Energy-filtered cold electron devices and methods

Patent metadata

Field	Value
Publication number	US-2017338331-A1
Application number	US-201715616289-A
Country	US
Kind code	A1
Filing date	Jun 7, 2017
Priority date	Feb 4, 2014
Publication date	Nov 23, 2017
Grant date	—

Abstract

Energy-filtered cold electron devices use electron energy filtering through discrete energy levels of quantum wells or quantum dots that are formed through band bending of tunneling barrier conduction band. These devices can obtain low effective electron temperatures of less than or equal to 45K at room temperature, steep electrical current turn-on/turn-off capabilities with a steepness of less than or equal to 10 mV/decade at room temperature, subthreshold swings of less than or equal to 10 mV/decade at room temperature, and/or supply voltages of less than or equal to 0.1 V.

First claim

1 - 29 . (canceled)

30 . An energy-filtered cold electron nanopillar device comprising:
a first electrode disposed on an isolation layer; a first tunneling barrier disposed on the first electrode; a second tunneling barrier disposed on the first tunneling barrier; an island material comprised of a semiconductor or metal disposed on the second tunneling barrier; an additional second tunneling barrier disposed on the island material; an additional first tunneling barrier disposed on the additional second tunneling barrier; and a second electrode disposed on the additional first tunneling barrier; wherein the first electrode, the first tunneling barrier, the second tunneling barrier, the island material, the additional second tunneling barrier, the additional first tunneling barrier and the second electrode form a nanopillar; wherein quantum wells or quantum dots are formed in the first tunneling barrier and/or the additional first tunneling barrier; and wherein discrete energy levels are formed in the quantum wells or quantum dots.

31 . The device as recited in claim 30 , wherein the first tunneling barrier is spontaneously formed or deposited on the first electrode, and the additional first tunneling barrier is spontaneously formed or deposited on the additional second tunneling barrier.

32 . The device as recited in claim 30 , wherein the device exhibits electron energy filtering through the discrete energy levels of the quantum wells or quantum dots.

33 . The device as recited in claim 32 , wherein the device exhibits lowering of electron temperature through the electron energy filtering.

34 . The device as recited in claim 33 , wherein the device has an effective electron temperature of less than or equal to 45 K at room temperature without any external cooling.

35 . The device as recited in claim 30 , further comprising a source pad disposed on the isolation layer in contact with the first electrode.

36 . The device as recited in claim 30 , further comprising:
a passivation material disposed around the nanopillar; a drain pad disposed on the passivation material in contact with the second electrode; and one or more vias and metal interconnects attached to the source pad, the drain pad or both pads.

37 . The device as recited in claim 35 , further comprising:
an insulating material disposed on the source pad and around the nanopillar; a gate electrode disposed within the insulating material and separated from the nanopillar; a drain pad in contact with the second electrode and a gate pad in contact with the gate electrode; and a passivation layer over the resulting structure.

38 . The device as recited in claim 37 , further comprising one or more vias and metal interconnects attached to the source pad, the drain pad, the gate pad or a combination thereof.

39 . A method for fabricating an energy-filtered cold electron nanopillar device comprising the steps of:
depositing a first electrode on an isolation layer; depositing or spontaneously forming a first tunneling barrier on the first electrode; depositing a second tunneling barrier on the first tunneling barrier; depositing an island material on the second tunneling barrier; depositing an additional second tunneling barrier on the island material; depositing or spontaneously forming an additional first tunneling barrier on the additional second tunneling barrier; depositing a second electrode on the additional first tunneling barrier; and producing a nanopillar from the first electrode, the first tunneling barrier, the second tunneling barrier, the island material, the additional second tunneling barrier, the additional first tunneling barrier, and the second electrode.

40 . The method as recited in claim 39 , wherein the device exhibits electron energy filtering through discrete energy levels of quantum wells or quantum dots formed in the first tunneling barrier and/or the additional first tunneling barrier.

41 . The method as recited in claim 40 , wherein the device exhibits lowering of electron temperature through the electron energy filtering.

42 . The method as recited in claim 39 , wherein the device has an effective electron temperature of less than or equal to 45 K at room temperature without any external cooling.

43 . The method as recited in claim 40 , wherein the device exhibits band bending of the first tunneling barrier and/or the additional first tunneling barrier through formation of interface dipoles, interface charges, formation of self-assembled monolayers, UV-ozone treatment, plasma treatment, or a combination thereof.

44 . The method as recited in claim 41 , wherein the device has an effective electron temperature of less than or equal to 45 K and an electric current turn-on and turn-off capability with a steepness of less than or equal to 10 mV/decade at room temperature.

45 . The method as recited in claim 39 , further comprising the step of disposing a gate electrode that surrounds the nanopillar producing an energy-filtered cold electron nanopillar transistor.

46 . The method as recited in claim 45 , the device having a subthreshold swing of less than or equal to 10 mV/decade at room temperature.

47 . The method as recited in claim 39 , the device having a supply voltage of less than or equal to 0.1V.

48 . The method as recited in claim 39 , wherein the first tunneling barrier and the additional first tunneling barrier comprise a single type of material or two different materials.

49 . The method as recited in claim 39 , wherein the second tunneling barrier and the additional second tunneling barrier comprise a single type of material or two different materials.

50 . The method as recited in claim 39 , wherein the first electrode comprises a Cr source electrode, the first tunneling barrier and the additional first tunneling barrier comprise Cr 2 O 3 , the second tunneling barrier and the additional second tunneling barrier comprise SiO 2 or Si 3 N 4 , the island material comprises Si, and the second electrode comprises a Cr drain electrode.

51 . The method as recited in claim 39 , wherein:
the first electrode and second electrode are formed from a material selected from the group consisting of Al, Pb, Cr, Cu, Au, Ag, Pt, Pd, and Ti; the first tunneling barrier and the additional first tunneling barrier are formed from a material selected from the group consisting of Al 2 O 3 , Cr 2 O 3 , and TiO x ; the second tunneling barrier and the additional second tunneling barrier are formed from a material selected from the group consisting of SiO 2 , Si 3 N 4 , Al 2 O 3 , Cr 2 O 3 , and TiO x ; and the island material is selected from the group consisting of Si, Ge, CdSe, CdTe, GaAs, InP, InAs, Al, Pb, Cr, Cu, Au, Ag, Pt, Pd, and Ti.

52 - 150 . (canceled)

151 . The method as recited in claim 39 , wherein the nanopillar is produced using a vertical etching process or a liftoff process.

Assignees

• Univ Texas

Inventors

• Koh Seong Jin
• Bhadrachalam Pradeep
• Ma Liang-Chieh

Classifications

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• Y10S977/774

  Exhibiting three-dimensional carrier confinement, e.g. quantum dots · CPC title

• Y10S977/937

  Single electron transistor · CPC title

• B82Y10/00 Primary

  Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic · CPC title

• H01L29/413

  Electricity · mapped topic