Mask-less fabrication of thin film batteries

Patent metadata

Field	Value
Publication number	US-2017214062-A1
Application number	US-201715456007-A
Country	US
Kind code	A1
Filing date	Mar 10, 2017
Priority date	Jun 17, 2011
Publication date	Jul 27, 2017
Grant date	—

Abstract

Thin film batteries (TFB) are fabricated by a process which eliminates and/or minimizes the use of shadow masks. A selective laser ablation process, where the laser patterning process removes a layer or stack of layers while leaving layer(s) below intact, is used to meet certain or all of the patterning requirements. For die patterning from the substrate side, where the laser beam passes through the substrate before reaching the deposited layers, a die patterning assistance layer, such as an amorphous silicon layer or a microcrystalline silicon layer, may be used to achieve thermal stress mismatch induced laser ablation, which greatly reduces the laser energy required to remove material.

First claim

What is claimed is:

1 . A thin film battery, comprising:
a stack of patterned layers on a substrate, the stack comprising a cathode current collector layer, a cathode layer, an electrolyte layer, an anode layer, and an anode current collector layer, wherein the stack is laser die patterned, and wherein the stack is laser patterned to reveal a cathode current collector area and a portion of the electrolyte layer adjacent to the cathode current collector area, and wherein a part of the thickness of the portion of the electrolyte layer is laser removed to form a step in the electrolyte layer; and an encapsulation layer over the stack of patterned layers.

2 . The thin film battery of claim 1 , wherein the substrate comprises glass.

3 . The thin film battery of claim 1 , wherein the cathode layer comprises LiCoO 2 .

4 . The thin film battery of claim 1 , wherein the electrolyte layer comprises LiPON.

5 . The thin film battery of claim 1 , wherein the anode layer comprises lithium metal.

6 . The thin film battery of claim 1 , wherein the encapsulation layer comprises a polymer.

7 . The thin film battery of claim 1 , further comprising a die patterning assistance layer on the substrate between the substrate and the stack, the stack of patterned layers being deposited on the die patterning assistance layer, wherein the substrate is transparent to laser light and wherein the die patterning assistance layer includes a layer of material for achieving thermal stress mismatch between the die patterning assistance layer and the substrate.

8 . The thin film battery of claim 7 , wherein the die patterning assistance layer comprises a material selected from the group consisting of amorphous silicon, microcrystalline silicon and LiCoO 2 .

9 . The thin film battery of claim 1 , further comprising a bonding pad layer covering the encapsulation layer and the cathode current collector area.

10 . The thin film battery of claim 9 , wherein the bonding pad layer comprises aluminum.

11 . The thin film battery of claim 9 , further comprising a dielectric layer covering the stack, the dielectric layer being deposited over the bonding pad layer.

12 . The thin film battery of claim 11 , wherein the dielectric layer comprises silicon nitride.

13 . The thin film battery of claim 11 , further comprising a bonding pad covering the stack, the bonding pad being deposited over the dielectric layer, the dielectric layer electrically isolating the bonding pad layer and the bonding pad, the bonding pad being electrically connected to the anode current collector layer through an aperture in the encapsulation layer and the dielectric layer.

14 . The thin film battery of claim 13 , wherein the bonding pad comprises aluminum.

Assignees

• Applied Materials Inc

Inventors

• Song Daoying
• Jiang Chong
• Kwak Byung-Sung Leo

Classifications

• H01M50/536

  characterised by the method of fixing the leads to the electrodes, e.g. by welding · CPC title

• H01M10/36 Primary

  Accumulators not provided for in groups H01M10/05-H01M10/34 · CPC title

• H01M2220/30

  Batteries in portable systems, e.g. mobile phone, laptop · CPC title

• H01M2300/0068

  inorganic · CPC title

• Y02E60/10

  Energy storage using batteries · CPC title