Low temperature wafer bonding
US-2016351436-A1 · Dec 1, 2016 · US
US2016372141A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016372141-A1 |
| Application number | US-201615255105-A |
| Country | US |
| Kind code | A1 |
| Filing date | Sep 1, 2016 |
| Priority date | Mar 18, 2014 |
| Publication date | Dec 22, 2016 |
| Grant date | — |
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A magnetic head, including a head slider. The head slider includes a contact surface corresponding to a disk body, and the contact surface is a flat surface. The contact surface is coated with at least one smooth atomic-scale coating formed by a two-dimensional atomic crystal material. The head slider atomically contacts with the disk body.
Opening claim text (preview).
The invention claimed is: 1 . A magnetic head, comprising a head slider; wherein the head slider comprises a contact surface corresponding to a disk body, and the contact surface is a flat surface; the contact surface is coated with at least one smooth atomic-scale coating formed by two-dimensional atomic crystal material; and the head slider atomically contacts with the disk body. 2 . The magnetic head of claim 1 , wherein the head slider comprises a side surface which is coated by the coating. 3 . The magnetic head of claim 2 , wherein the two-dimensional atomic crystal material is graphene, boron nitride, boron carbon nitride (BCN), fluorinated graphene, graphene oxide, MoS 2 , WS 2 , MoSe 2 , WSe 2 , MoTe 2 , WTe 2 , ZrS 2 , ZrSe 2 , NbSe 2 , NbS 2 , TaS 2 , TiS 2 , NiSe 2 , GaSe, GaTe, InSe, Bi 2 Se 3 , mica, bismuth strontium calcium copper oxide (BSCCO), MoO 3 , WO 3 , TiO 2 , MnO 2 , V 2 O 5 , TaO 3 , RuO 2 , LaNb 2 O 7 , (Ca, Sr) 2 Nb 3 O 10 , Bi 4 Ti 3 O 12 , Ca 2 Ta 2 TiO 10 , Ni(OH) 2 , Eu(OH) 2 , or layered copper oxide. 4 . The magnetic head of claim 3 , wherein the two-dimensional atomic crystal material is graphene. 5 . The magnetic head of claim 3 , wherein a length and width of the head slider is between 0.1 and 1000 μm. 6 . The magnetic head of claim 5 , wherein the length and width of the head slider is between 10 and 1000 μm. 7 . A hard disk device, comprising: the magnetic head of claim 1 and the disk body; wherein the disk body comprises a magnetic media layer and at least one protection layer disposed on the magnetic media layer; the protection layer comprises an atomic-scale smooth surface formed by two-dimensional atomic crystal material or diamond-like carbon nanofilm. 8 . The hard disk device of claim 7 , wherein the protection layer comprises the atomic-scale smooth surface formed by diamond-like carbon nanofilm. 9 . The hard disk device of claim 7 , wherein the two-dimensional atomic crystal material of the protection layer is graphene, boron nitride, boron carbon nitride (BCN), fluorinated graphene, graphene oxide, MoS 2 , WS 2 , MoSe 2 , WSe 2 , MoTe 2 , WTe 2 , ZrS 2 , ZrSe 2 , NbSe 2 , NbS 2 , TaS 2 , TiS 2 , NiSe 2 , GaSe, GaTe, InSe, Bi 2 Se 3 , mica, bismuth strontium calcium copper oxide (BSCCO), MoO 3 , WO 3 , TiO 2 , MnO 2 , V 2 O 5 , TaO 3 , RuO 2 , LaNb 2 O 7 , (Ca, Sr) 2 Nb 3 O 10 , Bi 4 Ti 3 O 12 , Ca 2 Ta 2 TiO 10 , Ni(OH) 2 , Eu(OH) 2 , or layered copper oxide. 10 . The hard disk device of claim 7 , wherein when the magnetic head is reading data, the magnetic head atomically contacts with the disk body under an effect of van der Waals force; when a balance of an atomic contact is achieved, the van der Waals force is at a minimum interaction potential. 11 . The hard disk device of claim 9 , wherein the coating of the magnetic head and the protection layer of the disk body use different materials. 12 . The hard disk device of claim 9 , wherein the coating of the magnetic head and the protection layer of the disk body use the same material. 13 . The hard disk device of claim 12 , wherein the head slider is provided with an actuator to change lattice constants of crystal cells of two-dimensional crystals. 14 . The hard disk device of claim 13 , wherein the actuator is a heat emitting device, a piezoelectric device, or a vibration device. 15 . The hard disk device of claim 14 , wherein the actuator is piezoelectric ceramic enabling the head slider to constantly vibrate transversely. 16 . The hard disk device of claim 14 , wherein the hard disk device further comprises a control device; the control device comprises a detection device; the control device actuates the actuator prior to running a read-write device; and during the running of the read-write device, the actuator is actuated when two-dimensional materials of the coating and the protection layer are detected to be commensurately arranged. 17 . A method for transferring a two-dimensional atomic crystal layer on the head slider, comprising: a. growing a two-dimensional atomic crystal layer on a first matrix; b. coating a second matrix on the two-dimensional atomic crystal layer, and forming a bonding layer between the second matrix and the two-dimensional atomic crystal layer; c. removing the first matrix, and polishing a surface of the head slider which is bonded with the two-dimensional atomic crystal layer to be an atomic-scale smooth surface; and d. bonding the two-dimensional atomic crystal layer to the head slider; and removing the second matrix and the bonding layer to yield the head slider with a two-dimensional atomic crystal coating. 18 . The method of claim 17 , wherein c) comprises removing the first matrix and changing lattice constants of crystal cells of the two-dimensional atomic crystal layer; then the two-dimensional atomic crystal layer having changed lattice constants of crystal cells is bonded to the head slider. 19 . The method of claim 17 , further comprising changing lattice constants of crystal cells of the two-dimensional atomic crystal layer after d). 20 . The method of claim 19 , wherein the lattice constants of crystal cells of the two-dimensional atomic crystal layer are changed through a deformation of the head slider. 21 . The method of claim 20 , wherein the head slider is provided with piezoelectric ceramic to vibrate the head slider constantly and transversely. 22 . A method for preparing a head slider, comprising: a. allowing two-dimensional crystal material to epitaxially grow on a smooth atomic-scale metal matrix, wherein the metal matrix and the two-dimensional crystal material have different lattice constants; b. integrating the two-dimensional crystal material on the metal matrix and the metal matrix to prepare the head slider; and c. positioning the head slider on a magnetic head. 23 . The method of claim 22 , wherein prior to a), the metal matrix is prepared according to a length and width of the head slider. 24 . The method of claim 22 , wherein after a), the metal matrix on which the two-dimensional crystal material grows is cut to conform to a length and width of the head slider.
where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination (G11B5/3133 takes precedence) · CPC title
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