Method for producing chlorosilane gas using continuous tubular reactor

Patent metadata

Field	Value
Publication number	US-2017113938-A1
Application number	US-201515310725-A
Country	US
Kind code	A1
Filing date	May 13, 2015
Priority date	May 13, 2014
Publication date	Apr 27, 2017
Grant date	—

Abstract

The present invention relates to an apparatus for producing trichlorosilane from tetrachlorosilane in an efficient manner. The apparatus includes an inlet through which reaction raw materials including a metal silicon powder dispersed in liquid tetrachlorosilane enter, a hole through which a gaseous reaction raw material is fed, an outlet through which reaction products including trichlorosilane exit, a tubular reactor in which the reaction raw materials entering through the inlet react with each other during flow, and means for impeding the flow of the fluids to cause collision of the fluids during flow.

First claim

1 . An apparatus for producing trichlorosilane, comprising an inlet through which reaction raw materials comprising a metal silicon powder dispersed in liquid tetrachlorosilane enter, a hole through which a gaseous reaction raw material is fed, an outlet through which reaction products comprising trichlorosilane exit, a tubular reactor in which the reaction raw materials entering through the inlet react with each other during flow, and means for impeding the flow of the fluids to cause collision of the fluids during flow.

2 . The apparatus according to claim 1 , wherein the fluid-flow impeding means are structures protruding from the inner wall of the tubular reactor to a reaction space.

3 . The apparatus according to claim 1 , wherein the fluid-flow impeding means are formed by bending a flow path of the tubular reactor.

4 . The apparatus according to claim 1 , wherein the gaseous reaction raw material is hydrogen chloride, hydrogen or a mixture thereof.

5 . The apparatus according to claim 1 , wherein the reaction is carried out in a liquid phase.

6 . The apparatus according to claim 1 , wherein the reaction is carried out at 300 to 1000° C.

7 . The apparatus according to claim 1 , wherein the metal silicon powder has an average particle diameter of 10 microns or less.

8 . The apparatus according to claim 1 , wherein the metal silicon and the tetrachlorosilane are in a weight ratio of 1:20-200.

9 . The apparatus according to claim 1 , wherein the tetrachlorosilane is a by-product in the deposition of polysilicon by the reaction of trichlorosilane with hydrogen.

10 . The apparatus according to claim 1 , wherein the metal silicon powder is used up in the reaction and does not remain after the reaction.

11 . A method for continuously producing trichlorosilane using the apparatus according to claim 1 .

Assignees

• Lg Chemical Ltd

Inventors

• Kim Yoo Seok
• Kim Jeong Kyu
• Yoo Jinhyoung
• Lee Jungwoo
• Jang Eunsu

Classifications

• C01B33/107

  Halogenated silanes · CPC title

• B01J8/008

  Details of the reactor or of the particulate material; Processes to increase or to retard the rate of reaction (B01J8/0285, B01J8/067, B01J8/087, B01J8/1836 take precedence) · CPC title

• C01B33/08 Primary

  Compounds containing halogen · CPC title

• B01J19/0093

  Microreactors, e.g. miniaturised or microfabricated reactors (laboratory containers with capillary fluid transport in microfabricated channels or chambers B01L3/5027) · CPC title

• B01J2219/00873

  Heat exchange · CPC title