Dielectric, capacitor, electrical circuit, circuit board, and apparatus
US-2024047137-A1 · Feb 8, 2024 · US
US2017275174A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2017275174-A1 |
| Application number | US-201715459306-A |
| Country | US |
| Kind code | A1 |
| Filing date | Mar 15, 2017 |
| Priority date | Mar 22, 2016 |
| Publication date | Sep 28, 2017 |
| Grant date | — |
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A dielectric film containing an alkaline earth metal oxide having a NaCl type crystal structure as a main component, wherein the dielectric film has a (111)-oriented columnar structure in a direction perpendicular to the surface of the dielectric film, and in a Cu—Kα X-ray diffraction chart of the dielectric film, a half width of the diffraction peak of (111) is in a range of from 0.3° to 2.0°.
Opening claim text (preview).
1 . A dielectric film, comprising an alkaline earth metal oxide having a NaCl type crystal structure as a main component, wherein the dielectric film has a (111)-oriented columnar structure in a direction perpendicular to the surface of the dielectric film, and in a Cu—Kα X-ray diffraction chart of the dielectric film, a half width of the diffraction peak of (111) is in a range of from 0.3° to 2.0°. 2 . The dielectric film according to claim 1 , wherein the dielectric film contains at least one element selected from the group consisting of Ta, Nb, V, Hf, Zr, Ti and Zn as a subcomponent. 3 . The dielectric film according to claim 2 , wherein when the total content of the subcomponents is set as x, the x is in the range of 0 mol %<x≦20 mol % relative to the main component. 4 . An electronic component comprising the dielectric film according to claim 1 . 5 . An electronic component comprising the dielectric film according to claim 2 . 6 . An electronic component comprising the dielectric film according to claim 3 .
the material containing two or more metal elements · CPC title
characterised by the metal · CPC title
using physical ablation of a target, e.g. physical vapour deposition or pulsed laser deposition · CPC title
Zinc oxides, zincates, cadmium oxides, cadmiates, mercury oxides, mercurates or oxide forming salts thereof · CPC title
obtaining ceramic films, e.g. by using temporary supports · CPC title
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