Flow modification fixture for an equipment front end module

Patent metadata

Field	Value
Publication number	US-2018174875-A1
Application number	US-201615736716-A
Country	US
Kind code	A1
Filing date	Jun 14, 2016
Priority date	Jun 17, 2015
Publication date	Jun 21, 2018
Grant date	—

Abstract

An equipment front end module. An equipment front end module (EFEM) includes a flow modification feature projecting away from an interior wall of the equipment front end module and extending into an interior of the equipment front end module (EFEM) at an angle. The flow modification feature modifies the flow of gas flowing from a top to a bottom of the EFEM by deflecting gas flow away and/or laminarizing gas flow across an opening of the EFEM, which may improve the purge performance of a wafer carrier docked at the EFEM.

First claim

What is claimed is:

1 . A flow modification fixture for modifying gas flow inside an equipment front end module used in the processing of silicon wafers, the fixture comprising a material positioned within and above an opening of an equipment front end module, wherein the material acts as a buffer against gas flowing into a wafer container when the wafer container is coupled to the equipment front end module.

2 . The flow modification fixture according to claim 1 , wherein the material is a sheet of material.

3 . The flow modification fixture according to claim 2 , wherein the sheet of material includes a first side that is sized to extend along the opening of the equipment front end module when the sheet of material is positioned adjacent an interior wall and a second side that extends in a direction away from the interior wall of the equipment front end module and into the equipment front end module interior, the first side having a first dimension that is equal to or greater than a width of the equipment front end module opening and the second side having a second dimension that is sufficient to modify gas flowing inside the equipment front end module when the second side extends into the equipment front end module interior.

4 . The flow modification fixture according to claim 2 , wherein the sheet material comprises a plurality of openings.

5 . The flow modification fixture according to claim 2 , wherein the sheet of material is a solid sheet of metal.

6 . The flow modification fixture according to claim 2 , wherein the sheet of material has a first portion positioned at an angle relative to a second portion along a minor axis of the sheet of material.

7 . The flow modification fixture according to claim 2 , wherein the sheet of material has a first portion positioned at an angle relative to a second portion along a major axis of the sheet of material.

8 . The flow modification fixture according to claim 2 , wherein the sheet of material has a planar configuration.

9 . The flow modification fixture of claim 1 , further comprising a mounting flange extending along a length of the first side.

10 . The flow modification fixture of claim 9 , wherein the mounting flange comprises any one of an adhesive or one or more magnetic elements disposed along a length of the mounting flange.

11 . The flow modification fixture of claim 9 , wherein the mounting flange comprises one or more apertures configured to engage a corresponding feature provided on the interior wall of the equipment front end module.

12 . The flow modification fixture of claim 1 , further comprising one or more mounting tabs for mounting the material to the interior wall of the equipment front end module.

13 . The flow modification fixture of claim 1 , further comprising a guide plate for increasing the velocity of gas flow within the equipment front end module.

14 . The flow modification fixture of claim 2 , wherein the sheet of material is a metal mesh.

15 . A flow modification fixture comprising: a sheet of material connected to an interior wall above an opening of an equipment front end module such that the sheet of material extends away from the interior wall into an interior of the equipment front end module at an angle and wherein the sheet has a first side that is sized to extend along the opening of the opening of the equipment front end module, the first side having a first dimension that is at least equal to a width of a load port opening of the equipment front end module and a second side that extends into the interior of the equipment front end module, the second side having a second dimension that is that is sufficient to modify gas flowing inside the equipment front end module when the sheet of material extends into the equipment front end module interior.

16 . The flow modification fixture according to claim 15 , wherein the fixture is integrally formed with interior wall of the equipment front end module.

17 . The flow modification fixture according to claim 15 , wherein the fixture is physically connected to the interior wall of the equipment front end module.

18 . The flow modification fixture according to claim 15 , wherein the fixture extends into the interior of the equipment front end module at an angle measured relative to the interior wall.

19 . The flow modification fixture according to claim 18 , wherein the angle is a ninety degree angle measured relative to the interior wall.

20 . The flow modification fixture according to claim 18 , wherein in the angle is greater than ninety degrees measured relative to the interior wall.

21 . The flow modification fixture according to claim 15 , wherein the sheet of material comprises a metal mesh.

22 . A flow modification feature for modifying gas flow inside an equipment front end module used in the processing of silicon wafers, the fixture comprising:
a fixture comprising a plurality of openings configured to be connected to an interior wall and above an opening of an equipment front end module, the fixture having a first portion positioned adjacent a second portion at an angle, the first portion sized to extend along the opening of the opening of the equipment front end module and the second portion sized to extend into the equipment front end module interior at a distance that is that is sufficient to modify gas flowing inside the equipment front end module.

23 . The flow modification feature according to claim 22 , further comprising attachment means for connecting the first portion of the metal mesh fixture to the interior wall of the equipment front end module.

24 . An equipment front end module comprising a flow modification feature projecting away from an interior wall of the equipment front end module and into an interior of the equipment front end module at an angle, the flow modification feature modifying a flow of gas flowing from a top to a bottom of the equipment front end module across an opening of the equipment front end module.

25 . The equipment front end module according to claim 24 , wherein the angle is a ninety degree angle measured relative to the interior wall of the equipment front end module.

26 . The equipment front end module according to claim 24 , wherein the flow modification feature is connected to the interior wall.

27 . The equipment front end module according to claim 24 , wherein the flow modification feature is integrally formed with the interior wall.

28 . The equipment front end module according to claim 24 , wherein the flow modification feature comprises a plurality of openings.

29 . The equipment front end module according to claim 24 , wherein the flow modification feature comprises a solid sheet of material.

Assignees

• Entegris Inc

Inventors

• Kim Seong Chan
• Schelske Gregory Alan

Classifications

• H10P72/3406

  involving removal of lid, door or cover · CPC title

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/1926 Primary

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• G05D7/0186

  without moving parts · CPC title

• H01L21/67393 Primary

  Electricity · mapped topic