Method for charging gas into cassette pod

Patent metadata

Field	Value
Publication number	US-2018082876-A1
Application number	US-201715825192-A
Country	US
Kind code	A1
Filing date	Nov 29, 2017
Priority date	Oct 30, 2013
Publication date	Mar 22, 2018
Grant date	—

Abstract

A method for transporting a cassette pod for containing semiconductor waters is provided. The method includes transporting a cassette pod configured to receive a semiconductor wafer with a transporting apparatus. The method further includes supplying a gas from a cylinder into a housing of the cassette pod. The cylinder is externally positioned on the housing. The method also includes detecting a gas pressure in the cylinder with a detection element. In addition, the method includes issuing a signal to the transporting apparatus when the gas pressure in the cylinder is lower than a predetermined limit.

First claim

What is claimed is:

1 . A method for transporting a cassette pod for containing semiconductor wafers, comprising:
transporting a cassette pod configured to receive a semiconductor wafer with a transporting apparatus; supplying a gas from a cylinder into a housing of the cassette pod, wherein the cylinder is externally positioned on the housing; detecting a gas pressure in the cylinder with a detection element; and issuing a signal to the transporting apparatus when the gas pressure in the cylinder is lower a redetermined limit.

2 . The method as claimed in claim 1 , further comprising:
delivering the gas from the cylinder to the housing via a tube externally positioned on the housing; and controlling a flow of the gas from the cylinder to the housing with a flow control valve connected to the tube.

3 . The method as claimed in claim 1 wherein the gas comprises nitrogen gas.

4 . The method as claimed in claim 1 , further comprising
processing the semiconductor wafer with a processing apparatus, wherein the cassette pod is transported from the processing apparatus to a predetermined destination.

5 . The method as claimed in claim 4 , wherein the gas is supplied to the housing prior to the cassette pod is removed from the processing apparatus.

6 . The method as claimed in claim 4 , wherein the gas is supplied to the housing no later than the cassette pod is removed from the processing apparatus.

7 . The method as claimed in claim 4 , wherein the predetermined destination comprises a stocker, and the method further comprises storing the cassette pod in the stocker.

8 . The method as claimed in claim 4 , wherein the predetermined destination comprises another processing apparatus, and the method further comprises processing the semiconductor wafer with the another processing apparatus.

9 . The method as claimed in claim 1 , further comprising replacing the cylinder with another cylinder filled with the gas when the signal is issued.

10 . The method as claimed in claim 1 , further comprising:
transporting the cassette pod to a work station when the signal is issued; and removing the semiconductor wafer to another cassette pod which is equipped with another cylinder filled with the gas.

11 . The method as claimed in claim 1 , further comprising:
closing a door after the at least one semiconductor wafer is loaded into the housing to form an enclosure and issuing a request to initiate the charging of the gas simultaneously.

12 . A method for transporting a cassette pod for containing semiconductor wafers, comprising:
processing a semiconductor wafer with a processing apparatus; placing the semiconductor wafer processed by the processing apparatus into a housing of a cassette pod; supplying a gas from a cylinder into the housing, wherein the cylinder is externally positioned on the housing; detecting a gas pressure in the cylinder with a detection element; and moving the cassette pod to a work station to replace the cylinder with another cylinder filled with the gas in response to a signal issued by the detection element when the gas pressure in the cylinder is lower than a predetermined limit.

13 . The method as claimed in claim 12 , further comprising:
delivering the gas from the cylinder to the housing via a tube externally positioned on the housing; and controlling a flow of the gas front the cylinder to the housing with a flow control valve connected to the tube.

14 . The method as claimed in claim 12 , wherein the gas comprises nitrogen gas.

15 . The method as claimed in claim 12 , further comprising transporting the cassette pod from the processing apparatus to a predetermined destination when the signal is not issued,
wherein the gas is supplied to the housing prior to the cassette pod is removed from the processing apparatus.

16 . The method as claimed in claim 12 , further comprising transporting the cassette pod from the processing apparatus to a predetermined destination when the signal is not issued;
wherein the gas is supplied to the housing no later than the cassette pod is removed from the processing apparatus.

17 . The method as claimed in claim 12 , further comprising:
closing a door after the processed semiconductor wafer is loaded into the housing to form an enclosure and issuing a request to initiate the supply of the gas simultaneously.

18 . A method for transporting a cassette pod for containing semiconductor wafers, comprising:
placing a housing of a cassette pod on a gas purging assembly, wherein a gas inlet of the housing is connected to a gas spreading member of the gas purging assembly, and a gas is discharged from the gas purging assembly into the housing via the gas spreading member and the gas inlet; and removing the housing from the gas purging assembly and mounting a cylinder to an outer surface of a side fixed wall of the housing, wherein a tube is disposed outside of the housing and connects the cylinder to the gas inlet, and another gas is discharged from the cylinder into the housing via the tube and the gas inlet.

19 . The method as claimed in claim 18 , further comprising:
transporting the cassette pod with a transporting apparatus while the gas is discharged from the cylinder into the housing; and detecting a gas pressure in the cylinder with a detection element; wherein the transporting apparatus moves the cassette pod to a work station to replace the cylinder in response to a signal issued by the detection element when the gas pressure in the cylinder mounted on the housing is lower than a predetermined limit.

20 . The method as claimed in claim 18 , wherein the gas comprises nitrogen gas.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Lai Wei-Yu
• Chen Hung-Wen

Classifications

• H10P72/3221

  Overhead conveying · CPC title

• H10P72/1924

  characterised by atmosphere control · CPC title

• H10P72/1926 Primary

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• B65D81/2076

  in an at least partially rigid container · CPC title

• H01L21/67393 Primary

  Electricity · mapped topic