Annealing for damage free laser processing for high efficiency solar cells
US-9214585-B2 · Dec 15, 2015 · US
US2018175221A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2018175221-A1 |
| Application number | US-201615384061-A |
| Country | US |
| Kind code | A1 |
| Filing date | Dec 19, 2016 |
| Priority date | Dec 19, 2016 |
| Publication date | Jun 21, 2018 |
| Grant date | — |
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Methods of fabricating solar cell emitter regions with differentiated P-type and N-type region architectures, and the resulting solar cells, are described herein. In an example, a solar cell includes an N-type semiconductor substrate having a light-receiving surface and a back surface. A plurality of N-type polycrystalline silicon regions is disposed on a first thin dielectric layer disposed on the back surface of the N-type semiconductor substrate. A plurality of P-type polycrystalline silicon regions is disposed on a second thin dielectric layer disposed in a corresponding one of a plurality of trenches interleaving the plurality of N-type polycrystalline silicon regions in the back surface of the N-type semiconductor substrate.
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What is claimed is: 1 . A solar cell, comprising: an N-type semiconductor substrate having a light-receiving surface and a back surface; a plurality of N-type polycrystalline silicon regions disposed on a first thin dielectric layer disposed on the back surface of the N-type semiconductor substrate; and a plurality of P-type polycrystalline silicon regions disposed on a second thin dielectric layer disposed in a corresponding one of a plurality of trenches interleaving the plurality of N-type polycrystalline silicon regions in the back surface of the N-type semiconductor substrate, wherein a total area of the plurality of N-type polycrystalline silicon regions is greater than a total area of the plurality of P-type polycrystalline silicon regions in the plurality of corresponding trenches. 2 . The solar cell of claim 1 , wherein the total area of the plurality of N-type polycrystalline silicon regions is greater than the total area of the plurality of P-type polycrystalline silicon regions in the plurality of corresponding trenches by a ratio of 15:1 or more. 3 . The solar cell of claim 1 , wherein the plurality of P-type polycrystalline silicon regions overlap a portion of the plurality of N-type polycrystalline silicon regions. 4 . The solar cell of claim 1 , wherein each of the plurality of N-type polycrystalline silicon regions has a width greater than a width of each of the plurality of P-type polycrystalline silicon regions by a ratio of 5:1 or more. 5 . The solar cell of claim 1 , wherein each of the plurality of N-type polycrystalline silicon regions has a thickness relative to a thickness of each of the plurality of P-type polycrystalline silicon regions by a ratio of 3:1 or less. 6 . The solar cell of claim 1 , wherein each of the plurality of trenches has a depth approximately in the range of 0.1-3 microns from the back surface and into the N-type semiconductor substrate. 7 . The solar cell of claim 1 , wherein each of the plurality of trenches has a texturized surface. 8 . The solar cell of claim 1 , further comprising: a third thin dielectric layer disposed laterally directly between adjacent ones of the N-type polycrystalline silicon regions and the P-type polycrystalline silicon regions. 9 . The solar cell of claim 1 , further comprising: a plurality of conductive contact structures electrically connected to the N-type polycrystalline silicon regions and the P-type polycrystalline silicon regions. 10 . A solar cell, comprising: an N-type semiconductor substrate having a light-receiving surface and a back surface; a plurality of N-type polycrystalline silicon regions disposed on a first thin dielectric layer disposed on the back surface of the N-type semiconductor substrate; and a plurality of P-type polycrystalline silicon regions disposed on a second thin dielectric layer disposed in a corresponding one of a plurality of trenches interleaving the plurality of N-type polycrystalline silicon regions in the back surface of the N-type semiconductor substrate, wherein each of the plurality of N-type polycrystalline silicon regions has a thickness relative to a thickness of each of the plurality of P-type polycrystalline silicon regions by a ratio of 3:1 or less. 11 . The solar cell of claim 10 , wherein the thickness of each of the plurality of N-type polycrystalline silicon regions is 1000 Angstroms or less, and the thickness of each of the plurality of P-type polycrystalline silicon regions is approximately 300 Angstroms. 12 . The solar cell of claim 10 , wherein the plurality of P-type polycrystalline silicon regions overlap a portion of the plurality of N-type polycrystalline silicon regions. 13 . The solar cell of claim 10 , wherein each of the plurality of trenches has a depth approximately in the range of 0.1-3 microns from the back surface and into the N-type semiconductor substrate. 14 . The solar cell of claim 10 , wherein each of the plurality of trenches has a texturized surface. 15 . The solar cell of claim 10 , further comprising: a third thin dielectric layer disposed laterally directly between adjacent ones of the N-type polycrystalline silicon regions and the P-type polycrystalline silicon regions. 16 . The solar cell of claim 10 , further comprising: a plurality of conductive contact structures electrically connected to the N-type polycrystalline silicon regions and the P-type polycrystalline silicon regions. 17 . A method of fabricating a solar cell, the method comprising: forming an N-type silicon layer on a first thin dielectric layer formed on a back surface of a substrate, the substrate having a light-receiving surface and the back surface, wherein the N-type silicon layer is formed using an in situ doping chemical vapor deposition (CVD) process; forming an insulator layer on the N-type silicon layer; forming a plurality of openings in the insulator layer and the N-type silicon layer and a corresponding plurality of trenches in the back surface of the substrate; and forming a P-type silicon layer on a second thin dielectric layer formed in the plurality of trenches using a solid-state doping process. 18 . The method of claim 17 , wherein forming the plurality of openings and the corresponding plurality of trenches comprises applying a laser ablation process. 19 . The method of claim 17 , further comprising: prior to forming the P-type silicon layer and the second thin dielectric layer in the plurality of trenches, texturizing a bottom surface of each of the plurality of trenches. 20 . A solar cell fabricated according to the method of claim 17 .
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
including only Group IV materials · CPC title
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