Method of manufacturing nano gap sensor using residual stress and nano gap sensor manufactured thereby
US-2016341688-A1 · Nov 24, 2016 · US
US2017191970A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2017191970-A1 |
| Application number | US-201615277067-A |
| Country | US |
| Kind code | A1 |
| Filing date | Sep 27, 2016 |
| Priority date | Dec 30, 2015 |
| Publication date | Jul 6, 2017 |
| Grant date | — |
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Disclosed are a hydrogen detection sensor and a method of manufacturing the same. The hydrogen detection sensor is manufactured by using hydrothermal synthesis method to synthesize a molybdenum oxide (MoO 3 ) nanostructure, and irradiating UV light thereon to form an MoO 3 —Pd nanocomposite comprising the molybdenum oxide nanostructure with palladium (Pd) catalyst particles, and coating the MoO 3 —Pd nanocomposite on a substrate. As such, a visible color change from the MoO 3 before and after exposure to hydrogen may be so obvious that the sensing or sensitivity of hydrogen and the long-term stability may be substantially improved. In addition, the manufacturing process is simple, and the manufacturing costs may be reduced.
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What is claimed is: 1 . A hydrogen detection sensor, comprising: a substrate; and a coating layer formed on a surface of the substrate and discolored when exposed to hydrogen, wherein the coating layer comprises a molybdenum oxide (MoO 3 )—Pd nanocomposite in which palladium (Pd) catalyst particles are adsorbed on an molybdenum oxide (MoO 3 ) nanostructure. 2 . The hydrogen detection sensor of claim 1 , wherein the substrate is selected from the group consisting of a paper filter, a glass substrate, a polymer film, ink, pigment, and paint. 3 . The hydrogen detection sensor of claim 1 , wherein the molybdenum oxide (MoO 3 ) nanostructure has a length of about 1 to 100 μm and a diameter of about 20 to 100 nm. 4 . The hydrogen detection sensor of claim 1 , wherein the palladium (Pd) catalyst particles have an average particle diameter of about 3 to 15 nm. 5 . The hydrogen detection sensor of claim 1 , wherein the coating layer has a coating thickness of about 0.1 to 200 μm. 6 . A method of manufacturing a hydrogen detection sensor, comprising: providing a substrate; forming a molybdenum oxide nanostructure; preparing a palladium catalyst solution by mixing a polymer with a palladium precursor solution; forming an MoO 3 —Pd nanocomposite by mixing the molybdenum oxide nanostructure with the palladium catalyst solution and irradiating UV light to the mixture; and forming a coating layer by coating the MoO 3 —Pd nanocomposite on the substrate. 7 . The method of claim 6 , wherein the molybdenum oxide nanostructure is formed by steps comprising: preparing an aqueous molybdenum oxide solution by mixing an acid solution with an aqueous molybdenum ammonium solution; forming the molybdenum oxide nanostructure by hydrothermally synthesizing the aqueous molybdenum oxide solution; and heat-treating the molybdenum oxide nanostructure. 8 . The method of claim 7 , wherein the molybdenum oxide nanostructure is formed at a temperature of about 140 to 180° C. for about 2 to 6 hours. 9 . The method of claim 7 , wherein the molybdenum oxide nanostructure is heat-treated at a temperature of about 400 to 600° C. for about 1 to 3 hours. 10 . The method of claim 6 , wherein the polymer is polyvinylpyrrolidone, polyvinyl alcohol, or a mixture thereof. 11 . A vehicle comprising a hydrogen detection sensor of claim 1 .
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