Plasma etching device with plasma etch resistant coating

Patent metadata

Field	Value
Publication number	US-2016358749-A1
Application number	US-201615158397-A
Country	US
Kind code	A1
Filing date	May 18, 2016
Priority date	Jun 4, 2015
Publication date	Dec 8, 2016
Grant date	—

Abstract

An apparatus for processing a substrate is provided. A chamber wall forms a processing chamber cavity. A substrate support for supporting the substrate is within the processing chamber cavity. A gas inlet for providing gas into the processing chamber is above a surface of the substrate. A window for passing RF power into the processing chamber cavity comprises a ceramic or quartz window body and a coating of at least one of erbium oxide, erbium fluoride, samarium oxide, samarium fluoride, thulium oxide thulium fluoride, gadolinium oxide, or gadolinium fluoride on a surface of the ceramic window body. A coil is outside of the processing chamber cavity, wherein the window is between the processing chamber cavity and the coil.

First claim

What is claimed is:

1 . An apparatus for processing a substrate, comprising
a chamber wall forming processing chamber cavity; a substrate support for supporting the substrate within the processing chamber cavity; a window for passing RF power into the processing chamber cavity, comprising:
a ceramic or quartz window body; and
a coating on a surface of the window body facing the processing chamber cavity comprising at least one of erbium oxide, erbium fluoride, samarium oxide, samarium fluoride, thulium oxide thulium fluoride, gadolinium oxide, or gadolinium fluoride on at least one surface of the window body; and
a coil outside of the processing chamber cavity, wherein the window is between the processing chamber cavity and the coil.

2 . The apparatus, as recited in claim 1 , wherein the coating of at least one of erbium oxide, erbium fluoride, samarium oxide, samarium fluoride, thulium oxide thulium fluoride, gadolinium oxide, or gadolinium fluoride on a surface of the window body is formed by at least one of plasma-enhanced chemical vapor deposition, physical vapor deposition, chemical vapor deposition, atomic layer deposition, or aerosol deposition.

3 . The apparatus, as recited in claim 2 , wherein the coating of at least one of erbium oxide, erbium fluoride, samarium oxide, samarium fluoride, thulium oxide thulium fluoride, gadolinium oxide, or gadolinium fluoride on a surface of the window body is 1 to 50 microns thick.

4 . The apparatus, as recited in claim 3 , wherein the window body comprises at least one of quartz or aluminum oxide.

5 . The apparatus, as recited in claim 4 , wherein the coating is greater than 60% pure.

6 . The apparatus, as recited in claim 1 , further comprising:
a pinnacle ring extending from the chamber wall to the window, wherein the pinnacle is angled with respect to the chamber wall and the window and wherein the pinnacle, comprises:
a pinnacle body; and
a coating comprising at least one of erbium oxide, erbium fluoride, samarium oxide, samarium fluoride, thulium oxide thulium fluoride, gadolinium oxide, or gadolinium fluoride, covering at least one surface of the pinnacle body.

7 . The apparatus, as recited in claim 6 , further comprising a gas inlet for providing gas into the processing chamber through the window, wherein the gas inlet, comprises:
an inlet body; and a coating comprising at least one of erbium oxide, erbium fluoride, samarium oxide, samarium fluoride, thulium oxide thulium fluoride, gadolinium oxide, or gadolinium fluoride, covering at least one surface of the inlet body

8 . The apparatus, as recited in claim 1 , wherein the coating of at least one of erbium oxide, erbium fluoride, samarium oxide, samarium fluoride, thulium oxide thulium fluoride, gadolinium oxide, or gadolinium fluoride covering a surface of the window body is formed by at least one of plasma-enhanced chemical vapor deposition or physical vapor deposition.

9 . An apparatus for plasma processing a substrate, comprising a chamber wall forming processing chamber cavity;
a substrate support for supporting the substrate within the processing chamber cavity; a gas inlet for providing a gas into the processing chamber cavity; at least one plasma electrode for transforming a gas within the processing chamber cavity into a plasma; and a coating comprising at least one of erbium oxide, erbium fluoride, samarium oxide, samarium fluoride, thulium oxide thulium fluoride, gadolinium oxide, or gadolinium fluoride, is on a surface within the processing chamber cavity, wherein the coating is 1 to 50 microns thick.

10 . The apparatus, as recited in claim 9 , wherein the plasma processing chamber further comprises:
a power window, which separates the at least one plasma electrode from the processing chamber cavity; a pinnacle extending from the chamber wall to the power window, wherein the gas inlet extends through the power window, and wherein the coating coats a surface of at least one of the power window, pinnacle or gas inlet.

11 . The apparatus, as recited in claim 9 , wherein the coating of at least one of erbium oxide, erbium fluoride, samarium oxide, samarium fluoride, thulium oxide thulium fluoride, gadolinium oxide, or gadolinium fluoride covering a surface of the window body is formed by at least one of plasma-enhanced chemical vapor deposition, physical vapor deposition, chemical vapor deposition, atomic layer deposition, or aerosol deposition.

12 . The apparatus, as recited in claim 9 , further comprising a liner, wherein the coating coats the liner.

13 . The apparatus, as recited in claim 9 , wherein the coating of at least one of erbium oxide, erbium fluoride, samarium oxide, samarium fluoride, thulium oxide thulium fluoride, gadolinium oxide, or gadolinium fluoride covering a surface of the window body is formed by at least one of plasma-enhanced chemical vapor deposition or physical vapor deposition.

14 . The apparatus, as recited in claim 9 , further comprising an edge ring, wherein the coating coats the edge ring.

15 . An apparatus for use in a plasma etch chamber, comprising:
a body; and a coating comprising at least one of erbium oxide, erbium fluoride, samarium oxide, samarium fluoride, thulium oxide thulium fluoride, gadolinium oxide, or gadolinium fluoride covering a surface of the body, wherein the coating is 1 to 50 microns thick.

16 . The apparatus, as recited in claim 15 , wherein the body comprises at least one of Si, quartz, SiC, SiN, aluminum oxide, aluminum nitride, stainless steel, or aluminum carbide.

17 . The apparatus, as recited in claim 16 , wherein the coating is formed by at least one of physical vapor deposition, chemical vapor deposition, atomic layer deposition, or aerosol deposition.

18 . The apparatus, as recited in claim 16 , wherein the coating is greater than 99% pure.

Assignees

• Lam Res Corp

Inventors

• Sant Sanket

Classifications

• H10P72/04

  Apparatus for manufacture or treatment · CPC title

• H01J37/3244

  Gas supply means · CPC title

• H01J37/321

  the radio frequency energy being inductively coupled to the plasma · CPC title

• H01J37/3211 Primary

  Antennas, e.g. particular shapes of coils · CPC title

• H01J2237/334

  Etching · CPC title