Method and apparatus for slice and view sample imaging
US-9218940-B1 · Dec 22, 2015 · US
Slide part and surface processing method of the same
US2017194127A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2017194127-A1 |
| Application number | US-201715464858-A |
| Country | US |
| Kind code | A1 |
| Filing date | Mar 21, 2017 |
| Priority date | Feb 1, 2010 |
| Publication date | Jul 6, 2017 |
| Grant date | — |
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Abstract
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A slide part has a surface structure in which there are at least two periodic structures among a first periodic structure with a period of 10 nm to 100 nm inclusive and a depth of 5 nm to 50 nm inclusive, a second periodic structure with a period of 100 nm to 1000 nm inclusive and a depth of 20 nm to 500 nm inclusive, and a third periodic structure with a period of 1000 nm to 10000 nm inclusive and a depth of 100 nm to 3000 nm inclusive, in which one of the at least two periodic structures is formed on the other periodic structure.
First claim
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What is claimed is: 1 . A method of processing a surface of a slide part using a gas cluster ion beam, comprising: radiating the gas cluster ion beam to the surface of the slide part from a direction parallel to a slide direction of the slide part in order to form, on the surface of the slide part, a surface structure in which one of at least two periodic structures is formed on another of the at least two periodic structures, the at least two periodic structures being among a first periodic structure with a period of 10 nm to 100 nm inclusive and a depth of 5 nm to 50 nm inclusive, a second periodic structure with a period of 100 nm to 1000 nm inclusive and a depth of 20 nm to 500 nm inclusive, and a third periodic structure with a period of 1000 nm to 10000 nm inclusive and a depth of 100 nm to 3000 nm inclusive. 2 . A method of processing a surface of a slide part using a gas cluster ion beam, comprising: radiating a gas cluster ion beam to the surface of the slide part from a direction parallel to a slide direction of the slide part; and radiating another gas cluster ion beam to the surface of the slide part from a direction opposite of the former direction in order to form, on the surface of the slide part, a surface structure in which one of at least two periodic structures is formed on another of the at least two periodic structures, the at least two periodic structures being among a first periodic structure with a period of 10 nm to 100 nm inclusive and a depth of 5 nm to 50 nm inclusive, a second periodic structure with a period of 100 nm to 1000 nm inclusive and a depth of 20 nm to 500 nm inclusive, and a third periodic structure with a period of 1000 nm to 10000 nm inclusive and a depth of 100 nm to 3000 nm inclusive. 3 . A method of processing a surface of a slide part using a gas cluster ion beam, comprising: radiating the gas cluster ion beam to the surface of the slide part with an angle within a range of 30 degrees to 75 degrees inclusive, which is formed by the gas cluster ion beam to be radiated and a line normal to the surface of the slide part, in order to form, on the surface of the slide part, a surface structure in which one of at least two periodic structures is formed on another of the at least two periodic structures, the at least two periodic structures being among a first periodic structure with a period of 10 nm to 100 nm inclusive and a depth of 5 nm to 50 nm inclusive, a second periodic structure with a period of 100 nm to 1000 nm inclusive and a depth of 20 nm to 500 nm inclusive, and a third periodic structure with a period of 1000 nm to 10000 nm inclusive and a depth of 100 nm to 3000 nm inclusive. 4 . A method of processing a surface of a slide part using a gas cluster ion beam, comprising: radiating the gas cluster ion beam to the surface of the slide part with an angle within a range of 30 degrees to 75 degrees inclusive, which is formed by the gas cluster ion beam to be radiated and a line normal to the surface of the slide part; and radiating another gas cluster ion beam to the surface of the slide part from a direction opposite of an irradiation direction of the former gas cluster ion beam, in order to form, on the surface of the slide part, a surface structure in which one of at least two periodic structures is formed on another of the at least two periodic structures, the at least two periodic structures being among a first periodic structure with a period of 10 nm to 100 nm inclusive and a depth of 5 nm to 50 nm inclusive, a second periodic structure with a period of 100 nm to 1000 nm inclusive and a depth of 20 nm to 500 nm inclusive, and a third periodic structure with a period of 1000 nm to 10000 nm inclusive and a depth of 100 nm to 3000 nm inclusive.
Assignees
Inventors
Classifications
including variation in thickness · CPC title
having variation in thickness · CPC title
Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.] · CPC title
Wrinkled, creased, crinkled or creped · CPC title
Lubricating {, e.g. lubricating tool and workpiece simultaneously (lubricating workpieces for deep-drawing B21D22/201)} · CPC title
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Frequently asked questions
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- What does patent US2017194127A1 cover?
- A slide part has a surface structure in which there are at least two periodic structures among a first periodic structure with a period of 10 nm to 100 nm inclusive and a depth of 5 nm to 50 nm inclusive, a second periodic structure with a period of 100 nm to 1000 nm inclusive and a depth of 20 nm to 500 nm inclusive, and a third periodic structure with a period of 1000 nm to 10000 nm inclusive…
- Who is the assignee on this patent?
- Japan Aviation Electronics Ind Ltd
- What technology area does this patent fall under?
- Primary CPC classification H01J37/3056. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Thu Jul 06 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).