Microfluidic chips and methods of producing microfluidic chips
US-2024351025-A1 · Oct 24, 2024 · US
US2017151562A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2017151562-A1 |
| Application number | US-201715408072-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jan 17, 2017 |
| Priority date | Jun 4, 2013 |
| Publication date | Jun 1, 2017 |
| Grant date | — |
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Disclosed herein are a microchip provided with a titanium oxide film between a glass substrate and a metal thin film; and a method for forming the metal thin film and the titanium oxide film on the glass substrate of the microchip. The microchip has a second microchip substrate that has the metal thin film inside a channel, and the titanium oxide film, which has a low extinction coefficient, is provided as a buffer layer between the substrate and the metal thin film such as a gold film.
Opening claim text (preview).
What is claimed is: 1 . A microchip comprising: a substrate made of glass on which metal thin film is formed; a channel formed in a space including the metal thin film; and a titanium oxide film provided between the substrate and the metal thin film, the titanium oxide film having a rutile type structure and an anatase type structure being mixed; the titanium oxide film contacting the substrate on one face of the titanium oxide film, and contacting the metal thin film with the other face of the titanium oxide film, a crystalline structure of the titanium oxide film being defined by a location of oxygen existing on a surface of the substrate. 2 . The microchip according to claim 1 , wherein the metal thin film is composed of any of gold (Au), platinum (Pt), rhodium (Rh), palladium (Pd), or palladium-platinum alloy (Pd—Pt alloy).
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