Integrated pressure sensor with double measuring scale, pressure measuring device including the integrated pressure sensor, braking system, and method of measuring a pressure using the integrated pressure sensor

Patent metadata

Field	Value
Publication number	US-2016349129-A1
Application number	US-201614989709-A
Country	US
Kind code	A1
Filing date	Jan 6, 2016
Priority date	May 27, 2015
Publication date	Dec 1, 2016
Grant date	—

Abstract

A pressure sensor with double measuring scale includes: a flexible body designed to undergo deflection as a function of a the pressure; piezoresistive transducers for detecting the deflection; a first focusing region designed to concentrate, during a first operating condition, a first value of the pressure in a first portion of the flexible body so as to generate a deflection of the first portion of the flexible body; and a second focusing region designed to concentrate, during a second operating condition, a second value of said pressure in a second portion of the flexible body so as to generate a deflection of the second portion of the flexible body. The piezoresistive transducers correlate the deflection of the first portion of the flexible body to the first pressure value and the deflection of the second portion of the flexible body to the second pressure value.

First claim

1 . A pressure sensor with double measuring scale, configured to receive a pressure acting in a direction, comprising:
a flexible body configured to undergo, at least in part, deflection as a function of said pressure; a first substrate arranged facing a first side of the flexible body; a transduction assembly configured to generate a first output signal and a second output signal as a function of deflections of respective first and second portions of the flexible body; a first focusing region arranged between the first substrate and the flexible body and configured to concentrate, during a first operating condition, a first pressure value of said pressure in the first portion of the flexible body and generate a deflection of only the first portion of the flexible body; and a second focusing region arranged between the first substrate and the flexible body and configured to concentrate, during a second operating condition, a second pressure value of said pressure in a second portion of the flexible body and generate a deflection of the second portion of the flexible body, the transduction assembly being configured to generate the first output signal during the first operating condition by correlating the deflection of the first portion of the flexible body to the first pressure value, and to generate the second output signal during the second operating condition by correlating the deflection of the second portion of the flexible body to the second pressure value.

2 . The pressure sensor according to claim 1 , further comprising a cavity between the first substrate and the flexible body, wherein the first focusing region extends in the cavity and has a first thickness equal to a distance existing between the first substrate and the flexible body, and the second focusing region extends in the cavity and has a second thickness smaller than said first thickness.

3 . The pressure sensor according to claim 1 , wherein:
the second focusing regions protrude from the first substrate and surround, at least in part, the first focusing region, and the first substrate is configured to undergo deflection in the direction of application of the pressure, and the second focusing regions are configured to trigger passage from the first operating condition to the second operating condition by contacting the flexible body.

4 . The pressure sensor according to claim 1 , further comprising:
a second substrate facing a second side, opposite to the first side, of the flexible body; and spacers extending between the second substrate and the flexible body, defining a cavity, on which the flexible body is suspended, so that the flexible body forms a membrane configured to undergo deflection during the second operating condition.

5 . The pressure sensor according to claim 1 , further comprising a buried first cavity extending within said flexible body, directly facing the first portion of the flexible body in such a way that the first portion of the flexible body extends suspended on the buried first cavity to form a membrane.

6 . The pressure sensor according to claim 5 , further comprising a second cavity between the first substrate and the flexible body, wherein the first focusing region extends in the second cavity and has a first thickness equal to a distance existing between the first substrate and the flexible body, and the second focusing region extends in the second cavity and has a second thickness smaller than said first thickness, wherein the thickness of the second focusing regions in said direction, and a dimension of the buried first cavity in said direction, are chosen in such a way that the membrane comes into contact with a bottom of the buried first cavity upon contact between the second focusing regions and the flexible body.

7 . The pressure sensor according to claim 6 , wherein the dimension of the buried first cavity in the direction of action of the pressure is equal to a corresponding dimension of the second cavity at the second focusing regions.

8 . The pressure sensor according to claim 5 , wherein said transduction assembly comprises first piezoresistive elements arranged, at least in part, in said membrane.

9 . The pressure sensor according to claim 5 , wherein said transduction assembly further comprises second piezoresistive elements arranged in the second portion of the flexible body, outside said membrane.

10 . The pressure sensor according to claim 9 , wherein said second portion of the flexible body that houses the second piezoresistive elements is a solid and compact region of the flexible body.

11 . The pressure sensor according to claim 9 , wherein the first piezoresistive elements are electrically connected together in a first Wheatstone-bridge circuit, or a first ring oscillator circuit, configured to supply the first output signal; and the second piezoresistive elements are electrically connected together in a second Wheatstone-bridge circuit, or a second ring oscillator circuit, configured to supply the second output signal.

12 . The pressure sensor according to claim 5 , wherein the membrane has a thickness in the direction of action of the pressure between 1 μm and 60 μm.

13 . The pressure sensor according to claim 1 , wherein said first pressure value is smaller than the second pressure value, in particular the first pressure value is in a range 0-20 N, and said second pressure value is higher than 20 N.

14 . The pressure sensor according to claim 1 , wherein the flexible body includes:
a monolithic region having a thickness at the second portion along the direction of action of the pressure, between 50 μm and 900 μm; and an interface layer, extending between the monolithic region and the first and second focusing regions, configured to distribute said pressure uniformly over said monolithic region.

15 . The pressure sensor according to claim 1 , further comprising a communication interface configured to enable communication of the first output signal and/or second output signal to an external read circuit, the communication interface including a first inductor winding integrated in the flexible body and a second inductor winding integrated in the first substrate.

16 . The pressure sensor according to claim 1 , further comprising a first winding integrated in the flexible body and configured to inductively couple with a second winding of a printed-circuit board external to said pressure sensor, to form a interface for communication of the first output signal and/or the second output signal to said printed circuit board.

17 . A pressure measuring device, comprising:
a measuring circuit; and a sensor assembly electrically coupled to the measuring circuit and including a pressure sensor with double measuring scale, the pressure sensor being configured to receive a pressure acting in a direction and including:
a flexible body configured to undergo, at least in part, deflection as a function of said pressure;
a first substrate arranged facing a first side of the flexible body;
a transduction assembly configured to generate a first output signal and a second output signal as a function of deflections of respective first and second portions of the flexible body;
a first focusing region arranged between the first substrate and the flexible body and configured to concentrate, during a first operating condition, a first pressure value of said pressure in the first portion of the flexible body and generate a deflection of only the first portion of the flexible body; and
a second focusing region arranged between the first substrate and the fl

Assignees

• St Microelectronics Srl

Inventors

• Pagani Alberto
• Murari Bruno
• Ferrera Marco
• Giusti Domenico
• Caltabiano Daniele

Classifications

• G01L9/0045

  Diaphragm associated with a buried cavity · CPC title

• G01L9/0052 Primary

  of piezoresistive elements (circuits therefor G01L9/06) · CPC title

• G01L15/00

  Devices or apparatus for measuring two or more fluid pressure values simultaneously · CPC title

• G01L9/0054 Primary

  integral with a semiconducting diaphragm · CPC title