Fully balanced micro-machined inertial sensor
US-2016084654-A1 · Mar 24, 2016 · US
US2017254644A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2017254644-A1 |
| Application number | US-201715444721-A |
| Country | US |
| Kind code | A1 |
| Filing date | Feb 28, 2017 |
| Priority date | Mar 4, 2016 |
| Publication date | Sep 7, 2017 |
| Grant date | — |
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A drive circuit includes a first converter that includes a first operational amplifier and a first capacitance, accumulates first signals output from a first electrode of an angular velocity detection element and input to the first operational amplifier in the first capacitance, and then, converts the signals to a voltage, a first phase adjustment portion that adjusts a phase of the drive signal which drives the angular velocity detection element and limits a frequency band of the drive signal based on the output signals from the first converter, and a drive signal generation portion that generates the drive signal based on the output signals from the first phase adjustment portion.
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What is claimed is: 1 . A drive circuit comprising: a first converter that includes a first operational amplifier and a first capacitance, accumulates first signals output from a first electrode of an angular velocity detection element and input to the first operational amplifier in the first capacitance, and then, converts the signals to a voltage; a first phase adjustment portion that adjusts a phase of the drive signal which drives the angular velocity detection element and limits a frequency band of the drive signal based on the output signals from the first converter; and a drive signal generation portion that generates the drive signal based on the output signals from the first phase adjustment portion. 2 . The drive circuit according to claim 1 , wherein the first phase adjustment portion includes a first phase shift circuit for adjusting the phase of the drive signal and a first filter for limiting the frequency band of the drive signal. 3 . The drive circuit according to claim 2 , wherein the first phase shift circuit is an all pass filter. 4 . The drive circuit according to claim 2 , wherein the first filter is a low pass filter. 5 . The drive circuit according to claim 2 , wherein the first filter is provided at a stage subsequent to the first phase shift circuit. 6 . The drive circuit according to claim 1 , further comprising: a second converter that includes a second operational amplifier and a second capacitance, accumulates second signals output from a second electrode of the angular velocity detection element and input to the second operational amplifier in the second capacitance, and then, converts the signals to a voltage; and a second phase adjustment portion that adjusts a phase of the drive signal and limits a frequency band of the drive signal based on the output signals from the second converter, wherein the drive signal generation portion generates the drive signal based on the output signals from the first phase adjustment portion and the output signals from the second phase adjustment portion. 7 . The drive circuit according to claim 6 , wherein the drive signal generation portion includes; a comparator that compares a voltage of the output signal from the first phase adjustment portion and the voltage of the output signal from the second phase adjustment portion, and a level conversion circuit that converts a voltage level of the output signals from the comparator and generates the drive signal. 8 . An angular velocity detection device comprising: the drive circuit according to claim 1 ; an angular velocity detection circuit that receives a detection signal output from the angular velocity detection element and generates an angular velocity signal; and the angular velocity detection element. 9 . An electronic apparatus comprising the angular velocity detection device according to claim 8 . 10 . A moving object comprising the angular velocity detection device according to claim 8 .
each sensing mass being connected to a driving mass, e.g. driving frames · CPC title
Signal processing · CPC title
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