Methods for texturing a chamber component and chamber components having a textured surface

Patent metadata

Field	Value
Publication number	US-2016349621-A1
Application number	US-201414889322-A
Country	US
Kind code	A1
Filing date	Dec 15, 2014
Priority date	Dec 15, 2014
Publication date	Dec 1, 2016
Grant date	—

Abstract

A method for a textured surface on a chamber component is provided and includes providing a chamber component, applying a layer of a photoresist to a surface of the chamber component, exposing a portion of the photoresist to optical energy using a mask to cure a portion of the photoresist, removing uncured photoresist from the surface, and electrochemically etching the chamber component to form a textured surface on the chamber component.

First claim

1 . A method for a textured surface on a chamber component, the method comprising:
providing a chamber component; applying a layer of a photoresist to a surface of the chamber component; exposing a portion of the photoresist to optical energy using a mask to cure a portion of the photoresist; removing uncured photoresist from the surface; and electrochemically etching the chamber component to form a textured surface on the chamber component.

2 . The method of claim 1 , wherein the chamber component comprises an anode during the etching.

3 . The method of claim 1 , wherein the chamber component comprises a shield assembly, a target plate, a support ring, a deposition ring, a support body, an alignment ring, or a substrate support.

4 . The method of claim 1 , wherein the chamber component comprises aluminum, stainless steel, or titanium.

5 . The method of claim 1 , wherein the textured surface comprises a plurality of circular structures.

6 . The method of claim 5 , wherein at least a portion of the circular structures intersect.

7 . The method of claim 5 , wherein the circular structures include a recess formed therein.

8 . The method of claim 1 , wherein the textured surface comprises a plurality of raised features surrounding and/or circumscribed by a plurality grooves.

9 . The method of claim 8 , wherein at least a portion of the grooves intersect.

10 . A chamber component for a processing chamber, the component comprising:
a textured surface comprising a plurality of textured features formed by an electrochemical etching process, each of the textured features comprising:
a plurality of raised features surrounding and/or circumscribed by a plurality grooves, and at least a portion of the grooves intersect.

11 . The component of claim 10 , wherein the textured surface is formed on a shield assembly, a target plate, a support ring, a deposition ring, a support body, an alignment ring, or a substrate support.

12 . The component of claim 10 , wherein the textured surface is formed on an aluminum material, a stainless steel material, or a titanium material.

13 . The component of claim 10 , wherein the textured surface comprises a plurality of circular structures.

14 . The component of claim 10 , wherein the grooves include a curved surface.

15 . The component of claim 14 , wherein the curved surface intersects with the raised feature at a sharp point.

16 . The component of claim 10 , wherein the grooves are formed at a depth of about 0.1 millimeters to about 2 millimeters.

17 . A chamber component for a processing chamber, the component comprising:
a metallic material formed as a chamber component; a textured surface comprising a plurality of textured features formed by an electrochemical etching process on the metallic material, each of the textured features comprising:
a plurality of raised features surrounding and/or circumscribed by a plurality grooves, each of the grooves including a curved surface intersecting with the raised feature at a sharp point.

18 . The component of claim 17 , wherein the chamber component comprises one of a shield assembly, a target plate, a support ring, a deposition ring, a support body, an alignment ring, or a substrate support.

19 . The component of claim 17 , wherein the metallic material comprises an aluminum material, a stainless steel material, or a titanium material.

20 . The component of claim 17 , wherein the textured surface comprises a plurality of circular structures.

Assignees

• Applied Materials Inc

Inventors

• Huang Xi
• Xu Wenlong

Classifications

• G03F7/40 Primary

  Treatment after imagewise removal, e.g. baking · CPC title

• C25F3/06

  of iron or steel · CPC title

• C23C16/4404 Primary

  Coatings or surface treatment on the inside of the reaction chamber or on parts thereof · CPC title

• C25F3/14

  locally · CPC title

• C23C14/564 Primary

  Means for minimising impurities in the coating chamber such as dust, moisture, residual gases · CPC title