Substrate carrier that carries a substrate on each of two broad sides of the substrate carrier that face away from each other

Patent metadata

Field	Value
Publication number	US-2017175254-A1
Application number	US-201515128070-A
Country	US
Kind code	A1
Filing date	Mar 18, 2015
Priority date	Mar 24, 2014
Publication date	Jun 22, 2017
Grant date	—

Abstract

A substrate carrier is configured to be arranged in a CVD or PVD reactor, in particular for the deposition of carbon nanotubes or graphene. The substrate carrier has a first broadside surface and a second broadside surface facing away from the first broad-side surface. The first broadside surface and the second broadside surface of the substrate carrier each have a substrate accommodation zone. Fastening elements are provided within each of the substrate accommodation zones to secure a substrate or sections of a substrate to one or more of the broadside surfaces. A CVD reactor is further configured to receive the substrate carrier.

First claim

1 . A substrate carrier having a first broadside face ( 2 ) and a second broadside face ( 3 ) facing away from the first broadside face ( 2 ), wherein the first broadside face ( 2 ) includes a first substrate-receiving zone ( 4 ) in which a first plurality of fixing elements ( 14 , 14 ′, 15 ) are configured to fasten a first substrate ( 6 ) or a first portion of the first substrate ( 6 ) onto the first broadside face ( 2 ), and the second broadside face ( 3 ) includes a second substrate-receiving zone ( 5 ) in which a second plurality of fixing elements ( 14 , 14 ′, 15 ) are configured to fasten a second substrate ( 6 ) or a second portion of the first substrate ( 6 ) onto the second broadside face ( 3 ), characterized in that the substrate carrier ( 1 ) is a solid flat body, and the first and second substrate-receiving zones ( 4 , 5 ) are bounded by two first peripheries ( 4 ′) that face away from one another, and two second peripheries ( 11 ) that extend transverse to the first peripheries ( 4 ′), wherein adjoined to each of the first peripheries ( 4 ′) is a handling portion ( 7 ) which comprises (i) two protrusions ( 12 ) that each protrude beyond a corresponding one of the second peripheries ( 11 ), or (ii) window-type openings ( 8 , 9 , 10 ).

2 . The substrate carrier of claim 1 , the substrate carrier ( 1 ) is composed of quartz.

3 . The substrate carrier of claim 1 , wherein the first and second substrate-receiving zones ( 4 , 5 ) have a substantially rectangular footprint.

4 . The substrate carrier of claim 1 , wherein the solid flat body has a maximum thickness of 10 mm, and an edge length of at least 100 mm.

5 . The substrate carrier of claim 1 , wherein the handling portion ( 7 ) has window-type openings ( 8 , 9 , 10 ).

6 . The substrate carrier of claim 1 , wherein the first broadside face ( 2 ) is configured to receive the first portion of the first substrate ( 6 ), the second broadside face ( 3 ) is configured to receive the second portion of the first substrate ( 6 ), and a rounded peripheral edge of the substrate carrier ( 1 ) is configured to receive a third portion of the first substrate ( 6 ), the third portion being flexible.

7 . The substrate carrier of claim 1 , wherein at least one of the second periphery peripheries ( 11 ) is situated in a recessed manner with respect to a peripheral edge of a corresponding one of the protrusions ( 12 ), and the at least one of the second peripheries ( 11 ) is further situated in a parallel manner with respect to the peripheral edge of the corresponding one of the protrusions ( 12 ).

8 . The substrate carrier of claim 1 , wherein the protrusions ( 12 ) of the substrate carrier ( 1 ) are configured to be displaceable along guide elements ( 21 , 22 , 33 ) of a reactor housing ( 20 ).

9 . The substrate carrier of claim 8 , wherein the substrate carrier ( 1 ) contacts the reactor housing ( 20 ) only along regions where the protrusions ( 12 ) engage in grooves ( 21 ′, 22 ′, 33 ′) formed by the guide elements ( 21 , 22 , 33 ) of the reactor housing ( 20 ).

10 . The substrate carrier of claim 8 , wherein the substrate carrier ( 1 ), while oriented in a vertical manner, is insertable into an intermediate space between two gas-inlet elements ( 24 ) of the reactor housing ( 20 ) through a loading opening ( 23 ) of the reactor housing ( 20 ) which extends in a vertical direction.

Assignees

• Aixtron Se

Inventors

• Jouvray Alexandre
• Rippington David Eric
• Teo Kenneth B K
• Rupesinghe Nalin L

Classifications

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/17 Primary

  specially adapted for supporting large square shaped substrates · CPC title

• Y10S977/742

  Carbon nanotubes, CNTs · CPC title

• Y10S977/843

  Gas phase catalytic growth, i.e. chemical vapor deposition · CPC title

• C23C16/4582

  Rigid and flat substrates, e.g. plates or discs (C23C16/4581 takes precedence) · CPC title