Clamping system and substrate-cutting apparatus employing the same

Patent metadata

Field	Value
Publication number	US-2016346948-A1
Application number	US-201514957712-A
Country	US
Kind code	A1
Filing date	Dec 3, 2015
Priority date	Jun 1, 2015
Publication date	Dec 1, 2016
Grant date	—

Abstract

A clamping system includes a clamp unit lengthwise extended across a working line direction along which a cutting process of a mother substrate is performed; a clamp unit on the clamp unit body, the clamp unit including a vacuum clamp to which the mother substrate is fixable via vacuum absorption; and a vacuum system which provides the vacuum absorption via which the mother substrate is fixed to the vacuum clamp.

First claim

What is claimed is:

1 . A clamping system comprising:
a clamp unit body lengthwise extended across a working line direction along which a cutting process of a mother substrate is performed; a clamp unit on the clamp unit body, the clamp unit comprising a vacuum clamp to which the mother substrate is fixable via vacuum absorption; and a vacuum system which provides the vacuum absorption via which the mother substrate is fixed to the vacuum clamp.

2 . The clamping system of claim 1 , wherein
the vacuum clamp comprises a clamping chuck in which a vacuum hole is defined in a first surface thereof which contacts the mother substrate when the mother substrate is fixed to the vacuum clamp, and in a state of the clamping chuck near the mother substrate, the vacuum absorption provided by the vacuum system fixes the mother substrate to the clamping chuck.

3 . The clamping system of claim 2 , wherein the clamping chuck of the vacuum clamp is rotatable within the vacuum clamp.

4 . The clamping system of claim 1 , wherein the mother substrate which is fixable to the clamp unit via vacuum absorption comprises an upper plate and a lower plate.

5 . The clamping system of claim 4 , wherein the mother substrate which is fixable to the clamp unit via vacuum absorption comprises a liquid crystal display panel comprising the upper plate and the lower plate bonded to each other, each of the upper and lower plates comprising a transparent substrate.

6 . A substrate-cutting apparatus comprising:
a scribe unit by which a scribe line is formed on a mother substrate; and a clamping system by which a position of the mother substrate is fixable with respect to the scribe unit, the clamping system restricting movement of the mother substrate when the scribe line is formed is formed on the mother substrate, wherein the clamping system comprises:
a clamp unit body lengthwise extended across a working line direction along which a cutting process of the mother substrate is performed via the scribe unit with reference to the scribe line formed on the mother substrate;
a clamp unit on the clamp unit body, the clamp unit comprising a vacuum clamp to which the mother substrate is fixable via vacuum absorption; and
a vacuum system which provides the vacuum absorption via which the mother substrate is fixed to the vacuum clamp.

7 . The apparatus of claim 6 , wherein
the vacuum clamp comprises a clamping chuck in which a vacuum hole is defined in a first surface thereof which contacts the mother substrate when the mother substrate is fixed to the vacuum clamp, and in a state of the clamping chuck near the mother substrate, the vacuum absorption provided by the vacuum system fixes the mother substrate to the clamping chuck.

8 . The apparatus of claim 7 , wherein the clamping chuck of the vacuum clamp is rotatable within the vacuum clamp.

9 . The apparatus of claim 6 , further comprising a substrate transportation unit by which the mother substrate is transported to a location at which the scribe unit forms the scribe line.

10 . The apparatus of claim 9 , wherein the clamp unit body on which the clamp unit is disposed is disposed above the substrate transportation unit and lengthwise extended across the working line direction.

11 . The apparatus of claim 6 , wherein the mother substrate which is fixable to the clamp unit via vacuum absorption comprises an upper plate and a lower plate.

12 . The apparatus of claim 11 , wherein the mother substrate which is fixable to the clamp unit via vacuum absorption comprises a liquid crystal display panel comprising the upper plate and the lower plate bonded to each other, each of the upper and lower plates comprising a transparent substrate.

13 . The apparatus of claim 11 , further comprising a substrate transportation unit by which the mother substrate is transported to a location at which the scribe unit forms the scribe line.

14 . The apparatus of claim 13 , wherein the clamp unit body on which the clamp unit is disposed is disposed above the substrate transportation unit and lengthwise extended across the working line direction.

15 . The clamping system of claim 2 , wherein
in the state of the clamping chuck near the mother substrate, the vacuum absorption provided by the vacuum system fixes only a lower surface of the mother substrate to the first surface of the clamping chuck.

16 . The apparatus of claim 7 , wherein
in the state of the clamping chuck near the mother substrate, the vacuum absorption provided by the vacuum system fixes only a lower surface of the mother substrate to the first surface of the clamping chuck.

Assignees

• Samsung Display Co Ltd

Inventors

• Lee Kwonil

Classifications

• B26D7/018 Primary

  Holding the work by suction · CPC title

• B26D3/085

  On sheet material · CPC title

• G02F1/1303

  Apparatus specially adapted to the manufacture of LCDs · CPC title

• G02F1/133351

  Manufacturing of individual cells out of a plurality of cells, e.g. by dicing · CPC title