Optical device including two-dimensional material and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-2016359062-A1
Application number	US-201514932701-A
Country	US
Kind code	A1
Filing date	Nov 4, 2015
Priority date	Jun 2, 2015
Publication date	Dec 8, 2016
Grant date	—

Abstract

An optical device including a two-dimensional material and a method of manufacturing the same are provided. The optical device may include a barrier stack formed on a bottom channel layer, a top channel layer formed on the barrier stack, a drain electrode connected to the bottom channel layer, a source electrode formed on a substrate. The barrier stack may include two or more barrier layers, and one or more channel units at least partially interposing between the barrier layers. Channel units connected to the drain electrode and channel units connected to the source electrode may be formed, in an alternating sequence, between barrier layers included in the barrier stack. The barrier layers may each have a thickness which is less than a distance which may be traveled by electrons and holes generated by photo absorption prior to recombination. As a result, the optical device may provide improved photo separation efficiency.

First claim

1 . An optical device comprising:
a bottom channel layer on a substrate; a barrier stack on the bottom channel layer, the barrier stack including at least two barrier layers at least partially interposed by a channel unit; a top channel layer on the barrier stack; a drain electrode connected to the bottom channel layer and the top channel layer; and a source electrode connected to the channel unit.

2 . The optical device of claim 1 , wherein the barrier stack further includes one or more barrier layers at least partially interposed by separate channel layers connected to either the drain electrode or to the source electrode in an alternating interposing sequence.

3 . The optical device of claim 1 , wherein at least one barrier layer of the at least two barrier layers includes at least one of a two-dimensional (2D) material layer or a semiconductor layer.

4 . The optical device of claim 1 , wherein the bottom channel layer includes a metal layer.

5 . The optical device of claim 1 , wherein the bottom channel layer and the top channel layer are doped in a first doping type, and the channel unit is doped in a second doping type which is opposite to the first doping type.

6 . The optical device of claim 1 , wherein a thickness of each barrier layer of the first barrier layer and the second barrier layer is less than a particular distance traveled by electrons and holes prior to recombination, the electrons and holes generated by photo absorption.

7 . The optical device of claim 1 , wherein the bottom channel layer and the top channel layer and the channel unit comprise 2D material layers in a single layer.

8 . The optical device of claim 1 , wherein the bottom channel layer and the top channel layer extend, relative to the channel unit, at a right angle, an acute, or an obtuse angle.

9 . The optical device of claim 1 , wherein the source electrode extends in a linear shape and the optical device further comprises a plurality of drain electrodes corresponding to the source electrode.

10 . The optical device of claim 1 , wherein at least one barrier layer of the at least two barrier layers includes a semiconductor layer, and the semiconductor layer includes at least one of a IV group semiconductor, a III-V group compound semiconductor, an oxide semiconductor, a nitride semiconductor, or an oxynitride semiconductor.

11 . The optical device of claim 10 , wherein the semiconductor layer includes at least one of a 2D semiconductor layer, a quantum dot-contained layer or a quantum dot layer.

12 . The optical device of claim 10 , wherein the semiconductor layer includes a 2D semiconductor layer, the 2D semiconductor layer including a metal chalcogenide-based material layer.

13 . The optical device of claim 10 , wherein the semiconductor layer includes a quantum dot layer, the quantum dot layer includes a plurality of quantum dots, and each quantum dot includes a core unit and a shell unit surrounding the core unit.

14 . A method of manufacturing an optical device, the method comprising:
forming a first channel layer on a substrate; forming a first barrier layer on the first channel layer; forming a second channel layer on the substrate, the second channel layer comprising a channel unit extended on at least a portion of the first barrier layer; forming a second barrier layer on the first barrier layer, such that the channel unit at least partially interposes between the first barrier layer and the second barrier layer; forming a third channel layer on second barrier layer, such that the third channel layer covers an upper side surface of the second barrier layer and is connected to the first channel layer; forming a drain electrode on the first channel layer; and forming a source electrode on the second channel layer.

15 . The method of claim 14 , further comprising:
prior to forming the third channel layer, laminating at least one barrier layer on the second barrier layer; and laminating, in an alternating sequence between barrier layers comprising the second barrier layer and the at least one barrier layer, channel units connected to the source electrode and channel layers connected to the drain electrode.

16 . The method of claim 14 , wherein the first channel layer and the second channel layer are formed at a right angle to each other, at an acute angle to each other, or at an obtuse angle to each other.

17 . The method of claim 14 , wherein the source electrode is formed to extend in a linear shape, and the method further comprises forming a plurality of drain electrodes which correspond to the source electrode.

18 . The method of claim 14 , wherein the first channel layer includes a metal layer.

19 . The method of claim 14 , wherein the first channel layer, the second channel layer, and the third channel layer include separate two-dimensional (2D) material layers in a single layer.

20 . The method of claim 14 , wherein the first barrier layer and the second barrier layer each include at least one of a 2D material layer and a semiconductor layer, and the first barrier layer and the second barrier layer each include different photo absorption characteristics.

21 . The method of claim 14 , wherein the first channel layer, the second channel layer, and the third channel layer each include at least one doped layer.

22 . The method of claim 14 , wherein a thickness of each barrier layer, of the first barrier layer and the second barrier layer is less than a particular distance traveled by electrons and holes prior to recombination, the electrons and holes generated by photo absorption.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Heo Jinseong
• Lee Kiyoung
• Lee Jaeho
• Lee Sangyeob
• Lee Eunkyu
• Park Seongjun

Classifications

• H01L31/0352 Primary

  Electricity · mapped topic

• H01L31/035218

  Electricity · mapped topic

• H01L31/0264

  Electricity · mapped topic

• H01L31/18

  Electricity · mapped topic

• H10F77/1433

  Quantum dots · CPC title