Complementary gallium nitride integrated circuits and methods of their fabrication

US2016372575A1 · US · A1

Patent metadata
FieldValue
Publication numberUS-2016372575-A1
Application numberUS-201615251114-A
CountryUS
Kind codeA1
Filing dateAug 30, 2016
Priority dateAug 12, 2013
Publication dateDec 22, 2016
Grant date

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Abstract

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An embodiment of a complementary GaN integrated circuit includes a GaN layer with a first bandgap. A second layer with a second bandgap is formed on the GaN layer, resulting in a 2DEG in a contact region between the GaN layer and the second layer. The second layer has a relatively thin portion and a relatively thick portion. A third layer is formed over the relatively thick portion of the second layer. The third layer has a third bandgap that is different from the second bandgap, resulting in a 2DHG in a contact region between the second layer and the third layer. A transistor of a first conductivity type includes the 2DHG, the relatively thick portion of the second layer, and the third layer, and a transistor of a second conductivity type includes the 2DEG and the relatively thin portion of the second layer.

First claim

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What is claimed is: 1 . A method of fabricating an integrated circuit, the method comprising the steps of: providing a first gallium nitride (GaN) layer, wherein the GaN layer has a first bandgap, a first region, and a second region adjacent to the first region; forming a first sub-layer of a second layer over a top surface of the GaN layer, wherein the first sub-layer has a second bandgap that is different from the first bandgap, resulting in a two dimensional electron gas (2…

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What does patent US2016372575A1 cover?
An embodiment of a complementary GaN integrated circuit includes a GaN layer with a first bandgap. A second layer with a second bandgap is formed on the GaN layer, resulting in a 2DEG in a contact region between the GaN layer and the second layer. The second layer has a relatively thin portion and a relatively thick portion. A third layer is formed over the relatively thick portion of the secon…
Who is the assignee on this patent?
Freescale Semiconductor Inc
What technology area does this patent fall under?
Primary CPC classification H10D84/05. Mapped technology areas include Electricity.
When was this patent published?
Publication date Thu Dec 22 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).