Process for producing molded material, molded material, wavefront control element and diffraction grating

Patent metadata

Field	Value
Publication number	US-2018187294-A1
Application number	US-201615738929-A
Country	US
Kind code	A1
Filing date	Jun 17, 2016
Priority date	Jun 22, 2015
Publication date	Jul 5, 2018
Grant date	—

Abstract

A process for producing a molded material that can form metallic glass material in a state of lower viscosity, and can manufacture a small structure of several 10 μm or less in a comparatively short time while precisely controlling shape thereof, by the process comprising a heating step of heating supercooled state metallic glass material or a solid metallic glass material at a temperature increase rate of 0.5 K/s to a temperature at or higher than a temperature at which a crystallization process for a supercooled liquid of the metallic glass material begins, and a molding step of transfer molding the metallic glass material until the crystallization process for the supercooled liquid of the metallic glass material has been completed. In addition, the purpose is also to provide the molded material that has been formed by this process, a wavefront control element, and a diffraction grating.

First claim

1 . A process for producing a molded material comprising:
a step of heating a supercooled metallic glass material to a temperature which is equal to or higher than a temperature at which a supercooled liquid of the metallic glass material starts to crystallize; and a step of molding the metallic glass material, during the heating step, for a period of time lasting before a completion of a crystallization process of the supercooled liquid of the metallic glass material, into the material having a mixed phase of metallic glass and a crystalline phase or having a crystalline phase alone.

2 . A process for producing a molded material comprising:
a step of heating a solid metallic glass material to a temperature which is equal to or higher than a glass transition temperature of the metallic glass material and is equal to or higher than a temperature at which the metallic glass material starts to crystallize; and a step of molding the metallic glass material, during the heating step, for a period of time starting with an arrival at the glass transition temperature and lasting before a completion of a crystallization process of a supercooled liquid of the metallic glass material, into the material having a mixed phase of metallic glass and a crystalline phase or having a crystalline phase alone.

3 . The process for producing a molded material according to claim 1 , wherein
the step of heating is performed by heating at a temperature increase rate of 0.5 K/s or more.

4 . The process for producing a molded material according to claim 1 , wherein
the step of molding is performed by subjecting the metallic glass material to transfer molding with the use of a concave-convex mold.

5 . The process for producing a molded material according to claim 4 , wherein
the step of heating is performed at a temperature increase rate which is equal to or higher than a temperature increase rate β, which is obtained from a formula below, wherein ΔL is a depth of concavity of the mold used in the step of molding; d is an aperture width of the concavity; P is a pressure applied in the step of molding; β is a temperature increase rate in the step of molding; T min is a minimum viscosity coefficient temperature at a supercooled liquid state of the metallic glass material; η(T min ) is a viscosity coefficient at the T min of the metallic glass material; k is Boltzmann's constant; Q is an activation energy given in an approximation of a temperature dependence of the viscosity coefficient of a supercooled liquid of a metallic glass component to Arrhenius thermal activation; and A is a constant determined by a composition of an alloy and a temperature increase rate (A>1.5).

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6 . The process for producing a molded material according to claim 1 , wherein
the step of molding is performed to produce a wavefront control element having periodic concavity-convexity.

7 . The process for producing a molded material according to claim 1 , wherein
the step of molding is performed to produce a G 2 diffraction grating for a neutron Talbot interferometer or an X-ray Talbot interferometer.

8 . The process for producing a molded material according to claim 7 , wherein
the metallic glass material comprises a Gd-based, Sm-based, Eu-based, Dy-based, Pt-based, Au-based, Pd-based or Ni-based metallic glass material.

9 . The process for producing a molded material according to claim 7 , wherein
the metallic glass material is composed of Gd w Cu x Al y B z , wherein w, x, y, z are each an atomic percentage satisfying 50≤w≤80, 10≤x≤50, 0≤y≤30 and 0≤z≤10.

10 . A molded material produced by the process for producing a molded material according to claim 1 .

11 . A molded material which comprises an alloy with the same composition as a composition of a metallic glass material and which has on a surface thereof concavity-convexity with a pitch between adjacent convexities being in the order of nanometers or in the order of micrometers and a depth of the concavity being more than 10 μm.

12 . A wavefront control element comprising the molded material according to claim 11 , the concavity-convexity is periodically provided.

13 . A diffraction grating which comprises an alloy with the same composition as a composition of a Gd-based, Sm-based, Eu-based, Dy-based, Pt-based, Au-based, Pd-based or Ni-based metallic glass material and which has on a surface thereof concavity-convexity periodically provided, a depth of the concavity being not more than 110 μm, a period of the concavity-convexity ranging from 0.4 μm to 90 μm.

Assignees

• Univ Tohoku

Inventors

• Kato Hidemi
• Yashiro Wataru

Classifications

• C22C45/003

  with one or more of the noble metals as major constituent · CPC title

• C22C45/00

  Amorphous alloys (making amorphous non-ferrous alloys C22C1/11) · CPC title

• G21K1/06

  using diffraction, refraction or reflection, e.g. monochromators (G21K1/10, G21K7/00 take precedence) · CPC title

• C22C30/02

  containing copper · CPC title

• C22C28/00

  Alloys based on a metal not provided for in groups C22C5/00 - C22C27/00 · CPC title