Twisted kaleido

Patent metadata

Field	Value
Publication number	US-2018024441-A1
Application number	US-201715656054-A
Country	US
Kind code	A1
Filing date	Jul 21, 2017
Priority date	Jul 22, 2016
Publication date	Jan 25, 2018
Grant date	—

Abstract

Implementations disclosed herein generally relate to a light pipe, or kaleido, for homogenizing light such that the light is uniform once the light exits the light pipe. By reflecting the light inside the light pipe, light uniformity is increased. In one implementation, a light pipe for an image projection apparatus is provided. The light pipe comprises an elongated rectangular body having a refractive index that provides total internal reflection within the elongated rectangular body. The elongated rectangular body has an input face for accepting light into the elongated rectangular body. The input face disposed substantially orthogonal to a longitudinal axis of the elongated rectangular body. The elongated rectangular body has an output face for releasing light from the elongated rectangular body. The output face is disposed substantially orthogonal to the longitudinal axis. The elongated rectangular body has a twist along the longitudinal axis.

First claim

What is claimed is:

1 . An image projection apparatus for imaging patterns on a substrate, comprising:
an illumination system, comprising:
a light pipe having an elongated rectangular body that has:
an input face for accepting light into the elongated rectangular body, the input face disposed substantially orthogonal to a longitudinal axis of the elongated rectangular body;
an output face for releasing light from the elongated rectangular body, the output face disposed substantially orthogonal to the longitudinal axis, wherein the elongated rectangular body has a twist along the longitudinal axis so that the input face and the output face are twisted relative to each other;

a laser light illumination device disposed adjacent to the input face of the light pipe; and
a projection system, comprising:
at least one projection lens; and
a light source coupled with the light pipe.

2 . The image projection apparatus of claim 1 , wherein the twist is between about 5 degrees and about 15 degrees.

3 . The image projection apparatus of claim 1 , wherein the twist is induced by mounting the light pipe in the image projection apparatus.

4 . The image projection apparatus of claim 1 , wherein the light source is a bundle of two or more laser illuminated fibers.

5 . The image projection apparatus of claim 4 , wherein the light source is coupled with the light pipe through a combiner that packs each of the two or more fibers into a compact bundle.

6 . The image projection apparatus of claim 1 , wherein the twist is uniform between the input face and the output face.

7 . The image projection apparatus of claim 1 , wherein the elongated rectangular body is fabricated from glass.

8 . A system, comprising:
two or more stages, wherein the two or more stages are configured to hold one or more substrates; and a plurality of image projection apparatuses for patterning the one or more substrates, wherein each image projection apparatus comprises:
an illumination system, comprising:
a light pipe having an elongated rectangular body that has:
an input face for accepting light into the elongated rectangular body, the input face disposed substantially orthogonal to a longitudinal axis of the elongated rectangular body; and
an output face for releasing light from the elongated rectangular body, the output face disposed substantially orthogonal to the longitudinal axis, wherein the elongated rectangular body has a twist along the longitudinal axis so that the input face and the output face are twisted relative to each other; and

a laser light source coupled with the light pipe.

9 . The system of claim 8 , wherein the twist is between about 5 degrees and about 15 degrees.

10 . The system of claim 9 , wherein the twist is induced by mounting the light pipe in the image projection apparatus.

11 . The system of claim 8 , wherein the light source is a bundle of two or more laser illuminated fibers.

12 . The system of claim 8 , wherein the light source is coupled with the light pipe through a combiner that packs each of the two or more fibers into a compact bundle.

13 . The system of claim 8 , wherein the twist in the light pipe is uniform between the input face and the output face.

14 . A method of shaping a beam of illumination, comprising:
directing light into a light pipe at an input face of the light pipe, wherein the light pipe has an elongated rectangular body and the input face is disposed substantially orthogonal to a longitudinal axis of the elongated rectangular body; propagating the directed light by total internal reflection through the light pipe to an output face of the light pipe, the output face disposed substantially orthogonal to the longitudinal axis; and allowing the propagated light to emanate from the output face, wherein the elongated rectangular body has a twist along the longitudinal axis.

15 . The method of claim 14 , wherein the twist is between about 5 degrees and about 15 degrees.

16 . The method of claim 14 , wherein the twist is between about 10 degrees and about 15 degrees.

17 . The method of claim 14 , wherein the twist is uniform between the input face and the output face.

18 . The method of claim 14 , wherein the elongated rectangular body is fabricated from glass.

19 . The method of claim 14 , wherein the elongated rectangular body is fabricated from fused silica material.

20 . The method of claim 14 , wherein the input face and the output face are each about 1 to 2 millimeters by about 1 to 2 millimeters with the elongated rectangular body having a length along the longitudinal axis of about 100 to 200 millimeters.

Assignees

• Applied Materials Inc

Inventors

• Markle David
• Thomas Timothy N

Classifications

• G03B21/008

  using micromirror devices · CPC title

• G03B21/208

  Homogenising, shaping of the illumination light · CPC title

• G02B6/0005 Primary

  the light guides being of the fibre type (G02B6/0003 takes precedence) · CPC title

• G02B6/04

  formed by bundles of fibres (G02B6/24 takes precedence) · CPC title

• G03F7/70191 Primary

  Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like · CPC title