One Time Programmable Memory with a Twin Gate Structure

Patent metadata

Field	Value
Publication number	US-2017005103-A1
Application number	US-201514871792-A
Country	US
Kind code	A1
Filing date	Sep 30, 2015
Priority date	Jun 30, 2015
Publication date	Jan 5, 2017
Grant date	—

Abstract

A one-time programmable memory (OTP) is provided that includes a combined word line programming line (WL-PL). The OTP includes a programmable transistor having a first threshold voltage and a first breakdown voltage, and a pass transistor having a second threshold voltage and a second breakdown voltage. The combined WL-PL is electrically connected to respective gate electrodes of both the programmable transistor and the pass transistor so that both receive the same control voltage. The second gate electrode has a work function that is greater than that of the first gate electrode, so that the second gate breakdown voltage is greater than the first gate breakdown voltage, which enables the use of the combined WL-PL.

First claim

1 . A one-time programmable (OTP) memory, comprising:
a programmable transistor having a first threshold voltage and a first breakdown voltage, the programmable transistor comprising a first source region, a first drain region, and a first gate electrode; a pass transistor having a second threshold voltage and a second breakdown voltage, the pass transistor comprising a second source region, a second drain region, and a second gate electrode; and a combined word line programming line (WL-PL) electrically connected to the first gate electrode and the second gate electrode, wherein the first source region is electrically connected to the second drain region and the second source region is electrically connected to a bit line, and wherein a first work function of the first gate electrode is less than a second work function of the second gate electrode.

2 . The OTP memory of claim 1 , wherein the first source region of the programmable transistor and the second drain region of the pass transistor are abutting to form a single shared source-drain region.

3 . The OTP memory of claim 2 , wherein the single shared source-drain region is sized according to a minimum design rule (MDR).

4 . The OTP memory of claim 1 , wherein the second breakdown voltage is greater than the first breakdown voltage and the second threshold voltage is greater than the first threshold voltage.

5 . The OTP memory of claim 1 , wherein a distance between the first gate electrode of the programmable transistor and the second gate electrode of the pass transistor is determined by an MDR.

6 . The OTP memory of claim 1 , wherein the programmable transistor further comprises a first gate dielectric layer and the pass transistor comprises a second gate dielectric layer, and wherein the first and second gate dielectric layers have substantially the same thickness and substantially the same dielectric constant.

7 . The OTP memory of claim 6 , wherein the first and second gate dielectric layers each comprise a dielectric material selected from the group consisting of silicon dioxide and hafnium oxide.

8 . The OTP memory of claim 1 , wherein the pass transistor and the programmable transistor are both N-type Metal Oxide Semiconductor (NMOS) transistors.

9 . The OTP memory of claim 1 , wherein the combined WL-PL is electrically connected to the first gate electrode through a first contact and to the second gate electrode through a second contact.

10 . The OTP memory of claim 9 , wherein the combined WL-PL is configured to provide a same control voltage to the first gate electrode of the programmable transistor and the second gate electrode of the pass transistor.

11 . The OTP memory of claim 1 , wherein the first gate electrode comprises a metal selected from the group consisting of titanium aluminum, element aluminum, and an aluminum alloy and the second gate electrode comprises a titanium nitride based metal.

12 . A one-time programmable (OTP) memory, comprising:
a programmable transistor having a first threshold voltage and a first breakdown voltage, the programmable transistor comprising a first source region, a first drain region, and a first gate electrode; a pass transistor having a second threshold voltage and a second breakdown voltage, the pass transistor comprising a second source region, a second drain region, and a second gate electrode; and a combined word line programming line (WL-PL) electrically connected to the first gate electrode and the second gate electrode, wherein the first source region is electrically connected to the second drain region and the second source region is electrically connected to a bit line, wherein a first work function of the first gate electrode is less than a second work function of the second gate electrode, and wherein the second breakdown voltage is greater than the first breakdown voltage.

13 . The OTP memory of claim 12 , wherein the programmable transistor is programmed by applying a first control voltage to the combined WL-PL relative to the bit line, wherein the first control voltage is: greater than the first breakdown voltage, less than the second breakdown voltage, and greater than the second threshold voltage.

14 . The OTP memory of claim 13 , wherein the bit line is grounded to program the programmable transistor.

15 . The OTP memory of claim 13 , wherein a resistive path is formed between the first gate electrode and the first source region when the first control voltage is applied to the combined WL-PL.

16 . The OTP memory of claim 13 , wherein the programmable transistor is read by applying a second control voltage to the combined WL-PL relative to the bit line, wherein the second control voltage is greater than the second threshold voltage and less than the second breakdown voltage.

17 . The OTP memory of claim 16 , wherein the bit line is sensed for charge to determine a state of the programmable transistor.

18 . The OTP memory of claim 1 , wherein:
the first work function is between 4.05 eV and 4.61 eV; and the second work function is between 4.61 eV and 5.17 eV.

19 . A method of programming a one-time programmable memory (OTP), the OTP including a programmable transistor and a pass transistor, comprising:
grounding a bit line of the OTP that is electrically connected to a source region of the pass transistor; and applying a same control voltage to both a first gate electrode of the programmable transistor and a second gate electrode of the pass transistor using a combined word line programming line (WL-PL), wherein the same control voltage is: greater than a first breakdown voltage of the programmable transistor, less than a second breakdown voltage of the pass transistor, and greater than a threshold voltage of the pass transistor.

20 . A method of reading a one-time programmable memory (OTP), the OTP including a programmable transistor and a pass transistor, comprising:
discharging a bit line of the OTP that is electrically connected to a source region of the pass transistor; applying a same control voltage to both a first gate electrode of the programmable transistor and a second gate electrode of the pass transistor using a combined word line programming line (WL-PL), wherein the same control voltage is greater than a threshold voltage of the pass transistor and less than a breakdown voltage of the pass transistor; and sensing a voltage of the bit line for accumulated charge to determine whether the OTP is in a programmed state.

21 . The OTP memory of claim 1 , further comprising a gate dielectric coupled to the gate electrode, wherein the gate dielectric is at least partially disintegrated when the OTP memory is in a programmed state so that current can flow from the gate electrode to the first source region in the programmed state.

22 . The OTP memory of claim 12 , further comprising a gate dielectric coupled to the gate electrode, wherein the gate dielectric is at least partially disintegrated when the OTP memory is in a programmed state so that current can flow from the gate electrode to the first source region in the programmed state.

Assignees

• Broadcom Corp

Inventors

• Zhang Qintao
• Xue Mei
• Yang Wenwei
• Ito Akira

Classifications

• G11C17/16 Primary

  using electrically-fusible links · CPC title

• H01L27/11233 Primary

  Electricity · mapped topic

• G11C17/18

  Auxiliary circuits, e.g. for writing into memory · CPC title

• H10B20/25

  One-time programmable ROM [OTPROM] devices, e.g. using electrically-fusible links · CPC title

• H10B20/36 Primary

  Gate programmed, e.g. different gate material or no gate · CPC title