Desmear treatment device and desmear treatment method

Patent metadata

Field	Value
Publication number	US-2017154791-A1
Application number	US-201515316806-A
Country	US
Kind code	A1
Filing date	May 22, 2015
Priority date	Jun 13, 2014
Publication date	Jun 1, 2017
Grant date	—

Abstract

The present invention has as its object the provision of a desmear treatment device and a desmear treatment method capable of reliably performing a desmear treatment with high treatment efficiency. In the desmear treatment method of the present invention, when irradiating a to-be-treated object disposed in a treatment space with vacuum ultraviolet rays via an ultraviolet transmitting window member to remove smear in the to-be-treated object, a treatment gas containing active species to be activated by the irradiation of the vacuum ultraviolet rays and having contained moisture is supplied into the treatment space. The desmear treatment device includes treatment gas supply means having a humidifying mechanism for causing a treatment gas containing active species to be activated by vacuum ultraviolet rays from an ultraviolet light source to contain moisture.

First claim

1 . A desmear treatment device for removing smear in a wiring board material including an insulating layer and a conductive layer layered on each other and being provided with a via hole or a through-hole, the desmear treatment device comprising:
an ultraviolet light source including a xenon excimer lamp for emitting vacuum ultraviolet rays with a center wavelength of 172 nm; a light irradiation chamber in which the ultraviolet light source is housed; a treatment chamber having a treatment space where a to-be-treated object is disposed; an ultraviolet transmitting window member for separating an inner space of the light irradiation chamber from the treatment space of the treatment chamber; and treatment gas supply means for supplying a treatment gas into the treatment space, wherein the treatment gas supply means includes a humidifying mechanism for causing a treatment gas, having an oxygen concentration of not lower than 50% by volume and containing active species to be activated by the vacuum ultraviolet rays from the ultraviolet light source, to contain moisture and supplies, into the treatment space, the treatment gas humidified by the humidifying mechanism to have an absolute humidity by volume within a range of 10 to 70 g/m 3 .

2 . A desmear treatment method for removing smear in a wiring board material disposed in a treatment space of a treatment chamber, the wiring board material including an insulating layer and a conductive layer layered on each other and being provided with a via hole or a through-hole, the method comprising irradiating the wiring board material with vacuum ultraviolet rays from an ultraviolet light source housed in a light irradiation chamber having an internal space separated from the treatment space of the treatment chamber by an ultraviolet transmitting window member via the window member to remove the smear in the wiring board material, wherein
a xenon excimer lamp that emits vacuum ultraviolet rays with a center wavelength of 172 nm is used as the ultraviolet light source, and a treatment gas obtained by causing a treatment gas, having an oxygen concentration of not lower than 50% by volume and containing active species to be activated by the irradiation of the vacuum ultraviolet rays, to contain moisture so as to have an absolute humidity by volume within a range of 10 to 70 g/m 3 is supplied into the treatment space.

Assignees

• Ushio Electric Inc

Inventors

• Horibe Hiroki
• Habu Tomoyuki

Classifications

• H10P50/242

  of Group IV materials · CPC title

• H10W70/095

  of vias therein · CPC title

• H10W70/097 Primary

  Cleaning · CPC title

• H01L21/4864 Primary

  Electricity · mapped topic

• B08B5/00

  Cleaning by methods involving the use of air flow or gas flow (cleaning hollow articles by methods or apparatus specially adapted thereto B08B9/00) · CPC title