Charged particle beam drawing apparatus and charged particle beam drawing method

Patent metadata

Field	Value
Publication number	US-2017243718-A1
Application number	US-201715427200-A
Country	US
Kind code	A1
Filing date	Feb 8, 2017
Priority date	Feb 23, 2016
Publication date	Aug 24, 2017
Grant date	—

Abstract

In one embodiment, A charged particle beam drawing apparatus includes an irradiation amount resetting processing circuitry changing the irradiation amount in the shot data to the irradiation amount lower limit value when the irradiation amount defined in the shot data is less than the irradiation amount lower limit value, a shot size adjustment processing circuitry changing the shot size defined in the shot data, based on an amount of the change in the irradiation amount, a shot position adjustment processing circuitry changing the shot position defined in the shot data, based on an amount of the change in the shot size, and a drawing device drawing a pattern by irradiating the substrate with the charged particle beam, using the shot data in which the irradiation amount, the shot size, and the shot position have been changed.

First claim

What is claimed is:

1 . A charged particle beam drawing apparatus comprising:
an area density calculation processing circuitry calculating a pattern area density of a pattern to be drawn on a substrate based on drawing data; a shot data generation processing circuitry generating shot data which is formed of shot of a charged particle beam as a component unit using the drawing data, and in which a shot size, a shot position and an irradiation amount are defined; an irradiation amount determination processing circuitry determining whether or not the irradiation amount defined in the shot data is greater than or equal to an irradiation amount lower limit value corresponding to the pattern area density; an irradiation amount resetting processing circuitry changing the irradiation amount in the shot data to the irradiation amount lower limit value when the irradiation amount defined in the shot data is less than the irradiation amount lower limit value; a shot size adjustment processing circuitry changing the shot size defined in the shot data, based on an amount of the change in the irradiation amount made by the irradiation amount resetting processing circuitry; a shot position adjustment processing circuitry changing the shot position defined in the shot data, based on an amount of the change in the shot size made by the shot size adjustment processing circuitry; and a drawing device drawing a pattern by irradiating the substrate with the charged particle beam, using the shot data in which the irradiation amount, the shot size, and the shot position have been changed.

2 . The apparatus according to claim 1 , further comprising:
a first memory storing information specifying a relationship between an irradiation amount of the charged particle beam and a size of a pattern to be drawn, wherein the shot size adjustment processing circuitry determines an amount of variation in a pattern size due to the change in the irradiation amount based on the information, and sets an amount of change in the shot size to the amount of variation.

3 . The apparatus according to claim 1 ,
wherein the shot position adjustment processing circuitry changes the shot position to a side diagonally from a fixed point of the shot by half the amount of the change in the shot size.

4 . The apparatus according to claim 1 , further comprising:
a second memory storing correlation data between an irradiation amount of the charged particle beam and LER (Line Edge Roughness) of the pattern to be drawn, for each of a plurality of pattern area densities; and an irradiation amount lower limit value calculation processing circuitry calculating an irradiation amount lower limit value for each of the pattern area densities based on a threshold value of the LER required for the pattern to be formed on the substrate and the correlation data, generating a function by fitting the calculated value, and substituting the pattern area density calculated by the area density calculation processing circuitry into the function to calculate an irradiation amount lower limit value.

5 . A charged particle beam drawing method comprising:
calculating a pattern area density of a pattern to be drawn on a substrate based on drawing data; generating shot data which is formed of shot of a charged particle beam as a component unit using the drawing data, and in which a shot size, a shot position and an irradiation amount are defined; determining whether or not the irradiation amount defined in the shot data is greater than or equal to an irradiation amount lower limit value corresponding to the pattern area density; when the irradiation amount defined in the shot data is less than the irradiation amount lower limit value, changing the irradiation amount in the shot data to the irradiation amount lower limit value; changing the shot size defined in the shot data, based on an amount of the change in the irradiation amount; changing the shot position defined in the shot data, based on an amount of the change in the shot size; and making drawing by irradiating the substrate with the charged particle beam, using the shot data in which the irradiation amount, the shot size, and the shot position have been changed.

6 . The method according to claim 5 ,
wherein an amount of variation in a pattern size due to the change in the irradiation amount is determined based on information that is stored in a first memory and that specifies a relationship between an irradiation amount of the charged particle beam and a size of a pattern to be drawn, and an amount of change in the shot size is set to the amount of variation.

7 . The method according to claim 5 ,
wherein the shot position is changed to a side diagonally from a fixed point of the shot by half the amount of the change in the shot size.

8 . The method according to claim 5 ,
wherein based on a threshold value of LER (Line Edge Roughness) required for a pattern to be formed on the substrate, and correlation data which is stored in a second memory and which is between an irradiation amount of the charged particle beam and the LER of the pattern to be drawn, for each of a plurality of pattern area densities, an irradiation amount lower limit value is calculated for each of the pattern area densities, a function is generated by fitting the calculated value, and the calculated pattern area density is substituted into the function and an irradiation amount lower limit value is calculated.

Assignees

• Nuflare Technology Inc

Inventors

• Motosugi Tomoo

Classifications

• H01J37/3023 Primary

  Program control · CPC title

• H01J37/3026

  Patterning strategy · CPC title

• H01J2237/30411

  using digital signal processors [DSP] · CPC title

• H01J2237/31769

  Proximity effect correction · CPC title

• H01J37/3174 Primary

  Particle-beam lithography, e.g. electron beam lithography · CPC title