Ceramic fibers for shielding in vacuum chamber systems and methods for using same
US-2024304424-A1 · Sep 12, 2024 · US
US2017197872A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2017197872-A1 |
| Application number | US-201415324046-A |
| Country | US |
| Kind code | A1 |
| Filing date | Oct 15, 2014 |
| Priority date | Aug 8, 2014 |
| Publication date | Jul 13, 2017 |
| Grant date | — |
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Inorganic fibers including the following composition, SiO 2 , MgO and CaO being main components: SiO 2 : 73.6 wt % to 85.9 wt %, MgO: 9.0 wt % to 21.3 wt %, CaO: 5.1 wt % to 12.4 wt %, Al 2 O 3 : 0 wt % or more and less than 2.3 wt %, and Fe 2 O 3 : 0 wt % to 0.50 wt %.
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1 . Inorganic fibers comprising the following composition, SiO 2 , MgO and CaO being main components: SiO 2 : 73.6 wt % to 85.9 wt % MgO: 9.0 wt % to 15.0 wt % CaO: 5.1 wt % to 12.4 wt % Al 2 O 3 : 0 wt % or more and less than 2.3 wt % Fe 2 O 3 : 0 wt % to 0.50 wt % SrO: less than 0.1 wt %. 2 . The inorganic fibers according to claim 1 , which comprise the following composition: SiO 2 : 74.0 wt % to 80.0 wt % MgO: 9.0 wt % to 15.0 wt % CaO: 5.1 wt % to 12.4 wt % Al 2 O 3 : 0 wt % or more and less than 2.3 wt % Fe 2 O 3 : 0 wt % to 0.50 wt % SrO: less than 0.1 wt %. 3 . The inorganic fibers according to claim 1 , which comprise MgO in an amount of 9.0 wt % to 14.0 wt %. 4 . The inorganic fibers according to claim 1 , which comprise Al 2 O 3 in an amount of 0.17 wt % to 2.2 wt %. 5 . The inorganic fibers according to claim 1 , which comprise ZrO 2 in an amount of more than 0.1 wt % and 10.9 wt % or less. 6 . The inorganic fibers according to claim 1 , which comprise TiO 2 in an amount of more than 0.1 wt % and 10.9 wt % or less. 7 . The inorganic fibers according to claim 1 , which comprise alkali metal oxide in an amount of more than 0.01 mol % and less than 0.20 mol %. 8 . The inorganic fibers according to claim 1 , which comprise B 2 O 3 in an amount of less than 0.1 wt %. 9 . The inorganic fibers according to claim 1 , wherein the total of the amounts of SiO 2 , MgO and CaO is 90.0 wt % or more. 10 . The inorganic fibers according to claim 1 , wherein the total of the amounts of SiO 2 , MgO and CaO is 93.0 wt % or more. 11 . The inorganic fibers according to claim 1 , wherein the total of the amounts of SiO 2 , MgO and CaO is 96.0 wt % or more. 12 . A secondary product or composite material produced by using the inorganic fibers according to claim 1 .
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