X-ray analyzer

Patent metadata

Field	Value
Publication number	US-2017269012-A1
Application number	US-201715460556-A
Country	US
Kind code	A1
Filing date	Mar 16, 2017
Priority date	Mar 17, 2016
Publication date	Sep 21, 2017
Grant date	—

Abstract

An X-ray analyzer includes an X-ray excitation device, an X-ray detection device, and a gate valve. The X-ray excitation device includes a sample chamber in which a sample as an analysis target can be disposed. The X-ray detection device includes a TES which can detect a characteristic X-ray emitted from the sample, and a room-temperature shield which surrounds the TES. The gate valve is disposed between the X-ray excitation device and the X-ray detection device. The inside of the room-temperature shield is provided to enable communication with the inside of the sample chamber. The gate valve includes a partition plate provided to enable blocking of a communication between the inside of the sample chamber and the inside of the room-temperature shield. The partition plate has a pressure-resistant X-ray window.

First claim

What is claimed is:

1 . An X-ray analyzer comprising:
an X-ray excitation device comprising a sample chamber in which a sample as an analysis target is allowed to be disposed; an X-ray detection device comprising:
an X-ray detector configured to detect a characteristic X-ray emitted from the sample; and
a room-temperature shield surrounding the X-ray detector; and
a gate valve disposed between the X-ray excitation device and the X-ray detection device, wherein an inside of the room-temperature shield is communicatable with an inside of the sample chamber, wherein the gate valve comprises a partition plate configured to block communication between the inside of the sample chamber and the inside of the room-temperature shield, and wherein the partition plate has an X-ray transmission portion allowing the characteristic X-ray emitted from the sample to pass therethrough.

2 . The X-ray analyzer according to claim 1 , wherein the X-ray transmission portion is formed by a laminated medium of any of an organic film and a silicon nitride film, and an aluminum film.

3 . The X-ray analyzer according to claim 1 , wherein at least a portion of the room-temperature shield is formed by a bellows.

4 . The X-ray analyzer according to claim 1 , further comprising:
a capillary disposed in the sample chamber and configured to propagate a characteristic X-ray emitted from the sample, toward the X-ray detector.

5 . The X-ray analyzer according to claim 4 , further comprising:
a capillary adjustor provided in the X-ray excitation device and configured to adjust a position of the capillary, wherein the capillary adjustor comprises a cylindrical holder, and wherein the capillary is held by the holder through at least a pair of O-rings, which are disposed between the capillary and an inner circumferential surface of the holder while being separated from each other in an extension direction of the holder.

6 . The X-ray analyzer according to claim 4 , wherein the X-ray detection device is attachable and detachable to and from the gate valve.

7 . The X-ray analyzer according to claim 1 , wherein the X-ray detection device further comprises:
a cold head, the X-ray detector being disposed at a tip end of the cold head; and a heat shield disposed inside the room-temperature shield to surround the X-ray detector and the cold head.

8 . The X-ray analyzer according to claim 7 ,
wherein the heat shield comprises an X-ray window, the X-ray window disposed between the X-ray transmission portion and the X-ray detector for allowing the characteristic X-ray emitted from the sample and passed through the X-ray transmission portion to reach the X-ray detector.

9 . The X-ray analyzer according to claim 7 , wherein the X-ray detection device further comprises:
a snout attached to a body of the X-ray detection device, the snout comprising the cold head, the room-temperature shield and the heat shield.

Assignees

• Hitachi High-Tech Science Corp

Inventors

• Tanaka Keiichi
• Nagata Atsushi
• Nakayama Satoshi
• Chinone Kazuo

Classifications

• G01N2223/317

  windows · CPC title

• G01N23/223

  by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence · CPC title

• G01N2223/076

  X-ray fluorescence · CPC title

• G01N23/2252 Primary

  Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA] · CPC title

• G01N2223/3103

  cooling, cryostats · CPC title