Chip Assembly For Measuring Electrochemical Reaction On Solid-Liquid Phase Interface In Situ

Patent metadata

Field	Value
Publication number	US-2018136148-A1
Application number	US-201515576121-A
Country	US
Kind code	A1
Filing date	Jun 18, 2015
Priority date	May 22, 2015
Publication date	May 17, 2018
Grant date	—

Abstract

A chip assembly for measuring an electrochemical reaction on a solid-liquid phase interface in situ, comprising a first electrode, a second electrode, a first insulating film, a second insulating film, a third insulating film, a fourth insulating film and an upper chip and a lower chip which are oppositely arranged and of which two sides are correspondingly combined in a sealing manner; a through hole is provided on the upper chip; the first insulating film under the through hole is provided with the first electrode; a groove opposite to the through hole is provided on the lower chip; and the fourth insulating film arranged at one side of the groove is provided with the second electrode. The chip assembly dispenses with a specially-made sample rod, thereby substantially reducing test cost; and meanwhile, a lattice structure of a first electrode is also beneficial for observing topography change of a to-be-tested sample.

First claim

1 . A chip assembly for in-situ observation of an electrochemical reaction on a solid-liquid interface, wherein it comprises a first electrode, a second electrode, a first insulating film, a second insulating film, a third insulating film, a fourth insulating film as well as a top chip and a bottom chip which are oppositely arranged and of which two sides are correspondingly combined in a sealing manner;
the top chip has a through hole, the first insulating film covers the inner surface of the top chip and an opening of the through hole on the inner surface of the top chip, and the second insulating film covers the outer surface of the top chip; the first electrode is disposed on the surface of the first insulating film towards the bottom chip and located under the through hole; a part of the inner surface of the bottom chip is recessed to form a groove opposite to the through hole, the third insulating film covers the inner surface and the outer surface of the bottom chip, and the fourth insulating film covers the inner wall of the groove and the third insulating film on the inner surface of the bottom chip; and the second electrode is disposed on the fourth insulating film and located on one side of the groove.

2 . The chip assembly according to claim 1 , wherein the size of the through hole is gradually increasing in a direction away from the inner surface of the top chip.

3 . The chip assembly according to claim 1 , wherein the first electrode has a grid structure.

4 . The chip assembly according to claim 3 , wherein the size of the first electrode matches with the opening of the through hole on the inner surface of the top chip.

5 . The chip assembly according to claim 3 , wherein the first electrode extends towards the side end of the top chip to form a first electrode extending portion.

6 . The chip assembly according to claim 5 , wherein the chip assembly further comprises a first adhesive member and a second adhesive member, the first adhesive member is disposed between the second electrode and the first insulating film opposite to the second electrode, and the second adhesive member is disposed between the first electrode extending portion and the fourth insulating film opposite to the first electrode extending portion.

7 . The chip assembly according to claim 6 , wherein the first adhesive member and/or the second adhesive member are adhesives formed of epoxy resin.

8 . The chip assembly according to claim 2 , wherein the first electrode has a grid structure.

9 . The chip assembly according to claim 8 , wherein the size of the first electrode matches with the opening of the through hole on the inner surface of the top chip.

10 . The chip assembly according to claim 8 , wherein the first electrode extends towards the side end of the top chip to form a first electrode extending portion.

11 . The chip assembly according to claim 10 , wherein the chip assembly further comprises a first adhesive member and a second adhesive member, the first adhesive member is disposed between the second electrode and the first insulating film opposite to the second electrode, and the second adhesive member is disposed between the first electrode extending portion and the fourth insulating film opposite to the first electrode extending portion.

12 . The chip assembly according to claim 11 , wherein the first adhesive member and/or the second adhesive member are adhesives formed of epoxy resin.

13 . The chip assembly according to claim 1 , wherein the first insulating film and/or the second insulating film and/or the third insulating film and/or the fourth insulating film are formed of silicon nitride.

14 . The chip assembly according to claim 1 , wherein the material of the first electrode and/or the second electrode is conductive metal.

15 . The chip assembly according to claim 1 , wherein the sizes of the top chip and the bottom chip are from 1.5 cm×2 cm to 2 cm×3 cm.

Assignees

• Suzhou Inst Nano Tech & Nano Bionics Sinano Cas
• Suzhou Inst Nano Tech & Nano Bionics Sinano Cas

Inventors

• Zhang Yuegang
• Rong Genlan
• Ma Shuo

Classifications

• H01J37/20

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title

• H01J2237/2007

  Holding mechanisms · CPC title

• H01J2237/2003

  Environmental cells · CPC title

• G01N1/28 Primary

  Preparing specimens for investigation {including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q}(mounting specimens on microscopic slides G02B21/34; means for supporting the objects or the materials to be analysed in electron microscopes H01J37/20 {; laboratory gas handling apparatus B01L5/00}) · CPC title

• G01N23/2251

  using incident electron beams, e.g. scanning electron microscopy [SEM] · CPC title