Helium management control system
US-9334859-B2 · May 10, 2016 · US
US2018073684A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2018073684-A1 |
| Application number | US-201615559965-A |
| Country | US |
| Kind code | A1 |
| Filing date | Mar 14, 2016 |
| Priority date | Mar 24, 2015 |
| Publication date | Mar 15, 2018 |
| Grant date | — |
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Provided is a gas pressure feed device including a compression device for compressing gas supplied from the upstream process and sending the gas to the downstream process, a shut off device provided in the downstream further than the compression device for shutting off the gas heading toward the downstream process, and a recirculation device for recirculate the gas shut off by the shut off device to the upstream of the compression device. The shut off device includes a first port on a primary side for introducing the gas from the compression device, a second port on a secondary side for sending the gas to the downstream process, a third port on the secondary side for sending the gas to the recirculation device, and a switching device for switching the gas heading toward the secondary side to either the second port or the third port.
Opening claim text (preview).
1 - 6 . (canceled) 7 . A gas pressure feed device comprising: a compression device for compressing gas supplied from the upstream process and sending the gas to the downstream process; a shut off device provided the downstream further than the compression device for shutting off the gas heading toward the downstream process; and a recirculation device for recirculate the gas shut off by the shut off device to the upstream of the compression device, wherein the shut off device includes a first port on a primary side for introducing the gas from the compression device, a second port on a secondary side for sending the gas to the downstream process, a third port on the secondary side for sending the gas to the recirculation device, and a switching device for switching the gas heading toward the secondary side to either the second port or the third port. 8 . The gas pressure feed device according to claim 7 , wherein in an intermediate stage of switching by the switching device, the shut off device continues to send the gas toward at least one of the second port and the third port. 9 . The gas pressure feed device according to claim 7 , wherein the shut off device comprises a three-way valve having a case-shaped valve main framework, a valve port (“inner port”) in which a secondary side thereof is movably supported between positions of the second port and the third port, and a driving device for driving the valve port (“inner port”), wherein the valve main framework is provided with the first port, the second port, and the third port, wherein the switching device is constituted by the valve port (“inner port”) and the driving device, wherein the valve framework is provided with a first communication portion transferable with the first port, a second communication portion transferable with at least one of the second port and the third port, and a gas flow portion for allowing gas to flow from the first communication portion to the second communication portion, and wherein movement of the valve port (“inner port”) by the driving device switches between a first position in which the first communication portion transports with the first port and the second communication portion transports with the second port and a second position in which the first communication portion transports with the first port and the second communication portion transports with the third port. 10 . The gas pressure feed device according to claim 8 , wherein the shut off device comprises a three-way valve having a case-shaped valve main framework, a valve port (“inner port”) in which a secondary side thereof is movably supported between positions of the second port and the third port, and a driving device for driving the valve port (“inner port”), wherein the valve main framework is provided with the first port, the second port, and the third port, wherein the switching device is constituted by the valve port (“inner port”) and the driving device, wherein the valve framework is provided with a first communication portion transferable with the first port, a second communication portion transferable with at least one of the second port and the third port, and a gas flow portion for allowing gas to flow from the first communication portion to the second communication portion, and wherein movement of the valve port (“inner port”) by the driving device switches between a first position in which the first communication portion transports with the first port and the second communication portion transports with the second port and a second position in which the first communication portion transports with the first port and the second communication portion transports with the third port. 11 . The gas pressure feed device according to claim 9 , wherein the valve port (“inner port”) is formed in a spherical shape and a secondary side thereof is rotationally supported between the positions of the second port and the third port in the valve main framework, wherein the first communication portion and the second communication portion are positioned oppositely in a radial direction of the valve framework, and the gas flow portion is formed passing through the valve port (“inner port”), wherein the first communication portion has an opening area enveloping the first port in a movement range caused by rotation of the valve port (“inner port”), and wherein the second communication portion is configured such that a flow passage cross section at the second port and the third port during switching between the first position and the second position caused by the rotation of the valve port (“inner port”) has the opening area more than half of the flow passage cross section at the first port. 12 . The gas pressure feed device according to claim 10 , wherein the valve port (“inner port”) is formed in a spherical shape and a secondary side thereof is rotationally supported between the positions of the second port and the third port in the valve main framework, wherein the first communication portion and the second communication portion are positioned oppositely in a radial direction of the valve framework, and the gas flow portion is formed passing through the valve port (“inner port”), wherein the first communication portion has an opening area enveloping the first port in a movement range caused by rotation of the valve port (“inner port”), and wherein the second communication portion is configured such that a flow passage cross section at the second port and the third port during switching between the first position and the second position caused by the rotation of the valve port (“inner port”) has the opening area more than half of the flow passage cross section at the first port. 13 . The gas pressure feed device according to claim 7 , wherein the shut off device comprises a first two-way valve provided between the compression device and the downstream process, a second two-way valve provided between the compression device and the recirculation device, and a driving device for driving the first two-way valve and the second two-way valve, wherein the first two-way valve is provided with the first port and the second port, and the second two-way valve is provided with the first port and the third port, and wherein the driving device constituting the switching device switches between a first position in which the gas is sent from the second port to the downstream process by opening the first two-way valve and closing the second two-way valve and a second position in which the gas is recirculated from the third port to the recirculation device by closing the first two-way valve and opening the second two-way valve. 14 . The gas pressure feed device according to claim 8 , wherein the shut off device comprises a first two-way valve provided between the compression device and the downstream process, a second two-way valve provided between the compression device and the recirculation device, and a driving device for driving the first two-way valve and the second two-way valve, wherein the first two-way valve is provided with the first port and the second port, and the second two-way valve is provided with the first port and the third port, and wherein the driving device constituting the switching device switches between a first position in which the gas is sent from the second port to the downstream process by opening the first two-way valve and closing the second two-way valve and a second position in which the gas is recirculated from the third port to the recirculation device by closing the first two-way valve and opening the second two-way valve. 15 . The gas pressure feed device according to claim 7 , wherein the shut off device comprises a tubular valve framework and a d
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