Pattern sensing device and semiconductor sensing system
US-9846931-B2 · Dec 19, 2017 · US
Recipe Creation Device for Use in Semiconductor Measurement Device or Semiconductor Inspection Device
US2017371981A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2017371981-A1 |
| Application number | US-201515544151-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jan 23, 2015 |
| Priority date | Jan 23, 2015 |
| Publication date | Dec 28, 2017 |
| Grant date | — |
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- Title
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Abstract
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The purpose of the present invention is to provide a recipe creation device, with the goal of using past recipe data in order to highly efficiently create recipes. As an embodiment with which to achieve this goal, there is provided a recipe creation device comprising an arithmetic processing device that, on the basis of design data for a semiconductor element, establishes measurement conditions or inspection conditions by a semiconductor measurement device or a semiconductor inspection device, wherein the arithmetic processing device is configured to be able to access a database in which the measurement conditions or inspection conditions, and the pattern information of the semiconductor element, are stored in associated form, and the measurement conditions or inspection conditions are selected through a search using pattern information of the semiconductor element.
First claim
Opening claim text (preview).
1 . A recipe creation device comprising: an arithmetic processing device that, on the basis of design data for a semiconductor element, establishes measurement conditions or inspection conditions by a semiconductor measurement device or a semiconductor inspection device, wherein the arithmetic processing device is configured to be able to access a database in which the measurement conditions or inspection conditions, and the pattern information of the semiconductor element, are stored in associated form, and the measurement conditions or inspection conditions are selected through a search using pattern information of the semiconductor element. 2 . The recipe creation device according to claim 1 , wherein the pattern information is a template which is generated on the basis of the design data. 3 . The recipe creation device according to claim 1 , wherein the arithmetic processing device generates the recipes on the basis of measurement conditions or inspection conditions selected through the search. 4 . The recipe creation device according to claim 1 , wherein the arithmetic processing device displays measurement conditions or inspection conditions selected through the search on a display device. 5 . The recipe creation device according to claim 1 , wherein the arithmetic processing device selects the measurement conditions or the inspection conditions on the basis of selected recipe information and the pattern information.
Assignees
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Classifications
Inspection process planner · CPC title
characterised by quality surveillance of production · CPC title
characterised by job scheduling, process planning, material flow · CPC title
Computer-aided design [CAD] · CPC title
- G06F30/398Primary
Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM] (optical proximity correction [OPC] design processes G03F1/36) · CPC title
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- What does patent US2017371981A1 cover?
- The purpose of the present invention is to provide a recipe creation device, with the goal of using past recipe data in order to highly efficiently create recipes. As an embodiment with which to achieve this goal, there is provided a recipe creation device comprising an arithmetic processing device that, on the basis of design data for a semiconductor element, establishes measurement conditions…
- Who is the assignee on this patent?
- Hitachi High Tech Corp
- What technology area does this patent fall under?
- Primary CPC classification G06F30/398. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Thu Dec 28 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 2 related publications on this page (citations in our corpus or others sharing the same primary CPC).