Cleaning Solution Mixing System With Ultra-Dilute Cleaning Solution And Method Of Operation Thereof

Patent metadata

Field	Value
Publication number	US-2018024447-A1
Application number	US-201715652497-A
Country	US
Kind code	A1
Filing date	Jul 18, 2017
Priority date	Jul 25, 2016
Publication date	Jan 25, 2018
Grant date	—

Abstract

Disclosed are a cleaning solution mixing system, a tool and a method of operation thereof, including an ultrapure water source for providing ultrapure water; an ammonia filter for filtering ammonia in gas form; a hydrogen peroxide filter for filtering hydrogen peroxide in gas form; an ammonia re-gas membrane for dissolving the ammonia in the ultrapure water and forming ultra-dilute ammoniated water; a hydrogen peroxide re-gas membrane for dissolving the hydrogen peroxide in the ultrapure water and forming ultra-dilute hydrogenated water; and a mixer for forming an ultra-dilute cleaning solution by mixing the ultra-dilute ammoniated water and the ultra-dilute hydrogenated water.

First claim

What is claimed is:

1 . A method of operation of a cleaning solution mixing system comprising:
providing ultrapure water from an ultrapure water source; filtering an amount of ammonia through an ammonia filter; filtering an amount of hydrogen peroxide through a hydrogen peroxide filter; forming ultra-dilute ammoniated water by dissolving the ammonia in the ultrapure water; forming ultra-dilute hydrogenated water by dissolving the hydrogen peroxide in the ultrapure water; and forming an ultra-dilute cleaning solution by mixing the ultra-dilute ammoniated water and the ultra-dilute hydrogenated water.

2 . The method as claimed in claim 1 further comprising:
filtering an amount of tetramethyl ammonium hydroxide through a tetramethyl ammonium hydroxide filter; and
regulating the amount of tetramethyl ammonium hydroxide dissolved in the ultrapure water using a tetramethyl ammonium hydroxide mass flow controller.

3 . The method as claimed in claim 1 further comprising filtering the ultra-dilute hydrogenated water through an additional filter.

4 . The method as claimed in claim 1 further comprising regulating the amount of the ammonia dissolved in the ultrapure water using an ammonia mass flow controller.

5 . The method as claimed in claim 1 further comprising regulating the amount of the hydrogen peroxide dissolved in the ultrapure water using a hydrogen peroxide mass flow controller.

6 . The method as claimed in claim 1 further comprising regulating the amount of the ammonia dissolved in the ultrapure water using a conductivity sensor connected to an ammonia mass flow controller.

7 . The method as claimed in claim 1 further comprising regulating the amount of the hydrogen peroxide dissolved in the ultrapure water using a hydrogen peroxide sensor connected to a hydrogen peroxide mass flow controller.

8 . A cleaning solution mixing system comprising:
an ultrapure water source for providing ultrapure water; an ammonia filter for filtering an amount of ammonia in gas form; a hydrogen peroxide filter for filtering hydrogen peroxide in gas form; an ammonia re-gas membrane for dissolving the ammonia in the ultrapure water and forming ultra-dilute ammoniated water; a hydrogen peroxide re-gas membrane for dissolving the hydrogen peroxide in the ultrapure water and forming ultra-dilute hydrogenated water; and a mixer for forming an ultra-dilute cleaning solution by mixing the ultra-dilute ammoniated water and the ultra-dilute hydrogenated water.

9 . The system as claimed in claim 8 further comprising a second filter for filtering the ultra-dilute ammoniated water.

10 . The system as claimed in claim 8 further comprising a tetramethyl ammonium hydroxide filter for filtering tetramethyl ammonium hydroxide in gas form.

11 . The system as claimed in claim 8 further comprising an ammonia mass flow controller for regulating the amount of the ammonia dissolved in the ultrapure water.

12 . The system as claimed in claim 8 further comprising a hydrogen peroxide mass flow controller for regulating the amount of the hydrogen peroxide dissolved in the ultrapure water.

13 . The system as claimed in claim 8 further comprising a conductivity sensor connected to an ammonia mass flow controller for regulating the amount of the ammonia dissolved in the ultrapure water.

14 . The system as claimed in claim 8 further comprising a hydrogen peroxide sensor connected to a hydrogen peroxide mass flow controller for regulating the amount of the hydrogen peroxide dissolved in the ultrapure water.

15 . A cleaning tool comprising:
a cleaning solution mixing system including:
an ultrapure water source for providing ultrapure water;
an ammonia filter for filtering ammonia in gas form;
a hydrogen peroxide filter for filtering hydrogen peroxide in gas form;
an ammonia re-gas membrane for dissolving the ammonia in the ultrapure water and forming ultra-dilute ammoniated water;
a hydrogen peroxide re-gas membrane for dissolving the hydrogen peroxide in the ultrapure water and forming ultra-dilute hydrogenated water;
a mixer for forming an ultra-dilute cleaning solution by mixing the ultra-dilute ammoniated water and the ultra-dilute hydrogenated water; and
a cleaning chamber coupled to the cleaning solution mixing system.

16 . The cleaning tool as claimed in claim 15 further comprising:
an ammonia gas source for providing the ammonia in gas form; and
a hydrogen peroxide gas source for providing the hydrogen peroxide in gas form.

17 . The cleaning tool as claimed in claim 15 further comprising a de-gas membrane for removing excess gas from the ultrapure water.

18 . The cleaning tool as claimed in claim 15 further comprising a final conductivity sensor between the mixer and the cleaning chamber.

19 . The cleaning tool as claimed in claim 15 wherein the ammonia filter has a pore size of less than 5 nm.

20 . The cleaning tool as claimed in claim 15 wherein the hydrogen peroxide filter has a pore size of less than 5 nm.

Assignees

• Applied Materials Inc

Inventors

• Rastegar Abbas

Classifications

• G03F7/70925 Primary

  Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning · CPC title

• C11D3/3942

  Inorganic per-compounds (C11D3/3902 takes precedence) · CPC title

• B08B3/08

  the liquid having chemical or dissolving effect · CPC title

• C11D3/02

  Inorganic compounds {; Elemental compounds} · CPC title

• C11D3/30

  Amines; Substituted amines {; Quaternized amines} · CPC title