X-ray detector, x-ray imaging device using same, and driving method therefor

Patent metadata

Field	Value
Publication number	US-2016377744-A1
Application number	US-201415101522-A
Country	US
Kind code	A1
Filing date	Dec 4, 2014
Priority date	Dec 4, 2013
Publication date	Dec 29, 2016
Grant date	—

Abstract

The objective of the present invention is to effectively improve an image lag phenomenon of a direct conversion detector. The present invention provides an X-ray detector comprising: a lower electrode, formed on a substrate, to which a first driving voltage V 1 is applied; an auxiliary electrode, around the lower electrode, to which a third driving voltage V 3 is applied; a photoconductive layer formed on the lower electrode and the auxiliary electrode; and an upper electrode, formed on the photoconductive layer, to which a second driving voltage V 2 is applied, wherein the third driving voltage V 3, right after the radiation of the X-rays is off, is a reverse bias voltage.

First claim

1 . An X-ray detector, comprising:
a lower electrode formed over a substrate and applied with a first driving voltage V 1 ; an auxiliary electrode formed in a periphery of the lower electrode and applied with a third driving voltage V 3 ; a photoconductive layer formed over the lower electrode and the auxiliary electrode; and an upper electrode formed over the photoconductive layer and applied with a second driving voltage V 2 , wherein the third driving voltage V 3 right after the radiation of the X-rays is off is a reverse bias voltage.

2 . The X-ray detector of claim 1 ,
wherein the first to the third driving voltages are indicative of a relation of V 2 <V 3 <V 1 in the X-ray radiation-on time interval, and wherein the first to the third driving voltages are indicative of a relation of V 2 <V 1 <V 3 in at least part of the X-ray radiation-off time interval.

3 . The X-ray detector of claim 1 , wherein the third driving voltage V 3 of the reverse bias has a pulse form synchronized in a pulse form simultaneously with the X-ray radiation-off.

4 . The X-ray detector of claim 1 , further comprising a passivation film having a pad hole which is interposed between the lower electrode and the auxiliary electrode and exposes the lower electrode, wherein the auxiliary electrode is placed in a periphery of the pad hole.

5 . The X-ray detector of claim 1 , wherein the photoconductive layer is made of at least one of CdTe, CdZnTe, PbO, PbI 2 , HgI 2 , GaAs, Se, TlBr, and BiI 3 .

6 . An X-ray imaging device, comprising:
an X-ray detector comprising a lower electrode formed over a substrate, an auxiliary electrode formed in a periphery of the lower electrode, a photoconductive layer formed over the lower electrode and the auxiliary electrode, and an upper electrode formed over the photoconductive layer; an X-ray radiation device radiating X-rays to the X-ray detector; and a power supply unit applying first, second, and third driving voltages V 1 , V 2 , and V 3 to the lower electrode, the upper electrode, and the auxiliary electrode, respectively, wherein the third driving voltage V 3 right after the radiation of the X-rays is off is a reverse bias voltage.

7 . The X-ray imaging device of claim 6 ,
wherein the first to the third driving voltages V 1 , V 2 , and V 3 are indicative of a relation of V 2 <V 3 <V 1 in the X-ray radiation-on time interval, and wherein the first to the third driving voltages are indicative of a relation of V 2 <V 1 <V 3 in at least part of the X-ray radiation-off time interval.

8 . The X-ray imaging device of claim 6 , wherein the third driving voltage V 3 of the reverse bias is synchronized in a pulse form simultaneously with the X-ray radiation-off.

9 . (canceled)

10 . (canceled)

11 . (canceled)

12 . An X-ray detector, comprising:
a first electrode; a photoconductive layer receiving X-rays and generating charges; a second electrode facing at least part of the first electrode, interposing the photoconductive layer between the second electrode and the first electrode, and applied with a voltage to collect the charges by the first electrode; and a third electrode contacting with at least part of the photoconductive layer, wherein an electrical potential of the third electrode is determined between an electrical potential of the first electrode and an electrical potential of the second electrode during an X-ray radiation is on, and wherein the electrical potential of the third electrode is applied to become an electrical potential between the second electrode and the third electrode is higher than an electrical potential between the first electrode and the third electrode right after the X-ray radiation is off.

13 . The X-ray detector of claim 12 ,
wherein the first electrode, the second electrode, and the third electrode are formed in different layers, and wherein the third electrode is placed between the first electrode and the second electrode.

14 . The X-ray detector of claim 12 , wherein during the X-ray radiation is on or right after the X-ray radiation is off, voltages applied to the first electrode and the second electrode have no change.

Assignees

• Rayence Co Ltd
• Vatech Ewoo Holdings Co Ltd
• Industry-Academic Cooperation Foundation Yonsei Univ
• Rayence Co Ltd
• Vatech Ewoo Holdings Co Ltd

Inventors

• Lee Dong Jin
• Kim Tae Woo
• Im Seong Il
• Jeon Pyo Jin

Classifications

• H01L31/02966

  Electricity · mapped topic

• G01T1/241 Primary

  Electrode arrangements, e.g. continuous or parallel strips or the like · CPC title

• H01L27/14676

  Electricity · mapped topic

• G01N23/04

  and forming images of the material · CPC title

• H01L31/085

  Electricity · mapped topic