Alumina layer formation on aluminum surface to protect aluminum parts

Patent metadata

Field	Value
Publication number	US-2017275763-A1
Application number	US-201715437098-A
Country	US
Kind code	A1
Filing date	Feb 20, 2017
Priority date	Mar 23, 2016
Publication date	Sep 28, 2017
Grant date	—

Abstract

Implementations described herein generally relate to materials and coatings, and more specifically to materials and coatings for aluminum and aluminum-containing chamber components. In one implementation, a process is provided. The process comprises exposing an aluminum-containing component to a moisture thermal treatment process and exposing the aluminum-containing component to a thermal treatment process. The moisture thermal treatment process comprises exposing the aluminum-containing component to an environment having a moisture content from about 30% to about 100% at a first temperature from about 30 to about 100 degrees Celsius. The thermal treatment process comprises heating the aluminum-containing component to a second temperature from about 200 degrees Celsius to about 550 degrees Celsius to form an alumina layer on the at least one surface of the aluminum-containing component.

First claim

1 . A process, comprising:
exposing an aluminum-containing component to a moisture thermal treatment process comprising exposing the aluminum-containing component to an environment having a moisture content from about 30% to about 100% at a first temperature from about 30 to about 100 degrees Celsius; and exposing the aluminum-containing component to a thermal treatment process comprising heating the aluminum-containing component to a second temperature from about 200 degrees Celsius to about 550 degrees Celsius to form an alumina layer on the at least one surface of the aluminum-containing component.

2 . The process of claim 1 , wherein the aluminum-containing component is composed of an aluminum alloy comprising magnesium.

3 . The process of claim 1 , wherein the aluminum-containing component has an oxide layer formed on the at least one surface prior to the moisture thermal treatment.

4 . The process of claim 1 , wherein the first temperature is between about 50 to about 80 degrees Celsius.

5 . The process of claim 4 , wherein the second temperature is from about 350 degrees Celsius and about 400 degrees Celsius.

6 . The process of claim 5 , wherein the moisture content is from about 50-70%.

7 . The process of claim 1 , wherein the environment comprises water (H 2 O) vapor.

8 . The process of claim 7 , wherein the thermal treatment process is performed in a moisture-free environment.

9 . A component having the alumina layer of claim 1 formed thereon.

10 . The component of claim 9 , wherein the component has one or more holes having a diameter from about 16 mils to about 0.5 millimeters and the alumina layer is formed on an inner surface of the one or more holes.

11 . A process, comprising:
exposing an aluminum-containing component to a wet clean solution including nitric acid (HNO 3 ) and hydrofluoric acid (HF); exposing the aluminum-containing component to a moisture thermal treatment process comprising exposing the aluminum-containing component to an environment having a moisture content from about 30% to about 100% at a first temperature from about 30 to about 100 degrees Celsius; and exposing the aluminum-containing component to a thermal treatment process comprising heating the aluminum-containing component to a second temperature from about 200 degrees Celsius to about 550 degrees Celsius to form an alumina layer on the at least one surface of the aluminum-containing component.

12 . The process of claim 11 , wherein the first temperature is between about 50 to about 80 degrees Celsius.

13 . The process of claim 12 , wherein the second temperature is from about 350 degrees Celsius and about 400 degrees Celsius.

14 . The process of claim 13 , wherein the moisture content is from about 50-70%.

15 . The process of claim 11 , wherein the environment comprises water (H 2 O) vapor.

16 . A process, comprising:
exposing an aluminum-containing component to a wet clean solution including nitric acid (HNO 3 ) and hydrofluoric acid (HF); exposing the aluminum-containing component to a moisture thermal treatment process comprising exposing the aluminum-containing component to an environment having a moisture content from about 30% to about 100% at a first temperature from about 30 to about 100 degrees Celsius, wherein exposing the aluminum-containing component to the moisture thermal treatment process forms an Al(OH) 3 /AlOOH layer on the surface of the aluminum-containing component; and exposing the aluminum-containing component to a thermal treatment process comprising heating the aluminum-containing component to a second temperature from about 200 degrees Celsius to about 550 degrees Celsius to form an alumina layer on the at least one surface of the aluminum-containing component, wherein the thermal treatment process converts at least a portion of the Al(OH) 3 /AlOOH layer to the alumina layer.

17 . The process of claim 16 , wherein the first temperature is between about 50 to about 80 degrees Celsius.

18 . The process of claim 17 , wherein the second temperature is from about 350 degrees Celsius and about 400 degrees Celsius.

19 . The process of claim 18 , wherein the moisture content is from about 50-70%.

20 . The process of claim 16 , wherein the environment comprises water (H 2 O) vapor.

Assignees

• Applied Materials Inc

Inventors

• Duan Ren-Guan
• Zhou Jianhua
• Rocha-Alvarez Juan Carlos

Classifications

• C22F1/04 Primary

  of aluminium or alloys based thereon · CPC title

• C23C18/1295 Primary

  with after-treatment of the deposited inorganic material · CPC title

• C23C18/1279

  performed under reactive atmosphere, e.g. oxidising or reducing atmospheres · CPC title

• C23C18/04

  Pretreatment of the material to be coated (C23C18/06 takes precedence) · CPC title

• C23G1/125

  aluminium · CPC title