Vaporization supply apparatus

Patent metadata

Field	Value
Publication number	US-2018071702-A1
Application number	US-201615565696-A
Country	US
Kind code	A1
Filing date	Apr 11, 2016
Priority date	Apr 30, 2015
Publication date	Mar 15, 2018
Grant date	—

Abstract

A vaporization supply apparatus comprises a vaporizer which heats and vaporize a liquid, a flow-rate control device which controls a flow rate of a gas sent out from the vaporizer, a first control valve interposed in a supply channel of a liquid to the vaporizer, a pressure detector for detecting a pressure of a gas vaporized by the vaporizer, a liquid detection part for measuring parameters of a liquid in an amount higher than a predetermined amount in the vaporizer, and a control device which controls the first control valve to supply a predetermined amount of a liquid to the vaporizer based on the pressure value detected by the pressure detector, and to close the first control valve when the liquid detection part detect a liquid in an amount higher than the predetermined amount.

First claim

1 . A vaporization supply apparatus comprising:
a vaporizer which heats and vaporizes a liquid,
a flow-rate control device which controls a flow rate of a gas sent out from the vaporizer,
a first control valve interposed in a supply channel of a liquid to the vaporizer,
a pressure detector for detecting a pressure of a gas vaporized by the vaporizer and sent to the flow-rate control device,
a liquid detection part for measuring parameters of a liquid in an amount higher than a predetermined amount in the vaporizer, and
a control device which controls the first control valve to supply a liquid to the vaporizer based on a pressure value detected by the pressure detector, and to close the first control valve when the liquid detection part detects a liquid flowing into the vaporizer in an amount higher than the predetermined amount.

2 . The vaporization supply apparatus according to claim 1 further comprising a second control valve interposed in a gas passage between the vaporizer and the flow-rate control device, wherein the control device, when the liquid detection part detects a liquid flowing into the vaporizer in an amount higher than the predetermined amount, controls to close the first control valve and the second control valve.

3 . A vaporization supply apparatus comprising:
a vaporizer which heats and vaporizes a liquid,
a flow-rate control device which controls a flow rate of a gas sent out from the vaporizer,
a first control valve interposed in a supply channel of a liquid to the vaporizer,
a pressure detector for detecting a pressure of a gas vaporized by the vaporizer and sent to the flow-rate control device,
a second control valve interposed in a gas passage between the vaporizer and the flow-rate control device,
a liquid detection part for measuring parameters of a liquid in an amount higher than a predetermined amount in the vaporizer, and
a control device which controls the first control valve to supply a liquid to the vaporizer based on a pressure value detected by the pressure detector, and controls to close the second control valve when the liquid detection part detects a liquid flowing into the vaporizer in an amount higher than the predetermined amount.

4 . The vaporization supply apparatus according to claim 1 , wherein the liquid detection part is a temperature detector.

5 . The vaporization supply apparatus according to claim 1 , wherein the liquid detection part is a level gauge.

6 . The vaporization supply apparatus according to claim 1 , wherein the liquid detection part is a load cell.

7 . The vaporization supply apparatus according to claim 1 , wherein the vaporizer is provided with a vaporizing chamber, and the liquid detection part is disposed in the vaporizing chamber.

8 . The vaporization supply apparatus according to claim 1 , wherein the vaporizer is provided with a vaporizing chamber and a gas heating chamber which is in communication with the vaporizing chamber, and the liquid detection part is disposed in the gas heating chamber.

9 . The vaporization supply apparatus according to claim 3 , wherein the liquid detection part is a temperature detector.

10 . The vaporization supply apparatus according to claim 3 , wherein the liquid detection part is a level gauge.

11 . The vaporization supply apparatus according to claim 3 , wherein the liquid detection part is a load cell.

12 . The vaporization supply apparatus according to claim 3 , wherein the vaporizer is provided with a vaporizing chamber, and the liquid detection part is disposed in the vaporizing chamber.

13 . The vaporization supply apparatus according to claim 3 , wherein the vaporizer is provided with a vaporizing chamber and a gas heating chamber which is in communication with the vaporizing chamber, and the liquid detection part is disposed in the gas heating chamber.

Assignees

• Fujikin Kk

Inventors

• Hidaka Atsushi
• Nagase Masaaki
• Hirata Kaoru
• Sugita Katsuyuki
• Nakatani Takatoshi
• Yamashita Satoru
• Nishino Kouji
• Ikeda Nobukazu
• Hirao Keiji

Classifications

• H10P72/0424

  using mainly spraying means, e.g. nozzles · CPC title

• H10P50/266

  by vapour etching only · CPC title

• H10P14/60

  of insulating materials · CPC title

• B01J7/02 Primary

  by wet methods · CPC title

• C23C16/448

  characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials · CPC title