, 2017 |
| Priority date | Jan 13, 2017 |
| Publication date | Jul 19, 2018 |
| Grant date | — |
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An adhesive dripping device for adhesive dispensing equipment includes: a housing defining a mounting chamber therein, a lower end of the housing being provided with a nozzle communicating with the mounting chamber; a core stem mounted in an upper portion of the mounting chamber; an electromagnetic coil wound around the core stem; an elastic member fitting over the core stem; an adhesive dripping assembly mounted in the mounting chamber below the elastic member and configured for dripping adhesive through the nozzle; a pressure sensor mounted on a top end of the mounting chamber and abutting against an upper end of the elastic member; and a control unit electrically connected to the pressure sensor and the electromagnetic coil and configured for adjusting a current in the electromagnetic coil according to a pressure detected by the pressure sensor, so as to control an adhesive dripping amount of the adhesive dripping assembly.
Opening claim text (preview).
What is claimed is: 1 . An adhesive dripping device for adhesive dispensing equipment, comprising: a housing defining a mounting chamber therein, a lower end of the housing being provided with a nozzle communicating with the mounting chamber; a core stem mounted in an upper portion of the mounting chamber; an electromagnetic coil wound around the core stem; an elastic member fitting over the core stem; an adhesive dripping assembly mounted in the mounting chamber below the elastic member and configured for dripping adhesive through the nozzle; a pressure sensor mounted on a top end of the mounting chamber and abutting against an upper end of the elastic member; and a control unit electrically connected to the pressure sensor and the electromagnetic coil and configured for adjusting a current in the electromagnetic coil according to a pressure detected by the pressure sensor, so as to control an adhesive dripping amount of the adhesive dripping assembly. 2 . The adhesive dripping device according to claim 1 , further comprising: a current sensor electrically connected to the electromagnetic coil and the control unit and configured for detecting the current in the electromagnetic coil and providing feedback to the control unit, so as to allow the control unit to monitor the current in the electromagnetic coil in real time. 3 . The adhesive dripping device according to claim 1 , further comprising: a flexible stopper fixed to a lower end of the elastic member and configured for blocking a driving rod of the adhesive dripping assembly from moving upward to impact on the core stem during an adhesive dripping process. 4 . The adhesive dripping device according to claim 3 , wherein the flexible stopper is annular, and an inner diameter of the flexible stopper is less than diameters of the core stem and the driving rod. 5 . The adhesive dripping device according to claim 3 , wherein the flexible stopper is made from silica gel, rubber or plastic. 6 . The adhesive dripping device according to claim 3 , wherein the core stem is an electromagnetic core, and the driving rod is made from iron. 7 . The adhesive dripping device according to claim 1 , wherein the elastic member is a coil spring, and a lower end of the coil spring is lower than a lower end of the core stem. 8 . The adhesive dripping device according to claim 1 , further comprising a fixing head mounted on an outer side of a top wall of the housing, wherein an upper end of the core stem passes through the top wall of the housing and is connected to the fixing head. 9 . The adhesive dripping device according to claim 8 , wherein the core stem is integrally formed with the fixing head. 10 . The adhesive dripping device according to claim 1 , wherein the housing comprises an upper casing and a lower casing, and the control unit is fixed in the upper casing. 11 . The adhesive dripping device according to claim 4 , wherein the flexible stopper is made from silica gel, rubber or plastic. 12 . The adhesive dripping device according to claim 4 , wherein the core stem is an electromagnetic core, and the driving rod is made from iron. 13 . The adhesive dripping device according to claim 2 , wherein the elastic member is a coil spring, and a lower end of the coil spring is lower than a lower end of the core stem. 14 . The adhesive dripping device according to claim 3 , wherein the elastic member is a coil spring, and a lower end of the coil spring is lower than a lower end of the core stem. 15 . The adhesive dripping device according to claim 4 , wherein the elastic member is a coil spring, and a lower end of the coil spring is lower than a lower end of the core stem. 16 . The adhesive dripping device according to claim 2 , further comprising a fixing head mounted on an outer side of a top wall of the housing, wherein an upper end of the core stem passes through the top wall of the housing and is connected to the fixing head. 17 . The adhesive dripping device according to claim 3 , further comprising a fixing head mounted on an outer side of a top wall of the housing, wherein an upper end of the core stem passes through the top wall of the housing and is connected to the fixing head. 18 . The adhesive dripping device according to claim 4 , further comprising a fixing head mounted on an outer side of a top wall of the housing, wherein an upper end of the core stem passes through the top wall of the housing and is connected to the fixing head. 19 . The adhesive dripping device according to claim 2 , wherein the housing comprises an upper casing and a lower casing, and the control unit is fixed in the upper casing. 20 . The adhesive dripping device according to claim 3 , wherein the housing comprises an upper casing and a lower casing, and the control unit is fixed in the upper casing.
characterised by flow controlling means, e.g. valves, located proximate the outlet (B05C5/0258, B05C5/0275 take precedence; supply valves upstream the coating head B05C11/1036) · CPC title
the actuating means being a solenoid · CPC title
specially designed for conducting intermittent application of small quantities, e.g. drops, of coating material (B05C5/0225, B05C11/1026 take precedence) · CPC title
Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves · CPC title
integrated in or attached to a discharge apparatus, e.g. a spray gun · CPC title
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