Electromechanical effect in metal oxides

Patent metadata

Field	Value
Publication number	US-2017069825-A1
Application number	US-201615265870-A
Country	US
Kind code	A1
Filing date	Sep 15, 2016
Priority date	Oct 5, 2010
Publication date	Mar 9, 2017
Grant date	—

Abstract

This invention provides an electromechanical device comprising an active material comprising a metal oxide such as Ce 0.8 Gd 0.2 O 1.9 wherein the elastic modulus of metal oxide can be modulated by applying external electric field. The Ce 0.8 Gd 0.2 O 1.9 layer in a substrate\electrode\Ce 0.8 Gd 0.2 O 1.9 \electrode structure or conductive substrate\Ce 0.8 Gd 0.2 O 1.9 \electrode structure develops a stress upon applying an electric field. This invention provides methods for tailoring the elastic modulus of materials using an electric field for the generation of an electromechanical response.

First claim

What is claimed is:

1 . A process for making an electromechanical device, said process comprising:
forming a first conductive layer, forming a layer of a ceria-based material in contact with said first conductive layer; and forming a second conductive layer in contact with said ceria-based material layer; wherein upon application of an electric field said ceria-based material generates displacement, stress or a combination thereof.

2 . The process of claim 1 , wherein said first conductive layer is formed on a substrate by electron beam deposition.

3 . The process of claim 1 , wherein said layer of said ceria-based material is formed by radio frequency magnetron sputtering.

4 . The process of claim 1 wherein said first and said second conductive layers are connected to a power supply.

5 . The process of claim 1 , wherein said ceria-based material is doped by a metal ion.

6 . The process of claim 5 , wherein said metal ion is a lanthanide.

7 . The process of claim 6 , wherein said metal ion is Gd.

8 . The process of claim 1 , wherein said ceria-based material is Ce x Gd y O z wherein x ranges between 0.95-0.63, said y ranges between 0.05-0.37 and said z ranges between 2−(y/2).

9 . The process of claim 2 , wherein said Ce x Gd y O z is Ce 0.8 Gd 0.2 O 1.9 .

10 . The process of claim 1 , wherein said ceria-based material is strain-free.

11 . The process of claim 1 , wherein the in-plane strain of said ceria-based material ranges between 0.1%-0.4%.

12 . The process of claim 1 , wherein said ceria-based material is poled.

13 . The process of claim 1 , wherein said displacement is at least 100 pm/V.

14 . The process of claim 1 , wherein said stress developed in said ceria-based material is at least 100 MPa.

15 . The process of claim 1 , wherein said device further comprises conductive contacts.

16 . The process of claim 15 , wherein said conductive contacts comprising Cr, Al, Ag, Ti, or combination thereof.

Assignees

• Yeda Res & Dev

Inventors

• Lubomirsky Igor
• Korobko Roman
• Kossoy Anna
• Tuller Harry L

Classifications

• Y10T29/42

  Piezoelectric device making · CPC title

• H01L41/094

  Electricity · mapped topic

• H01L41/27 Primary

  Electricity · mapped topic

• H01L41/18

  Electricity · mapped topic

• H01L41/314

  Electricity · mapped topic