Semiconductor die, semiconductor package and substrate dicing method
US-2024421000-A1 · Dec 19, 2024 · US
US2016379937A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016379937-A1 |
| Application number | US-201615138441-A |
| Country | US |
| Kind code | A1 |
| Filing date | Apr 26, 2016 |
| Priority date | Jun 23, 2015 |
| Publication date | Dec 29, 2016 |
| Grant date | — |
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A substrate strip is provided. The substrate strip includes a core layer including first and second substrate regions spaced apart from each other and a dummy region between the first and second substrate regions, a first interconnection layer disposed on top surfaces of the first and second substrate regions, a second interconnection layer disposed on bottom surfaces of the first and second substrate regions, and a warpage control member provided on any one of a top surface and a bottom surface of the dummy region. The warpage control member includes a metal.
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What is claimed is: 1 . A substrate strip comprising: a core layer including first and second substrate regions spaced apart from each other and a dummy region between the first and second substrate regions; a first interconnection layer disposed on first surfaces of the first and second substrate regions; a second interconnection layer disposed on second surfaces opposite to the first surfaces of the first and second substrate regions; and a warpage control member provided on any one of a first surface and a second surface of the dummy region, wherein the warpage control member includes a metal. 2 . The substrate strip of claim 1 , wherein the warpage control member includes copper. 3 . The substrate strip of claim 1 , wherein the warpage control member is in contact with the core layer. 4 . The substrate strip of claim 1 , wherein the warpage control member is electrically insulated from the first and second interconnection layers. 5 . The substrate strip of claim 1 , wherein the warpage control member includes a same material as the first interconnection layer or the second interconnection layer. 6 . The substrate strip of claim 1 , wherein the warpage control member is provided on the second surface of the dummy region, and the warpage control member is disposed at a same level as the second interconnection laver, relative to the core layer, 7 . The substrate strip of claim 1 , wherein the core layer has a long axis extending in a first direction, the first and second substrate regions are spaced apart from each other in the first direction, and the dummy region extends in a second direction intersecting the first direction. 8 . The substrate strip of claim 7 , wherein the warpage control member has a rectangular shape extending in the second direction when viewed in plan view. 9 . The substrate strip of claim 7 , wherein the warpage control member includes segments spaced apart from each other and repeatedly arranged in the second direction when viewed in plan view. 10 . The substrate strip of claim 1 , further comprising: a third interconnection layer disposed between the core layer and the second interconnection layer; and a fourth interconnection layer disposed between the core layer and the first interconnection layer. 11 . The substrate strip of claim 10 , wherein the warpage control member is disposed at a same level as one of the first to fourth interconnection layers, relative to the core layer. 12 . The substrate strip of claim 10 , wherein the warpage control member includes a first warpage control member and a second warpage control member, the first warpage control member is disposed at a same level as the second interconnection layer, relative to the core layer, and the second warpage control member is disposed at a same level as the third interconnection layer, relative to the core layer. 13 . A substrate strip comprising: a core layer including first and second substrate regions spaced apart from each other and a dummy region between the first and second substrate regions; a first interconnection layer disposed on top surfaces of the first and second substrate regions; a second interconnection layer disposed on bottom surfaces of the first and second substrate regions; a warpage control member disposed on a bottom surface of the dummy region; a first solder resist layer covering the first interconnection layer and a top surface of the dummy region, the first solder resist layer being in contact with the top surface of the dummy region; and a second solder resist layer covering the second interconnection layer and the warpage control member. 14 . The substrate strip of claim 13 , wherein the warpage control member has a coefficient of thermal expansion (CTE) greater than that of the core layer. 15 . The substrate strip of claim 14 , wherein the warpage control member includes a metal. 16 . The substrate strip of claim 13 , wherein the warpage control member is disposed directly on the bottom surface of the dummy region. 17 . The substrate strip of claim 13 , wherein the warpage control member includes a same material as the second interconnection layer. 18 . The substrate strip of claim 13 , wherein the warpage control member is disposed at a same level as the second interconnection layer, relative to the core layer. 19 . The substrate strip of claim 13 , wherein the first interconnection layer includes a chip bonding pad, and the second interconnection layer includes an external connection pad. 20 . A substrate strip comprising: a core layer including a first surface and a second surface that is opposite to the first surface; a first interconnection layer on the first surface of the core layer and including a first pad; a second interconnection layer on the second surface of the core layer and including a second pad; and a warpage control member on one of the first surface and the second surface of the core layer and separated from the first interconnection layer and the second interconnection layer; wherein the warpage control member is positioned at a same level as the one of the first interconnection layer and the second interconnection layer, relative to the core layer, and is free of the first and second pads.
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