Window in thin polishing pad

Patent metadata

Field	Value
Publication number	US-2017246722-A1
Application number	US-201615054849-A
Country	US
Kind code	A1
Filing date	Feb 26, 2016
Priority date	Feb 26, 2016
Publication date	Aug 31, 2017
Grant date	—

Abstract

A polishing pad includes a polishing layer stack that has a polishing surface, a bottom surface, and an aperture from the polishing surface to the bottom surface. The polishing layer stack includes a polishing layer that has the polishing surface. A fluid-impermeable layer spans the aperture and the polishing pad. A first adhesive layer of a first adhesive material is in contact with and secures the bottom surface of the polishing layer to the fluid-impermeable layer. The first adhesive layer spans the aperture and the polishing pad. The light-transmitting body is positioned in the aperture and has a lower surface in contact with, is secured to the first adhesive layer, and is spaced apart from a side-wall of the aperture by a gap. An adhesive sealant of a different second material is disposed in and laterally fills the gap.

First claim

1 . A polishing pad, comprising:
a polishing layer stack having a polishing surface, a bottom surface, and an aperture from the polishing surface to the bottom surface, the polishing layer stack including a polishing layer having the polishing surface; a fluid-impermeable layer spanning the aperture and spanning the polishing pad; a first adhesive layer of a first adhesive material in contact with and securing the bottom surface of the polishing layer stack to the fluid-impermeable layer, the first adhesive layer spanning the aperture and the polishing pad; a light-transmitting body positioned in the aperture, the light-transmitting body having a lower surface in contact with and secured to the first adhesive layer and spaced apart from a side-wall of the aperture by a gap; and an adhesive sealant of a different second material disposed in and laterally filling the gap.

2 . The polishing pad of claim 1 , wherein the light-transmitting body is softer than the polishing layer.

3 . The polishing pad of claim 2 , wherein the adhesive sealant has about the same hardness as the light-transmitting body.

4 . The polishing pad of claim 2 , wherein the polishing layer has a hardness of about 58-65 Shore D and the light-transmitting body has a hardness of about 45-60 Shore D.

5 . The polishing pad of claim 1 , wherein a top surface of the light-transmitting body is recessed relative to the polishing surface.

6 . The polishing pad of claim 1 , wherein the gap completely laterally surrounds the light-transmitting body.

7 . The polishing pad of claim 1 , wherein the adhesive sealant extends to contact the first adhesive layer without extending below the light-transmitting body.

8 . The polishing pad of claim 7 , wherein the adhesive sealant completely vertically fills the gap.

9 . The polishing pad of claim 1 , comprising a second adhesive layer positioned on a side of the fluid-impermeable layer opposite the first adhesive layer and in contact with the fluid-impermeable layer.

10 . The polishing pad of claim 9 , comprising an aperture through the second adhesive layer aligned with the light-transmitting body.

11 . The polishing pad of claim 9 , further comprising a removable liner covering the second adhesive layer.

12 . The polishing pad of claim 1 , wherein the first adhesive material comprises a pressure sensitive adhesive and the second adhesive material comprises a cured epoxy or polyurethane.

13 . The polishing pad of claim 1 , wherein the polishing layer stack comprises the polishing layer and a backing layer, and wherein the polishing layer is a napped polyurethane and the backing layer is a different material than the polishing layer.

14 . The polishing pad of claim 13 , wherein each of the backing layer and the fluid-impermeable are a polyester.

15 . The polishing pad of claim 1 , wherein the polishing pad has a total thickness less than about 3 mm.

16 . A method of making a polishing pad, comprising:
forming an aperture through a polishing layer stack from a polishing surface to a bottom surface of the polishing layer to expose a first adhesive layer that is positioned on and contacts the bottom surface of the polishing layer stack and spans the aperture and the polishing pad, the polishing layer stack including a polishing layer having the polishing surface, wherein the first adhesive layer secures the bottom surface of the polishing layer stack to a fluid-impermeable layer that layer spans the aperture and the polishing pad; positioning a pre-formed light-transmitting body in the aperture in the polishing layer stack such that a lower surface of the light-transmitting body contacts and adheres to the first adhesive layer; dispensing an adhesive sealant into a gap that separates the light-transmitting body from side-walls of the aperture to laterally fill the gap; and curing the adhesive sealant.

17 . The method of claim 16 , wherein dispensing the adhesive sealant completely vertically fills the gap.

18 . The method of claim 16 , comprising removing a portion of a second adhesive layer that is positioned on a side of the fluid-impermeable layer opposite the first adhesive layer and in contact with the fluid-impermeable layer, wherein the portion is aligned with the light-transmitting body.

19 . The method of claim 16 , wherein forming the aperture comprises peeling a portion of the polishing layer stack away from the first adhesive layer while leaving a majority of the first adhesive layer in the aperture on the fluid-impermeable layer.

20 . The method of claim 16 , wherein forming the aperture comprises peeling a disposable cover away from the first adhesive layer while leaving a majority of the first adhesive layer in the aperture on the fluid-impermeable layer, wherein the disposable cover is a different material than the polishing layer.

Assignees

• Applied Materials Inc

Inventors

• Hu Yongqi
• Narendrnath Kadthala Ramaya
• Terry Thomas Lawrence

Classifications

• B24B37/205 Primary

  provided with a window for inspecting the surface of the work being lapped · CPC title

• B24B37/24

  characterised by the composition or properties of the pad materials · CPC title

• B24B37/22

  characterised by a multi-layered structure · CPC title